IP Library Granted Patent US 11,036,004
Granted Patent B2
US 11,036,004 · App. 16/214,365 · Granted Jun 15, 2021

Compact and low loss Y-junction for submicron silicon waveguide

Inventors: Yang Liu (Elmhurst, NY); Yangjin Ma (Brooklyn, NY); Ruizhi Shi (New York, NY); Michael J. Hochberg (New York, NY); Yi Zhang (Elkton, DE); Shuyu Yang (Newark, DE); Thomas Wetteland Baehr-Jones (Arcadia, CA)
Assignee: Nokia Solutions & Networks Oy
G02B6/125G02B6/107G02B6/1228G02B6/2808G02B27/0012G06F30/20G06F30/23G06F30/394G06N3/126G02B6/1223G02B2006/1215G02B2006/12038G02B2006/12061
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Quick Facts
Patent No.
US 11,036,004
App. No.
16/214,365
Granted
Jun 15, 2021
Kind
B2
Abstract

A compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguides. The design was performed using FDTD and particle swarm optimization (PSO). The device was fabricated in a 248 nm CMOS line. Measured average insertion loss is 0.28±0.02 dB across an 8-inch wafer. The device footprint is less than 1.2 μm×2 μm, orders of magnitude smaller than MMI and directional couplers.

Claims (29)

1. An optical device comprising:

a Y-junction comprising a portion of a substrate and a silicon device layer on the substrate, the Y-junction comprising:

an input port for inputting an optical signal to the Y-junction;

a pair formed of a first output port and a second output port, the first and second output ports for outputting respective first and second portions of the optical signal from the Y-junction;

a tapered section of the silicon device layer connecting the input port to the pair of output ports, the tapered section having a first width across the input port and a second width across the pair of output ports;

wherein a width of the tapered section is greater than the first width and is greater than the second width between the input port and the pair.

2. The device according to claim 1 , wherein the input port and the first and second output ports, each have a width of 0.5 μm.

3. The device according to claim 2 , further comprising a gap between the first and second output ports; wherein the gap has a width of 0.2 μm.

4. The device according to claim 2 , wherein a maximum width of the tapered section is less than 1.4 μm.

5. The device according to claim 4 , wherein a total length of the tapered section is less than 2 μm.

6. The device according to claim 1 , wherein the tapered section is symmetrical about a the propagation direction to ensure balanced output at the first and second output ports.

7. The device according to claim 1 , wherein the Y-junction has a silicon oxide cladding.

8. The device according to claim 1 , wherein a width of the tapered section proximate to a half way point thereof comprises a maximum width of the tapered section.

9. The device according to claim 1 , wherein the tapered section comprises a plurality of segments of equal length in a propagation direction.

10. The device according to claim 9 , wherein a plurality of adjacent segments proximate a half way point of the tapered section comprises a maximum width of the tapered segment.

11. The device according to claim 10 , wherein the plurality of adjacent segments comprises four segments.

12. The device according to claim 11 , wherein the plurality of segments comprises thirteen segments.

13. The optical device of claim 1 , further comprising:

a first silicon optical waveguide connected to the input port; and

second and third silicon optical waveguides connected to the first and second output ports, respectively.

14. The optical device of claim 13 , wherein the silicon optical waveguides are submicron optical waveguides.

15. The optical device of claim 1 , further comprising a Mach-Zehnder modulator including the Y-junction.

16. The optical device of claim 1 , further comprising a transceiver including the Y-junction.

17. The optical device of claim 1 , wherein a maximum width of the tapered section between the input port and the pair is greater than the first width and is greater than the second width.

18. The optical device of claim 17 , further comprising a Mach-Zehnder modulator including the Y-junction.

19. The optical device of claim 17 , further comprising:

a first silicon optical waveguide connected to the input port; and

second and third silicon optical waveguides connected to the first and second output ports, respectively.

20. The optical device of claim 19 , wherein the silicon optical waveguides are submicron optical waveguides.

Assignments (8)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 10, 2023
From: ELENION TECHNOLOGIES LLC
To: NOKIA SOLUTIONS AND NETWORKS OY
Reel/Frame 063273/0611 →
RELEASE OF SECURITY INTEREST Recorded Mar 27, 2020
From: HERCULES CAPITAL, INC.
To: ELENION TECHNOLOGIES CORPORATION; ELENION TECHNOLOGIES, LLC
Reel/Frame 052251/0186 →
SECURITY INTEREST Recorded Feb 8, 2019
From: ELENION TECHNOLOGIES, LLC; ELENION TECHNOLOGIES CORPORATION
To: HERCULES CAPITAL INC., AS AGENT
Reel/Frame 048289/0060 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2018
From: HOCHBERG, MICHAEL
To: CORIANT ADVANCED TECHNOLOGY, LLC
Reel/Frame 047729/0743 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2018
From: LIU, YANG; MA, YANGJIN; SHI, RUIZHI; HOCHBERG, MICHAEL J.
To: CORIANT ADVANCED TECHNOLOGY, LLC
Reel/Frame 047729/0874 →
CHANGE OF NAME Recorded Dec 10, 2018
From: CORIANT ADVANCED TECHNOLOGY, LLC
To: ELENION TECHNOLOGIES, LLC
Reel/Frame 048962/0856 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2018
From: ZHANG, YI; YANG, SHUYU; BAEHR-JONES, TOM
To: UNIVERSITY OF DELAWARE
Reel/Frame 047729/0365 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2018
From: UNIVERSITY OF DELAWARE
To: HOCHBERG, MICHAEL
Reel/Frame 047729/0560 →
Continuity (6)
Continuation 15825266 · Nov 29, 2017
Continuation 15446375 · Mar 1, 2017
Continuation 14834597 · Aug 25, 2015
Continuation 14093263 · Nov 29, 2013
Provisional Application 61731502 · Nov 30, 2012
Related Publication 20200026002A1 · Jan 23, 2020