Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device
An object of the present invention is to provide a solution which is excellent in both the temporal stability of an organic solvent and the defect inhibition properties. Another object of the present invention is to provide a solution storage body storing the solution, an actinic ray-sensitive or radiation-sensitive resin composition containing the solution, and a pattern forming method and a manufacturing method of a semiconductor device using the solution. The solution of the present invention is a solution containing an organic solvent and a stabilizer, in which a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm.
1. A solution comprising:
an organic solvent;
a stabilizer; and
an organic impurity,
wherein a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm,
a content of the organic solvent with respect to the total mass of the solution is equal to or greater than 98.00% by mass,
a content of the organic impurity with respect to the total mass of the solution is 0.01 to 10,000 mass ppm, and
the solution satisfies any of the following conditions 1 to 12,
condition 1: the organic solvent is propylene glycol monomethyl ether acetate, the organic impurity is propylene glycol;
condition 2: the organic solvent is propylene glycol monomethyl ether, the organic impurity is methanol;
condition 3: the organic solvent is propylene glycol monoethyl ether, the organic impurity is ethanol;
condition 4: the organic solvent is propylene glycol monopropyl ether, the organic impurity is propanol;
condition 5: the organic solvent is ethyl lactate, the organic impurity is ethanol;
condition 6: the organic solvent is cyclopentanone, the organic impurity is cyclopentanol;
condition 7: the organic solvent is cyclohexanone, the organic impurity is cyclohexanol;
condition 8: the organic solvent is y-butyrolactone, the organic impurity is hydroxybutyrate;
condition 9: the organic solvent is butyl acetate, the organic impurity is 1-butanol;
condition 10: the organic solvent is 4-methyl-2-pentanol, the organic impurity is 1-methyl butanol;
condition 11: the organic solvent is 1,4-dioxane, the organic impurity is at least one kind of compound selected from the group 1,2-dioxane and 1,3-dioxane; and
condition 12: the organic solvent is tetrahydrofuran, the organic impurity is 1,4-butanediol.
2. The solution according to claim 1 that is used for a semiconductor device manufacturing process.
3. The solution according to claim 1 ,
wherein a content of a metal component containing an element selected from the group consisting of Fe, Cr, Ni, and Pb with respect to the total mass of the solution is 0.001 to 1,000 mass ppt.
4. The solution according to claim 3 ,
wherein the content of the metal component containing an element selected from the group consisting of Fe, Cr, Ni, and Pb with respect to the total mass of the solution is 0.1 to 1,000 mass ppt.
5. The solution according to claim 1 ,
wherein the stabilizer is an antioxidant.
6. The solution according to claim 5 ,
wherein the antioxidant is at least one kind of compound selected from the group consisting of dibutylhydroxytoluene, hydroquinone, didodecyl 3,3′-thiodipropionate, dioctadecyl 3,3′-thiodipropionate, ditetradecyl 3,3′-thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), 2,2′-methylenebis-(4-ethyl-6-t-butylphenol), butylhydroxyanisole, tris (2-ethylhexyl) phosphite, 2-hydroxy-4-methoxybenzophenone, and triisodecyl phosphite.
7. The solution according to claim 5 ,
wherein a boiling point of the antioxidant is 150° C. to 500° C.
8. The solution according to claim 1 ,
wherein the number of objects to be counted that are counted by a light scattering-type liquid-borne particle counter and have a size equal to or greater than 0.1 μm is equal to or smaller than 100/mL.
9. The solution according to claim 1 ,
wherein a content of water with respect to the total mass of the solution is 0.01% to 1.0% by mass.
10. The solution according to claim 1 ,
wherein a content of a peroxide with respect to the total mass of the solution is 0.01 to 10 mass ppm.
11. The solution according to claim 1 that is used for at least one use selected from a prewet solution, a developer, a rinse solution, and a solvent contained in an actinic ray-sensitive or radiation-sensitive resin composition in a semiconductor device manufacturing process.
12. The solution according to claim 1 ,
wherein the content of the stabilizer with respect to a total mass of the solution is 0.1 to 3 mass ppm.
