Imaging device having capacitor surrounding first photoelectric converter in plan view
An imaging device includes: a semiconductor substrate; a first photoelectric converter which is disposed in the semiconductor substrate; a second photoelectric converter different from the first photoelectric converter, which is disposed in the semiconductor substrate; a wiring layer disposed on or above the semiconductor substrate; and a capacitor which is disposed in the wiring layer and surrounds the first photoelectric converter in plan view. The capacitor includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode. The first electrode is connected to one of the first photoelectric converter and the second photoelectric converter.
1. An imaging device, comprising:
a semiconductor substrate having a first principal surface, and a second principal surface on an opposite side of the first principal surface;
a first photoelectric converter which is disposed in the semiconductor substrate and generates a first signal charge by converting first light incident to the first photoelectric converter;
a second photoelectric converter different from the first photoelectric converter, which is disposed in the semiconductor substrate and generates a second signal charge by converting second light incident to the second photoelectric converter;
at least two layers of wiring disposed above the first principal surface; and
a capacitor which is disposed between the semiconductor substrate and the at least two layers of wiring and surrounds the first photoelectric converter in a plan view, wherein:
the capacitor includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode, and the first electrode is connected to one of the first photoelectric converter and the second photoelectric converter.
2. The imaging device according to claim 1 , further comprising:
a charge storage region that stores a signal charge generated by the one of the first photoelectric converter and the second photoelectric converter, wherein:
the first electrode is disposed between the semiconductor substrate and the second electrode, and
the second electrode covers the charge storage region.
3. The imaging device according to claim 1 , wherein:
an area of the first photoelectric converter and an area of the second photoelectric converter differ from each other in a plan view, and
the first electrode is connected to one of the first photoelectric converter and the second photoelectric converter having a smaller area than the other of the first photoelectric converter and the second photoelectric converter.
4. The imaging device according to claim 3 , wherein the area of the first photoelectric converter is larger than the area of the second photoelectric converter.
5. The imaging device according to claim 1 , wherein the semiconductor substrate is configured to cause the first light and the second light to enter the semiconductor substrate from the second principal surface.
6. The imaging device according to claim 1 , further comprising:
a wiring for applying a constant potential to the second electrode.
7. The imaging device according to claim 1 , further comprising:
a transistor,
wherein the first electrode is connected to the one of the first photoelectric converter and the second photoelectric converter via the transistor.
8. The imaging device according to claim 1 , wherein the second electrode continuously surrounds the first photoelectric converter.
9. The imaging device according to claim 1 , wherein:
the at least two layers of wiring include a first layer of wiring and a second layer of wiring, the second layer of wiring being closer to the semiconductor substrate than the first layer of wiring, and
the capacitor is disposed in an inter-layer insulating layer which is closer to the semiconductor substrate than the second layer of wiring.