Interposer with carbon nanofiber columns
Embodiments relate to the fabrication of an interposer with nanofibers by an additive process to electrically connect two or more electronic components. The nanofibers are grown on a substrate away from a surface of the substrate. The nanofibers are plated with a conductive material such that the nanofibers are encompassed in a column of the conductive material. An insulative material fills at least the volume between the columns of conductive material. The substrate and the interposer is the remaining device. The interposer can be combined with a redistribution layer to connect electronic components of dissimilar pitch.
1. A method comprising:
growing an array of single nanofibers on a surface of a substrate to extend away from the surface;
forming columns of conductive material on surfaces of the array of single nanofibers after growing the array of single nanofibers;
encapsulating the columns of conductive material in insulative material that fills at least space between the columns of conductive material on the surfaces of the array of single nanofibers; and
removing the substrate from the insulative material, the columns of conductive material and the single nanofibers to form an interposer configured to electrically connect a first electronic component at a side of the interposer and a second electronic component at an opposite side of the interposer.
2. The method of claim 1 , wherein forming the conductive material comprises plating the conductive material on the surface of the array of single nanofibers by atomic layer deposition.
3. The method of claim 1 , wherein the conductive material comprises metal and the nanofibers comprise carbon nanofibers.
4. The method of claim 1 , wherein the array of single nanofibers is grown on the surface with a first pitch in a first direction and a second pitch in a second direction perpendicular to the first direction.
5. The method of claim 4 , wherein at least one of the first pitch and the second pitch is on the order of 1 micrometer or smaller.
6. The method of claim 1 , wherein the insulative material comprises silicon.
7. The method of claim 1 , further comprising attaching or forming a redistribution layer on the side or the opposite side of the interposer.
8. The method of claim 1 , wherein growing the plurality of single nanofibers comprises:
depositing a growth catalyst on selected portions of the surface of the substrate; and
performing chemical vapor deposition on the substrate.
9. The method of claim 8 , further comprising removing the growth catalyst from open ends of the nanofibers after growing the plurality of nanofibers.
10. An interposer fabricated by a method comprising:
growing an array of single nanofibers on a surface of a substrate to extend away from the surface;
forming columns of conductive material on surfaces of the array of single nanofibers after growing the array of single nanofibers;
encapsulating the columns of conductive material in insulative material that fills at least space between the columns of conductive material on the surfaces of the array of single nanofibers; and
removing the substrate from the insulating material, the columns of conductive material and the single nanofibers to form an interposer configured to electrically connect a first electronic component at a side of the interposer and a second electronic component at an opposite side of the interposer.
11. The interposer of claim 10 , wherein the array of single nanofibers is grown on the surface with a first pitch in a first direction and a second pitch in a second direction perpendicular to the first direction, at least one of the first pitch and the second pitch on the order of 1 micrometer or smaller.
12. The interposer of claim 10 , wherein the method further comprises attaching or forming a redistribution layer on the side or the opposite side of the interposer.
13. The interposer of claim 10 , wherein the plurality of single nanofibers is grown by:
depositing a growth catalyst on selected portions of the surface of the substrate; and
performing chemical vapor deposition on the substrate.
14. The interposer of claim 13 , wherein the growth catalyst is removed from open ends of the nanofibers after growing the plurality of single nanofibers.