13. The solution according to claim 1 ,
wherein the stabilizer is an antioxidant, and
the antioxidant is at least one kind of compound selected from the group consisting of didodecyl 3,3′-thiodipropionate, dioctadecyl 3,3′-thiodipropionate, ditetradecyl 3,3′-thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), 2,2′-methylenebis-(4-ethyl-6-t-butylphenol), butylhydroxyanisole, tris (2-ethylhexyl) phosphite, 2-hydroxy-4-methoxybenzophenone, and triisodecyl phosphite.
14. The solution according to claim 1 ,
wherein the stabilizer is an antioxidant, and the antioxidant is at least one kind of compound selected from the group consisting of hydroquinone, didodecyl 3,3′-thiodipropionate, dioctadecyl 3,3′-thiodipropionate, ditetradecyl 3,3′-thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), 2,2′-methylenebis-(4-ethyl-6-t-butylphenol), tris (2-ethylhexyl) phosphite, 2-hydroxy-4-methoxybenzophenone, and triisodecyl phosphite.
15. The solution according to claim 1 ,
wherein the solution contains objects to be counted by a light scattering-type liquid-borne particle counter and the number of objects that are counted by the particle counter and having a size equal to or greater than 0.1 μm is 5 to 100 per mL.
16. A solution comprising:
an organic solvent;
a stabilizer; and
an organic impurity,
wherein a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm,
the stabilizer is an antioxidant which is at least one kind of compound selected from the group consisting of dibutylhydroxytoluene, didodecyl 3,3′-thiodipropionate, dioctadecyl 3,3′-thiodipropionate, ditetradecyl 3,3′-thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), 2,2′-methylenebis-(4-ethyl-6-t-butylphenol), butylhydroxyanisole, tris (2-ethylhexyl) phosphite, 2-hydroxy-4-methoxybenzophenone, and triisodecyl phosphite, and
a content of the organic impurity with respect to the total mass of the solution is 0.01 to 10,000 mass ppm, and
the solution satisfies any of the following conditions 1 to 9,
condition 1: the organic solvent is propylene glycol monomethyl ether acetate, the organic impurity is propylene glycol;
condition 2: the organic solvent is propylene glycol monomethyl ether, the organic impurity is methanol;
condition 3: the organic solvent is propylene glycol monoethyl ether, the organic impurity is ethanol;
condition 4: the organic solvent is propylene glycol monopropyl ether, the organic impurity is propanol;
condition 5: the organic solvent is ethyl lactate, the organic impurity is ethanol;
condition 6: the organic solvent is butyl acetate, the organic impurity is 1-butanol;
condition 7: the organic solvent is 4-methyl-2-pentanol, the organic impurity is 1-methyl butanol;
condition 8: the organic solvent is 1,4-dioxane, the organic impurity is at least one kind of compound selected from the group 1,2-dioxane and 1,3-dioxane; and
condition 9: the organic solvent is tetrahydrofuran, the organic impurity is 1,4-butanediol.
17. The solution according to claim 16 ,
wherein a content of water with respect to the total mass of the solution is 0.01% to 1.0% by mass.
18. A solution comprising:
an organic solvent;
a stabilizer; and
an organic impurity,
wherein a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm,
a content of the organic solvent with respect to the total mass of the solution is equal to or greater than 98.00% by mass,
a content of the organic impurity with respect to the total mass of the solution is 0.01 to 10,000 mass ppm, and
the solution satisfies any of the following conditions 1 to 11,
condition 1: the organic solvent is propylene glycol monomethyl ether acetate, the organic impurity is propylene glycol;
condition 2: the organic solvent is propylene glycol monomethyl ether, the organic impurity is methanol;
condition 3: the organic solvent is propylene glycol monoethyl ether, the organic impurity is ethanol;
condition 4: the organic solvent is propylene glycol monopropyl ether, the organic impurity is propanol;
condition 5: the organic solvent is ethyl lactate, the organic impurity is ethanol;
condition 6: the organic solvent is cyclopentanone, the organic impurity is cyclopentanol;
condition 7: the organic solvent is cyclohexanone, the organic impurity is cyclohexanol;
condition 8: the organic solvent is butyl acetate, the organic impurity is 1-butanol;
condition 9: the organic solvent is 4-methyl-2-pentanol, the organic impurity is 1-methyl butanol;
condition 10: the organic solvent is 1,4-dioxane, the organic impurity is at least one kind of compound selected from the group 1,2-dioxane and 1,3-dioxane; and
condition 11: the organic solvent is tetrahydrofuran, the organic impurity is 1,4-butanediol.
