Substrate transport vacuum platform
An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
1. An apparatus comprising:
a device comprising a robot arm connected to a robot drive, where the robot arm comprises an end effector configured to support at least one substrate thereon; and
a transport having the device connected thereto, where the transport is configured to carry the device, where the transport comprises:
a first support comprising a first capacitive interface; and
a second support comprising a second capacitive interface,
where the second support is movably connected relative to the first support along a linear path, and where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling and to allow heat transfer between the first and second capacitive interfaces.
2. An apparatus as in claim 1 where the capacitive interfaces comprise interleaved opposing surfaces configured to transfer heat to one another by radiation and convection as a function of pressure.
3. An apparatus as in claim 1 where the apparatus comprises:
at least one magnetic bearing which at least partially couples the first and second supports to one another, where a first one of the magnetic bearings comprises a first permanent magnet and a second magnet, where the first permanent magnet is connected to the first support; and
a magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
4. An apparatus as in claim 3 where the second magnet is connected to one of the first support and the second support.
5. An apparatus as in claim 3 where the second magnet comprises an electromagnet or a permanent magnet.
6. An apparatus as in claim 1 where the supports comprise at least one stationary guide rail.
7. An apparatus as in claim 3 where the first support comprises a heat radiator thereon, where the first magnetic bearing is a non-contacting bearing, and where the apparatus further comprises:
a first power coupling between the first support and the second support, where the first power coupling is a non-contacting power coupling; and
a first heat pump connected to the first support, where at least one of the first magnetic bearing and the first power coupling comprise at least one active heat generating component, and where the first heat pump is configured to pump heat from the at least one active heat generating component to the heat radiator.
8. An apparatus as in claim 1 further comprising a non-contacting communications coupling between the supports.
9. A substrate transport apparatus comprising:
a chamber forming an enclosed environment; and
the apparatus as in claim 1 , where the apparatus comprises a movable enclosure inside the chamber, and where the second support is stationarily connected to a wall of the movable enclosure.
10. An apparatus comprising:
a device comprising a robot arm connected to a robot drive, where the robot arm comprises an end effector configured to support at least one substrate thereon; and
a transport having the device connected thereto, where the transport is configured to carry the device, where the transport comprises:
a first support comprising a first capacitive interface; and
a second support comprising a second capacitive interface,
where the second support is movably connected relative to the first support along a linear path, and where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling, and where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a heat transfer interface between the first and second capacitive interfaces.
11. An apparatus as in claim 10 where the capacitive interfaces comprise interleaved opposing surfaces as the heat transfer interface configured to transfer heat to one another by radiation and convection.
12. A substrate transport apparatus comprising:
a chamber forming an enclosed environment; and
the apparatus as in claim 10 , where the apparatus comprises a movable enclosure inside the chamber, and where the second support is stationarily connected to a wall of the movable enclosure.
13. An apparatus as in claim 10 where the apparatus comprises:
at least one magnetic bearing which at least partially couples the first and second supports to one another, where a first one of the magnetic bearings comprises a first permanent magnet and a second magnet, where the first permanent magnet is connected to the first support; and
a magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
14. An apparatus comprising:
a device configured to support at least one substrate thereon; and
a transport having the device connected thereto, where the transport is configured to carry the device, where the transport comprises:
a first support comprising a first capacitive interface; and
a second support comprising a second capacitive interface,
where the second support is movably connected relative to the first support along a linear path, where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling and to allow heat transfer between the first and second capacitive interfaces, and where the capacitive interfaces comprise interleaved opposing surfaces configured to transfer heat to one another by radiation and convection.
15. A substrate transport apparatus comprising:
a chamber forming an enclosed environment; and
the apparatus as in claim 14 , where the apparatus comprises a movable enclosure inside the chamber, and where the second support is stationarily connected to a wall of the movable enclosure.
16. An apparatus as in claim 14 where the apparatus comprises:
at least one magnetic bearing which at least partially couples the first and second supports to one another, where a first one of the magnetic bearings comprises a first permanent magnet and a second magnet, where the first permanent magnet is connected to the first support; and
a magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
17. A substrate transport apparatus comprising:
a chamber; and
a movable enclosure forming an enclosed environment, where the movable enclosure is movably located inside the chamber,
where the apparatus further comprises:
a device comprising a robot arm connected to a robot drive, where the robot arm comprises an end effector configured to support at least one substrate thereon, where at least a portion of the device is located inside the enclosed environment of the movable enclosure; and
a transport configured to move the movable enclosure in the chamber, where the transport comprises:
a first support comprising a first capacitive interface; and
a second support comprising a second capacitive interface,
where the second support is movably connected relative to the first support along a linear path, and where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling,
where the second support is stationarily connected to a portion of the movable enclosure.
18. An apparatus as in claim 17 where the capacitive interfaces comprise interleaved opposing surfaces configured to transfer heat to one another by radiation and convection.
19. An apparatus as in claim 17 where the apparatus comprises:
at least one magnetic bearing which at least partially couples the first and second supports to one another, where a first one of the magnetic bearings comprises a first permanent magnet and a second magnet, where the first permanent magnet is connected to the first support; and
a magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
20. An apparatus comprising:
a device comprising a shuttle, where the device comprises a portion configured to removably support at least one substrate thereon for transporting the substrate along a path of the shuttle; and
a transport having the device connected thereto, where the transport is configured to move the device and the at least one substrate on the portion of the device between at least two locations, where the transport comprises:
a first support comprising a first capacitive interface; and
a second support comprising a second capacitive interface, where the second support is connected to the device,
where the second support is movably connected relative to the first support along a linear path, and where the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling and to allow heat transfer between the first and second capacitive interfaces.
21. The apparatus as claimed in claim 20 where the device comprises a robot on the shuttle, where the robot comprises a robot arm.