IP Library Granted Patent US 11,056,368
Granted Patent B2
US 11,056,368 · App. 16/257,886 · Granted Jul 6, 2021

Chip transferring method and the apparatus thereof

Inventors: Min-Hsun Hsieh (Hsinchu, TW); De-Shan Kuo (Hsinchu, TW); Chang-Lin Lee (Hsinchu, TW); Jhih-Yong Yang (Hsinchu, TW)
Assignee: EPISTAR CORPORATION
H01L21/67721H01L21/6773H01L21/67144H01L21/67288H01L21/6836H01L33/0075H01L2221/68322H01L2221/68354H01L2221/68368
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Quick Facts
Patent No.
US 11,056,368
App. No.
16/257,886
Granted
Jul 6, 2021
Kind
B2
Abstract

A transferring chips method, including providing a plurality of chips on a first load-bearing structure; dividing the first load-bearing structure into a plurality of blocks, and each of the plurality of blocks including multiple chips of the plurality of chips; measuring a characteristic value of each of the plurality of chips; respectively calculating an average characteristic value of each of the plurality of blocks based on the characteristic values of the multiple chips of each of the plurality of blocks; and transferring the multiple chips of at least two blocks of the plurality of blocks with the average characteristic values within the same range to a second load-bearing structure.

Claims (28)

1. A chip transferring method, comprising:

providing a plurality of chips on a first load-bearing structure, wherein the first load-bearing structure comprises a first surface, and each of the plurality of chips respectively comprises an attaching surface and attaches to the first surface with the attaching surface, and wherein each of the plurality of chips comprises a top surface opposite to the attaching surface;

dividing the first load-bearing structure into a plurality of blocks, and each of the plurality of blocks comprising multiple chips of the plurality of chips;

measuring a photoelectric characteristic value of each of the plurality of chips;

respectively calculating an average photoelectric characteristic value of each of the plurality of blocks based on the photoelectric characteristic values of the multiple chips of each of the plurality of blocks; and

transferring the multiple chips of at least two blocks of the plurality of blocks with the average photoelectric characteristic values within a same range to a second load-bearing structure.

2. The chip transferring method according to claim 1 , further comprising:

cutting the first load-bearing structure according to the plurality of blocks.

3. The chip transferring method according to claim 1 , wherein the photoelectric characteristic value comprises a luminescence, a light-emitting wavelength, an operating voltage or an electric current.

4. The chip transferring method according to claim 1 , wherein the second load-bearing structure comprises a second surface and the second surface comprising an adhesive material.

5. The chip transferring method according to claim 4 , before transferring the multiple chips of at least two blocks of the plurality of blocks with the average photoelectric characteristic values within a same range to a second load-bearing structure, further comprising:

providing a second load-bearing structure;

attaching the second surface of the second load-bearing structure to the plurality of chips;

changing an adhesion between the multiple chips of the other block other than the at least two blocks and the second surface of the second load-bearing structure; and

transferring the multiple chips of the at least two blocks of the plurality of blocks with the average photoelectric characteristic values within the same range to the second load-bearing structure, and leaving the multiple chips of the other block other than the at least two blocks on the first load-bearing structure.

6. The chip transferring method according to claim 5 , wherein the chip transferring method further comprises coating a liquid on the top surface of each of the multiple chips of the other block other than the at least two blocks to form a thin film.

7. The chip transferring method according to claim 6 , wherein the adhesion between top surface of each of the multiple chips of the other block other than the at least two blocks and the second surface is weakened by the thin film.

8. The chip transferring a method according to claim 4 , before transferring the multiple chips of at least two blocks of the plurality of blocks with the average photoelectric characteristic values within a same range to a second load-bearing structure, further comprising:

providing a second load-bearing structure;

attaching the second surface of the second load-bearing structure to the plurality of chips;

changing an adhesion between the multiple chips of the at least two blocks and the second load-bearing structure; and

transferring the multiple chips of the at least two blocks of the plurality of blocks with the average photoelectric characteristic values within the same range to the second load-bearing structure, and leaving the multiple chips of the other block other than the at least two blocks on the first load-bearing structure.

9. The chip transferring method according to claim 8 , wherein each of the multiple chips of the at least two blocks of the plurality of blocks with the average photoelectric characteristic values within the same range comprises a top surface opposite to the attaching surface and a liquid is coated on the top surface of each of the multiple chips of the at least two blocks of the plurality of blocks with the average photoelectric characteristic values within the same range to form a thin film.

10. The chip transferring method according to claim 9 , wherein the adhesion between the top surface of each of the multiple chips of the at least two blocks of the plurality of blocks with the average photoelectric characteristic values within the same range and the second surface is increased by the thin film.

11. The chip transferring method according to claim 1 , further comprising:

recording the photoelectric characteristic value of the plurality of chips to form a wafer map file based on a position of each of the plurality of chips on the first load-bearing structure.

12. The chip transferring method according to claim 1 , before calculating the average photoelectric characteristic value of each of the plurality of blocks, further comprising:

selecting a unqualified photoelectric characteristic value range, and removing the chips with the photoelectric characteristic values falling within the unqualified photoelectric characteristic value range.

Assignments (2)
CHANGE OF NAME Recorded Feb 26, 2026
From: EPISTAR CORPORATION
To: ENNOSTAR CORPORATION
Reel/Frame 075152/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 28, 2019
From: HSIEH, MIN-HSUN; KUO, DE-SHAN; LEE, CHANG-LIN; YANG, JHIH-YONG
To: EPISTAR CORPORATION
Reel/Frame 048159/0215 →
Priority Claims (1)
TW 107102652 · Jan 25, 2018 · national
Continuity (1)
Related Publication 20190229001A1 · Jul 25, 2019
Cited By (1)
US 12,518,995