Ceramic circuit board and semiconductor module
A ceramic circuit board comprises: a ceramic substrate with a 1.0 mm thickness or less including a first surface and a second surface, the first surface including a first area and a second area; a first metal plate joined to the first area; and a second metal plate joined to the second surface. The second area has a first waviness profile along a first side of the first surface, the first waviness profile having one extreme value or less. The second area has a second waviness profile along a second side of the first surface, the second waviness profile has not less than two nor more than three extreme values.
1. A ceramic circuit board comprising:
a ceramic substrate with a 1.0 mm thickness or less including a first surface and a second surface, the first surface including a first area and a second area;
a first metal plate joined to the first area; and
a second metal plate joined to the second surface,
wherein the first surface extends along a first direction and a second direction across the first direction,
wherein the second area has a first waviness profile along a first side in the first direction of the first surface, the first waviness profile having one extreme value or less, and
wherein the second area has a second waviness profile along a second side in the second direction of the first surface, the second waviness profile having not less than two nor more than three extreme values.
2. The ceramic circuit board according to claim 1 ,
wherein the first waviness profile is substantially arc-shaped, and
wherein the second waviness profile is substantially M-shaped or substantially S-shaped.
3. The ceramic circuit board according to claim 1 , wherein each of the first and second metal plates has a thickness of 0.6 mm or more.
4. The ceramic circuit board according to claim 1 , wherein a thickness of a metal plate having the largest thickness out of the first metal plate and the second metal plate is 1.5 times or less as large as the thickness of the ceramic substrate.
5. The ceramic circuit board according to claim 1 , wherein a length of the first side is 1.25 times or more as long as a length of the second side.
6. The ceramic circuit board according to claim 1 , wherein the ceramic substrate is a silicon nitride substrate having a thickness of 0.30 mm or less.
7. The ceramic circuit board according to claim 1 , wherein at least one plate selected from the group consisting of the first and second metal plates is joined to the ceramic substrate with a joining layer therebetween.
8. The ceramic circuit board according to claim 1 , wherein a difference between a maximum value and a minimum value of at least one profile selected from the group consisting of the first and second waviness profiles is 10 μm or more.
9. The ceramic circuit board according to claim 1 , further comprising a lead terminal with a 0.2 mm thickness or more joined to the first metal plate.
10. The ceramic circuit board according to claim 9 , wherein a difference between a maximum value and a minimum value of at least one profile selected from the group consisting of the first and second waviness profiles is 40 μm or less.
11. A semiconductor module comprising:
the ceramic circuit board according to claim 9 ;
a semiconductor element provided on the first metal plate; and
a heat dissipation member provided on the second metal plate.
12. The ceramic circuit board according to claim 1 ,
wherein the first waviness profile is substantially arc-shaped,
wherein the second waviness profile is substantially M-shaped or substantially S-shaped,
wherein at least one plate selected from the group consisting of the first and second metal plates has a thickness of 0.6 mm or more, and
wherein the ceramic substrate is a silicon nitride substrate having a thickness of 0.30 mm or less.
13. The ceramic circuit board according to claim 8 ,
wherein the first waviness profile is substantially arc-shaped,
wherein the second waviness profile is substantially M-shaped or substantially S-shaped,
wherein at least one plate selected from the group consisting of the first and second metal plates has a thickness of 0.6 mm or more, and
wherein the ceramic substrate is a silicon nitride substrate having a thickness of 0.30 mm or less.
14. The ceramic circuit board according to claim 11 ,
wherein the first waviness profile is substantially arc-shaped,
wherein the second waviness profile is substantially M-shaped or substantially S-shaped,
wherein at least one plate selected from the group consisting of the first and second metal plates has a thickness of 0.6 mm or more, and
wherein the ceramic substrate is a silicon nitride substrate having a thickness of 0.30 mm or less.