IP Library Granted Patent US 10,847,702
Granted Patent B2
US 10,847,702 · App. 16/285,850 · Granted Nov 24, 2020

Semiconductor module

Inventors: Takeshi Kawabata (Osaka, JP); Kiyomi Hagihara (Osaka, JP); Takashi Yui (Shiga, JP); Naofumi Koga (Osaka, JP)
Assignee: PANASONIC SEMICONDUCTOR SOLUTIONS CO., LTD.
H01L33/647H01L24/00H01L25/0753H01L33/60H01L33/62
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Quick Facts
Patent No.
US 10,847,702
App. No.
16/285,850
Granted
Nov 24, 2020
Kind
B2
Abstract

A semiconductor module includes: a semiconductor element; a wiring substrate on which the semiconductor element is mounted; a heat dissipation substrate; a first metal material that bonds the wiring substrate and the heat dissipation substrate; and a second metal material that bonds the wiring substrate and the heat dissipation substrate and has a different melting point from the first metal material. Each of the following is at least partially bonded: the first metal material and the wiring substrate, the first metal material and the heat dissipation substrate, the second metal material and the wiring substrate, the second metal material and the heat dissipation substrate, and the first metal material and the second metal material. Each of the following is bonded by alloying: the first metal material and the wiring substrate, the first metal material and the heat dissipation substrate, and the first metal material and the second metal material.

Claims (52)

1. A semiconductor module, comprising:

a semiconductor element;

a first substrate having a first surface on which the semiconductor element is mounted, the first substrate being electrically connected to the semiconductor element;

a second substrate having a third surface on which the first substrate is mounted, the third surface facing a second surface of the first substrate opposite the first surface;

a first metal material disposed between the first substrate and the second substrate, the first metal material bonding the first substrate and the second substrate; and

a second metal material disposed between the first substrate and the second substrate, the second metal material bonding the first substrate and the second substrate and having a melting point different from a melting point of the first metal material,

wherein each of the following is at least partially bonded: (a) the first metal material and the first substrate, (b) the first metal material and the second substrate, (c) the second metal material and the first substrate, (d) the second metal material and the second substrate, and (e) the first metal material and the second metal material, and

each of the following is bonded by alloying: (a) the first metal material and the first substrate, (b) the first metal material and the second substrate, and (c) the first metal material and the second metal material.

2. The semiconductor module according to claim 1 ,

wherein the first metal material is bonded to the second metal material by thermal fusion.

3. The semiconductor module according to claim 1 ,

wherein the second metal material is bonded to the first substrate by thermal compression bonding, and is bonded to the second substrate by ultrasonic welding.

4. The semiconductor module according to claim 1 ,

wherein a bonded surface area of the first metal material and the first substrate and a bonded surface area of the first metal material and the second substrate are larger than a bonded surface area of the second metal material and the first substrate and a bonded surface area of the second metal material and the second substrate.

5. The semiconductor module according to claim 1 ,

wherein the second metal material has a melting point higher than a melting point of the first metal material.

6. The semiconductor module according to claim 1 ,

wherein a bonded surface area of the second metal material and the first substrate is smaller than a bonded surface area of the second metal material and the second substrate.

7. The semiconductor module according to claim 1 ,

wherein only the first metal material is disposed between the first substrate and the second substrate directly under the semiconductor element.

8. The semiconductor module according to claim 1 ,

wherein the second metal material is disposed only in a region directly under the first substrate.

9. The semiconductor module according to claim 1 ,

wherein the first metal material and the second metal material are disposed on a same bonding pad between the first substrate and the second substrate.

10. The semiconductor module according to claim 1 ,

wherein the first metal material is disposed along a periphery of the second metal material.

11. The semiconductor module according to claim 1 ,

wherein in a plan view of the first substrate and the second substrate, the first metal material protrudes from at least one of sides of the first substrate.

12. The semiconductor module according to claim 1 ,

wherein the first metal material and the second metal material are not electrically bonded to the semiconductor element and the first substrate.

13. The semiconductor module according to claim 1 ,

wherein the semiconductor element is a light-emitting diode,

a reflective resin is disposed on the first substrate on a lateral side of the semiconductor element, and

in a plan view of the second substrate on which the second metal material is disposed, the second metal material is disposed in a region other than a region in which the semiconductor element and the reflective resin are disposed.

14. The semiconductor module according to claim 1 ,

wherein at least three second metal materials are disposed between the first substrate and the second substrate, the at least three second metal materials being each the second metal material, and

in a plan view of the second substrate on which the second metal material is disposed, the at least three second metal materials form a surface.

15. The semiconductor module according to claim 13 ,

wherein in a plan view of the first substrate on which the second metal material is disposed, the second metal material is disposed between one of sides of the first substrate and a region in which the semiconductor element is disposed.

16. The semiconductor module according to claim 1 ,

wherein the first substrate includes a first metal film on at least part of the second surface.

17. The semiconductor module according to claim 16 ,

wherein the first metal film includes gold.

18. The semiconductor module according to claim 1 ,

wherein the second substrate includes a second metal film on at least part of the third surface.

19. The semiconductor module according to claim 18 ,

wherein the second metal film includes gold.

20. The semiconductor module according to claim 1 ,

wherein the first metal material and the second metal material include different materials.

21. The semiconductor module according to claim 1 ,

wherein the first metal material and the second metal material include a same material, and

the first metal material and the second metal material are bonded by metallic bonding.

Assignments (3)
CHANGE OF NAME Recorded May 14, 2021
From: PANASONIC SEMICONDUCTOR SOLUTIONS CO., LTD.
To: NUVOTON TECHNOLOGY CORPORATION JAPAN
Reel/Frame 056245/0395 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 27, 2020
From: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
To: PANASONIC SEMICONDUCTOR SOLUTIONS CO., LTD.
Reel/Frame 052755/0870 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 8, 2019
From: KAWABATA, TAKESHI; HAGIHARA, KIYOMI; YUI, TAKASHI; KOGA, NAOFUMI
To: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Reel/Frame 050303/0616 →