IP Library Granted Patent US 10,770,504
Granted Patent B2
US 10,770,504 · App. 16/207,622 · Granted Sep 8, 2020

Wide spectrum optical sensor

Inventors: Yun-Chung Na (Zhubei, TW); Szu-Lin Cheng (Zhubei, TW); Shu-Lu Chen (Zhubei, TW); Han-Din Liu (Sunnyvale, CA); Hui-Wen Chen (Zhubei, TW); Che-Fu Liang (Zhubei, TW)
Assignee: Artilux, Inc.
H01L27/14647H01L27/1443H01L27/14652H01L31/028H01L31/035281H01L31/103H01L31/105H01L31/1013H02S40/44
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Quick Facts
Patent No.
US 10,770,504
App. No.
16/207,622
Granted
Sep 8, 2020
Kind
B2
Abstract

An optical sensor including a semiconductor substrate; a first light absorption region formed in the semiconductor substrate, the first light absorption region configured to absorb photons at a first wavelength range and to generate photo-carriers from the absorbed photons; a second light absorption region formed on the first light absorption region, the second light absorption region configured to absorb photons at a second wavelength range and to generate photo-carriers from the absorbed photons; and a sensor control signal coupled to the second light absorption region, the sensor control signal configured to provide at least a first control level and a second control level.

Claims (68)

1. An optical sensor comprising:

a semiconductor substrate;

a first gate formed on the semiconductor substrate;

a die supported by the semiconductor substrate;

a first light absorption region formed in the die, wherein the first light absorption region is configured to:

absorb first photons at a first wavelength range; and

generate first photo-carriers from the absorbed first photons;

a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;

a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:

absorb second photons at a second wavelength range; and

generate second photo-carriers from the absorbed second photons; and

a first carrier-collection region formed in the semiconductor substrate, wherein the first carrier-collection region is configured to collect a portion of the first photo-carriers and has a polarity; and

a second carrier-collection region formed in the semiconductor substrate, wherein the second carrier-collection region is configured to collect a portion of the second photo-carriers and has a polarity opposite to the polarity of the first carrier-collection region.

2. The optical sensor of claim 1 , wherein the portion of the first photo-carriers collected by the first carrier-collection region are provided by the first light absorption region, the optical sensor further comprising:

a first readout region coupled to a first readout circuitry and has a polarity, the first readout region configured to provide the portion of the first photo-carriers collected by the first carrier-collection region to the first readout circuitry;

and a second readout region coupled to a second readout circuitry, wherein the second readout region has a polarity opposite to the polarity of the first readout region.

3. The optical sensor of claim 2 , further comprising:

a first control signal source coupled to the first gate, wherein a first control signal from the first control signal source controls carrier transport between the first carrier-collection region and the first readout region.

4. The optical sensor of claim 3 , further comprising:

a second gate formed on the semiconductor substrate, wherein:

the second gate is coupled to a second control signal source; and

a second control signal from the second control signal source controls carrier transport between the second carrier-collection region and the second readout region.

5. The optical sensor of claim 2 , wherein the portion of the second photo-carriers are distinct from the portion of the first photo-carriers.

6. The optical sensor of claim 2 , further comprising:

a second gate formed on the semiconductor substrate, wherein:

the second gate is coupled to a second control signal source; and

a second control signal from the second control signal source controls carrier transport between the second carrier-collection region and the second readout region.

7. The optical sensor of claim 2 , wherein the portion of the second photo-carriers collected by the second carrier-collection region are provided by the second light absorption region,

and the second readout region configured to provide the portion of the second photo-carriers collected by the second carrier-collection region to the second readout circuitry.

8. The optical sensor of claim 2 , wherein the first wavelength range is distinct from the second wavelength range.

9. The optical sensor of claim 1 , wherein the first carrier-collection region is between the second carrier-collection region and the first light absorption region.

10. An optical sensor comprising:

a semiconductor substrate;

a first gate formed on the semiconductor substrate;

a die supported by the semiconductor substrate;

a first light absorption region formed in the die, wherein the first light absorption region is configured to:

absorb first photons at a first wavelength range; and

generate first photo-carriers from the absorbed first photons;

a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;

a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:

absorb second photons at a second wavelength range; and

generate second photo-carriers from the absorbed second photons;

a first readout region coupled to a first readout circuitry, wherein the first readout region has a polarity; and

a second readout region coupled to a second readout circuitry, wherein the second readout region has a polarity opposite to the polarity of the first readout region.

11. The optical sensor of claim 10 , further comprising:

a second gate formed on the semiconductor substrate, wherein a part of the bonding layer is between the second gate and the die.

12. The optical sensor of claim 10 , wherein the first wavelength range is distinct from the second wavelength range.

13. The optical sensor of claim 10 , wherein the second light absorption region and the first light absorption region overlap along a direction of an optical signal.

14. An optical sensor comprising:

a semiconductor substrate;

a first gate formed on the semiconductor substrate;

a die supported by the semiconductor substrate;

a first light absorption region formed in the die, wherein the first light absorption region is configured to:

absorb first photons at a first wavelength range; and

generate first photo-carriers from the absorbed first photons; and

a bonding layer between the semiconductor substrate and the die, wherein a part of the bonding layer is between the first gate and the die;

a second light absorption region formed in the semiconductor substrate, wherein the second light absorption region is configured to:

absorb second photons at a second wavelength range; and

generate second photo-carriers from the absorbed second photons;

a first carrier-collection region formed in the semiconductor substrate; and

a second carrier-collection region formed in the semiconductor substrate, wherein the first carrier-collection region is between second carrier-collection region and the first light absorption region.

15. The optical sensor of claim 14 , wherein a surface of the first light absorption region is flush with a surface of the die.

16. The optical sensor of claim 14 , wherein the first light absorption region comprises a p-doped region, an n-doped region, and an intrinsic region formed between the p-doped region and the n-doped region.

17. The optical sensor of claim 14 , wherein the first light absorption region comprises an intrinsic region comprising germanium.

18. The optical sensor of claim 14 , wherein the optical sensor further comprises:

a first readout region coupled to a first readout circuitry, the first readout region configured to provide a portion of the first photo-carriers collected by the first carrier-collection region to the first readout circuitry.

19. The optical sensor of claim 18 , further comprising:

a second readout region coupled to a second readout circuitry, the second readout region configured to provide the portion of the second photo-carriers collected by the second carrier-collection region to the second readout circuitry.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2019
From: ARTILUX CORPORATION
To: ARTILUX, INC.
Reel/Frame 049577/0289 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2018
From: NA, YUN-CHUNG; CHENG, SZU-LIN; CHEN, SHU-LU; LIU, HAN-DIN; CHEN, HUI-WEN; LIANG, CHE-FU
To: ARTILUX CORPORATION
Reel/Frame 050887/0271 →
Continuity (10)
Continuation 15803591 · Nov 3, 2017
Continuation 15248618 · Aug 26, 2016
Provisional Application 62271386 · Dec 28, 2015
Provisional Application 62251691 · Nov 6, 2015
Provisional Application 62217031 · Sep 11, 2015
Provisional Application 62216344 · Sep 9, 2015
Provisional Application 62210991 · Aug 28, 2015
Provisional Application 62211004 · Aug 28, 2015
Provisional Application 62210946 · Aug 27, 2015
Related Publication 20190103435A1 · Apr 4, 2019
Cited By (2)
US 12,527,097 US 12,652,869