Ultrasound transducer assembly and method for manufacturing an ultrasound transducer assembly
The present invention relates to an ultrasound transducer assembly, in particular for intravascular ultrasound systems. The ultrasound transducer assembly comprises at least one silicon substrate element including an ultrasound transducer element for emitting and receiving ultrasound waves and including electrical connectors for electrically connecting the transducer element. The substrate element has a top surface, a bottom surface and a side surface connecting the top surface and the bottom surface. An isolation layer forms the side surface for electrically isolating the substrate element.
1. An ultrasound system, comprising:
a catheter configured to be inserted into vasculature; and
an ultrasound transducer assembly coupled to the catheter and comprising:
a first silicon substrate and a second silicon substrate, each of the first and second silicon substrates including a plurality of ultrasound transducers configured to emit and receive ultrasound waves;
a flexible connection layer formed over a first surface of the first silicon substrate and coupling the first silicon substrate and the second silicon substrate; and
an isolation layer formed on a second surface of the first silicon substrate and electrically isolating the first silicon substrate from the second silicon substrate,
wherein the flexible connection layer comprises a first electrical interconnect electrically connecting the first silicon substrate and the second silicon substrate.
2. The ultrasound system of claim 1 , wherein the first surface is a top surface of the first silicon substrate, and wherein the second surface is a side surface of the first silicon substrate.
3. The ultrasound system of claim 1 , wherein the first surface is a top surface of the first silicon substrate, and wherein the second surface is the top surface of the first silicon substrate.
4. The ultrasound system of claim 1 , wherein the flexible connection layer is directly connected to the isolation layer.
5. The ultrasound system of claim 1 , wherein the ultrasound transducer assembly further comprises a third silicon substrate and a fourth silicon substrate, wherein the flexible connection layer couples the third and fourth silicon substrates, and wherein the flexible connection layer comprises:
a first layer comprising the first electrical interconnect; and
a second layer comprising a second electrical interconnect electrically connecting the first silicon substrate and the second silicon substrate.
6. The ultrasound system of claim 1 , wherein the first and second silicon substrates are separated from one another.
7. The ultrasound system of claim 1 , wherein the plurality of ultrasound transducers comprises capacitive micro-machined ultrasound transducers.
8. The ultrasound system of claim 1 , wherein the first silicon substrate at least partially forms a circular support element, and wherein the ultrasound transducer assembly further comprises:
a connection pad formed over the first surface of the first silicon substrate;
an opening in the circular support element adjacent to the connection pad; and
a connection wire inserted into the opening and electrically coupled to the connection pad.
9. The ultrasound system of claim 8 , wherein the isolation layer is positioned adjacent the connection wire.
10. The ultrasound system of claim 9 , further comprising a third silicon substrate coupled to the second silicon substrate by the flexible connection layer, wherein the second and third silicon substrate are positioned around the circular support element.
11. The ultrasound system of claim 10 , further comprising a lower support element coupled to and radially supporting the third silicon substrate.
12. The ultrasound system of claim 1 , further comprising a plurality of isolation layers formed on different surfaces of the first silicon substrate.
13. The ultrasound system of claim 1 , wherein the isolation layer is formed of an etch stop layer.