Semiconductor device and method for manufacturing the same
View Patent ↗According to some embodiments, a semiconductor device includes a semiconductor substrate, a metal portion, a first insulating film, and a second insulating film. The semiconductor substrate has a through-hole extending from a first surface of the semiconductor substrate to a second surface thereof opposite to the first surface. The metal portion is formed in the through-hole. The first insulating film is provided on the second surface of the semiconductor substrate and on a side surface of the through-hole. The second insulating film has a dielectric constant of not more than 6.5 and is provided on a metal portion-side surface of the first insulating film on the side surface of the through-hole of the semiconductor substrate.
1. A semiconductor device comprising:
a semiconductor substrate having a through-hole extending from a first surface of the semiconductor substrate to a second surface thereof opposite to the first surface;
a metal portion formed in the through-hole;
a first insulating film provided on the second surface of the semiconductor substrate and on a side surface of the through-hole; and
a second insulating film having a dielectric constant of not more than 6.5, only provided on a metal portion-side surface of the first insulating film on the side surface of the through-hole of the semiconductor substrate.
2. The semiconductor device according to claim 1 , wherein a Si—OH/Si—O bonding amount ratio in the first insulating film is lower than a Si—OH/Si—O bonding amount ratio in the second insulating film.
3. The semiconductor device according to claim 1 , wherein the first insulating film is a silicon nitride film.
4. The semiconductor device according to claim 1 , wherein the second insulating film is a silicon oxide film.
5. The semiconductor device according to claim 1 , further comprising
a third insulating film provided (1) between the second surface of the semiconductor substrate and the first insulating film on the second surface of the semiconductor substrate and (2) between the side surface of the through-hole and the first insulating film on the side surface of the through-hole.
6. The semiconductor device according to claim 5 , wherein
a thickness of the third insulating film at a side of through-hole is thinner than a thickness of the second insulating film at a side of through-hole.
7. The semiconductor device according to claim 5 , wherein
wherein the third insulating film is a silicon oxide film.