Semiconductor storage device having an amorphous layer

1. A semiconductor storage device comprising:

a semiconductor substrate;

an insulating layer provided on the semiconductor substrate;

a barrier metal layer provided on the insulating layer;

an aluminum compound layer provided on the barrier metal layer;

an amorphous layer provided on the aluminum compound layer and comprising a material that vaporizes upon its chemical reaction with fluorine; and

a metal layer provided on the amorphous layer,

wherein a thickness of the amorphous layer is smaller than a thickness of the aluminum compound layer.

2. The semiconductor storage device according to claim 1 , wherein the material is at least one of boron (B), boron nitride (BN), boron oxide (B 2 O 3 ), titanium nitride (TiN), titanium oxide (TiO 2 ), and silicon (Si).

3. The semiconductor storage device according to claim 1 , wherein the aluminum compound layer is an aluminum oxide (Al 2 O 3 ) layer or an aluminum nitride (AlN) layer.

4. A semiconductor storage device comprising:

a semiconductor substrate;

an insulating layer provided on the semiconductor substrate;

a barrier metal layer provided on the insulating layer;

an aluminum compound layer provided on the barrier metal layer;

an amorphous layer provided on the aluminum compound layer and comprising a material that vaporizes upon its chemical reaction with fluorine;

a metal layer provided on the amorphous layer;

a plurality of insulating layers including the insulating layer;

a plurality of first films respectively including the insulating layers;

a plurality of barrier metal layers including the barrier metal layer, a plurality of aluminum compound layers including the aluminum compound layer, and a plurality of amorphous layers including the amorphous layer; and

a plurality of second films each including a respective one of the plurality of barrier metal layers, a respective one of the plurality of aluminum compound layers, and a respective one of the plurality of amorphous layers,

wherein the first films and the second films are stacked alternately,

wherein the first films each include a respective bulk layer that covers the corresponding insulating layer and has a higher dielectric constant than that of the insulating layer.

5. A semiconductor storage device comprising:

a semiconductor substrate;

an insulating layer provided on the semiconductor substrate;

a barrier metal layer provided on the insulating layer;

an aluminum compound layer provided on the barrier metal layer;

an amorphous layer provided on the aluminum compound layer and comprising a material that vaporizes upon its chemical reaction with fluorine;

a metal layer provided on the amorphous layer;

a plurality of insulating layers including the insulating layer;

a plurality of first films respectively including the insulating layers;

a plurality of barrier metal layers including the barrier metal layer, a plurality of aluminum compound layers including the aluminum compound layer, and a plurality of amorphous layers including the amorphous layer, and

a plurality of second films each including a respective one of the plurality of barrier metal layers, a respective one of the plurality of aluminum compound layers, and a respective one of the plurality of amorphous layers,

wherein the first films and the second films are stacked alternately,

wherein the first films and the second films are penetrated by a hole, and the semiconductor storage device further comprises a memory film disposed in the hole.