19. A solution comprising:
an organic solvent;
a stabilizer;
a peroxide; and
an organic impurity,
wherein a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm,
a content of a peroxide with respect to the total mass of the solution is 0.01 to 10 mass ppm,
a content of the organic impurity with respect to the total mass of the solution is 0.01 to 10,000 mass ppm, and
the solution satisfies any of the following conditions 1 to 10,
condition 1: the organic solvent is propylene glycol monomethyl ether acetate, the organic impurity is propylene glycol;
condition 2: the organic solvent is propylene glycol monomethyl ether, the organic impurity is methanol;
condition 3: the organic solvent is propylene glycol monoethyl ether, the organic impurity is ethanol;
condition 4: the organic solvent is propylene glycol monopropyl ether, the organic impurity is propanol;
condition 5: the organic solvent is ethyl lactate, the organic impurity is ethanol;
condition 6: the organic solvent is γ-butyrolactone, the organic impurity is hydroxybutyrate;
condition 7: the organic solvent is butyl acetate, the organic impurity is 1-butanol;
condition 8: the organic solvent is 4-methyl-2-pentanol, the organic impurity is 1-methyl butanol;
condition 9: the organic solvent is 1,4-dioxane, the organic impurity is at least one kind of compound selected from the group 1,2-dioxane and 1,3-dioxane; and
condition 10: the organic solvent is tetrahydrofuran, the organic impurity is 1,4-butanediol.
20. The solution according to claim 19 ,
wherein the content of the stabilizer with respect to a total mass of the solution is 0.1 to 3 mass ppm.
21. The solution according to claim 19 ,
wherein the stabilizer is an antioxidant, and
the antioxidant is at least one kind of compound selected from the group consisting of didodecyl 3,3′-thiodipropionate, dioctadecyl 3,3′-thiodipropionate, ditetradecyl 3,3′-thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), 2,2′-methylenebis-(4-ethyl-6-t-butylphenol), butylhydroxyanisole, tris (2-ethylhexyl) phosphite, 2-hydroxy-4-methoxybenzophenone, and triisodecyl phosphite.
22. A solution comprising:
an organic solvent;
a stabilizer; and
an organic impurity,
wherein a content of the stabilizer with respect to a total mass of the solution is 0.1 to 50 mass ppm,
the number of objects to be counted that are counted by a light scattering-type liquid-borne particle counter and have a size equal to or greater than 0.1 um is equal to or smaller than 100/mL,
a content of the organic impurity with respect to the total mass of the solution is 0.01 to 10,000 mass ppm, and
the solution satisfies any of the following conditions 1 to 12,
condition 1: the organic solvent is propylene glycol monomethyl ether acetate, the organic impurity is propylene glycol;
condition 2: the organic solvent is propylene glycol monomethyl ether, the organic impurity is methanol;
condition 3: the organic solvent is propylene glycol monoethyl ether, the organic impurity is ethanol;
condition 4: the organic solvent is propylene glycol monopropyl ether, the organic impurity is propanol;
condition 5: the organic solvent is ethyl lactate, the organic impurity is ethanol;
condition 6: the organic solvent is cyclopentanone, the organic impurity is cyclopentanol;
condition 7: the organic solvent is cyclohexanone, the organic impurity is cyclohexanol;
condition 8: the organic solvent is y-butyrolactone, the organic impurity is hydroxybutyrate;
condition 9: the organic solvent is butyl acetate, the organic impurity is 1-butanol;
condition 10: the organic solvent is 4-methyl-2-pentanol, the organic impurity is 1-methyl butanol;
condition 11: the organic solvent is 1,4-dioxane, the organic impurity is at least one kind of compound selected from the group 1,2-dioxane and 1,3-dioxane; and
condition 12: the organic solvent is tetrahydrofuran, the organic impurity is 1,4-butanediol.