IP Library Granted Patent US 11,302,554
Granted Patent B2
US 11,302,554 · App. 16/221,803 · Granted Apr 12, 2022

Micro assembler with fine angle control

Inventors: JengPing Lu (Fremont, CA); Eugene M. Chow (Palo Alto, CA); David K. Biegelsen (Portola Valley, CA)
Assignee: Palo Alto Research Center Incorporated
H01L21/68H01L21/6831H01L21/6833
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Quick Facts
Patent No.
US 11,302,554
App. No.
16/221,803
Granted
Apr 12, 2022
Kind
B2
Abstract

An assembly surface has an array of electrodes arranged such that each of a plurality of chiplets can be positioned to cover at least one of the electrodes. A field generator applies a rotation field that is orthogonal to the clamping force field applied by the electrodes. A processor is operable to determine a desired orientation angle of a first subset of the chiplets and activate one or more of the electrodes so that a second subset of the chiplets different than the first subset is kept from rotating by a clamping force field applied by the one or more of the electrodes. While the clamping force field is being applied, the processor applies the rotation field at the selected angle to cause the first subset of the chiplets to be oriented at the desired orientation angle.

Claims (39)

1. An apparatus, comprising:

an assembly surface comprising an array of electrodes arranged such that each of a plurality of chiplets can be positioned to cover at least one of the electrodes, each of the electrodes capable of being individually activated to apply a clamping force field to one of the chiplets;

a field generator that applies a rotation field that is orthogonal to the clamping force field applied by the electrodes, the field generator comprising an input that selects an angle of the rotation field; and

a processor coupled to the electrodes and the field generator, the processor operable to:

determine a desired orientation angle of a first subset of the chiplets;

activate one or more of the electrodes so that a second subset of the chiplets different than the first subset is kept from rotating by the clamping force field applied by the one or more of the electrodes; and

while the clamping force field is being applied, apply the rotation field at a selected angle to cause the first subset of the chiplets to be oriented at the desired orientation angle.

2. The apparatus of claim 1 , wherein the rotation field comprises a magnetic field and wherein the clamping force field comprises an electrostatic field.

3. The apparatus of claim 2 , wherein the magnetic field is generated by a first pair of coils located on a first pair of opposite sides of the assembly surface and a second pair of coils located on a second pair of opposite sides of the assembly surface different from the first pair of opposite sides, the angle of the rotation field selectable by varying first and second currents applied to the respective first and second pairs of coils.

4. The apparatus of claim 2 , wherein the magnetic field is generated by a pair of magnets, the angle of the rotation field being selected via relative rotation between the magnets and the assembly surface.

5. The apparatus of claim 2 , wherein the chiplets comprise patterned magnetic material such that the chiplets will align with the magnetic field.

6. The apparatus of claim 2 , wherein each of the second subset of chiplets are over two or more of the electrodes, wherein activating the electrodes comprises selecting, for each of the second subset of chiplets, one of the two or more electrodes that will minimize an induced electric field that interferes with the magnetic field.

7. The apparatus of claim 1 , wherein applying the rotation field comprises time-varying a direction of the rotation field around the selected angle to induce small movements in the first subset of the chiplets, the small movements overcoming stiction between the first subset of the chiplets and the assembly surface.

8. The apparatus of claim 1 , wherein the chiplets comprise 2-D materials.

9. An apparatus, comprising:

an assembly surface comprising an array of electrodes arranged such that each of a plurality of chiplets can be positioned to cover at least one of the electrodes, each of the electrodes capable of being individually activated to apply a clamping force field to one of the chiplets;

at least one magnet that is configurable via an input to exert a magnetic field on the chiplets at a selectable angle relative to the assembly surface; and

a processor coupled to the electrodes and the at least one magnet, the processor operable to:

determine a desired orientation angle of a first subset of the chiplets;

activate one or more of the electrodes so that a second subset of the chiplets different than the first subset is kept from rotating by the clamping force field applied by the one or more of the electrodes; and

while the clamping force field is being applied, activate the at least one magnet at a selected angle to cause the first subset of the chiplets to be oriented at the desired orientation angle.

10. The apparatus of claim 9 , wherein the at least one magnet comprises:

a first pair of coils located on a first pair of opposite sides of the assembly surface; and

a second pair of coils located on a second pair of opposite sides of the assembly surface different from the first pair of opposite sides, the selectable angle of the magnetic field selectable by varying first and second currents applied to the respective first and second pairs of coils.

11. The apparatus of claim 9 , wherein the at least one magnet comprises a pair of magnets on opposite sides of the assembly surface, the apparatus further comprising a motor that induces relative rotation between the pair of magnets and the assembly surface, the selectable angle of the magnetic field selected via the motor.

12. The apparatus of claim 9 , wherein the chiplets comprise patterned magnetic material such that the chiplets will align with the magnetic field.

13. The apparatus of claim 9 , wherein each of the second subset of chiplets are over two or more of the electrodes, wherein activating the electrodes comprising selecting, for each of the second subset of chiplets, one of the two or more electrodes that will minimize an induced electric field that interferes with the magnetic field.

14. The apparatus of claim 9 , wherein activating the at least one magnet at the selected angle comprises time-varying a direction of the magnetic field around the selected angle to induce small movements in the first subset of the chiplets, the small movements overcoming stiction between the first subset of the chiplets and the assembly surface.

15. A method comprising:

arranging a plurality of chiplets on an assembly surface such that the chiplets do not interfere with one another, the assembly surface comprising an array of electrodes and the chiplets arranged such that each chiplet is over at least one of the electrodes;

determining a desired orientation angle of a first subset of the chiplets;

activating one or more of the electrodes so that a second subset of the chiplets different than the first subset is kept from rotating by a clamping force field applied by the one or more electrodes; and

applying a rotation field that is orthogonal to the clamping force field applied by the one or more electrodes, an angle of the rotation field selectable to cause the first subset of the chiplets to be oriented at the desired orientation angle.

16. The method of claim 15 , wherein the rotation field comprises a magnetic field and wherein the clamping force field comprises an electrostatic field.

17. The method of claim 16 , wherein the magnetic field is generated by a first pair of coils located on a first pair of opposite sides of the assembly surface and a second pair of coils located on a second pair of opposite sides of the assembly surface different from the first pair of opposite sides, the angle of the rotation field selectable by varying first and second currents applied to the respective first and second pairs of coils.

18. The method of claim 16 , wherein the magnetic field is generated by a pair of magnets, the angle of the rotation field selectable via relative rotation between the magnets and the assembly surface.

19. The method of claim 16 , wherein each of the second subset of chiplets are over two or more of the electrodes, wherein activating the electrodes comprising selecting, for each of the second subset of chiplets, one of the two or more electrodes that will minimize an induced electric field that interferes with the magnetic field.

20. The method of claim 15 , wherein applying the rotation field comprises time-varying a direction of the rotation field around the angle to induce small movements in the first subset of the chiplets, the small movements overcoming stiction between the first subset of the chiplets and the assembly surface.

21. The method of claim 15 , further comprising activating an additional one or more electrodes under at least one chiplet of the first subset to fix a rotation point of the at least one chiplet while allowing the at least one chiplet to rotate around the rotation point in response to the rotation field.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073562/0677 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 17, 2018
From: LU, JENGPING; CHOW, EUGENE M.; BIEGELSEN, DAVID K.
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 047798/0671 →
Continuity (1)
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