IP Library Granted Patent US 10,854,252
Granted Patent B2
US 10,854,252 · App. 16/291,484 · Granted Dec 1, 2020

Magnetic storage device with a stack of magnetic layers including iron (Fe) and cobalt (co)

Inventors: Toshihiko Nagase (Kuwana Mie, JP); Daisuke Watanabe (Yokkaichi Mie, JP)
Assignee: TOSHIBA MEMORY CORPORATION
G11C11/161G11C11/1655G11C11/1657G11C11/1673G11C11/1675H01L27/228H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 10,854,252
App. No.
16/291,484
Granted
Dec 1, 2020
Kind
B2
Abstract

According to one embodiment, a device includes an element including: a first stacked; a first nonmagnet on the first stacked; a second stacked on the first nonmagnet; a second nonmagnet on the second stacked; and a first magnet on the second nonmagnet. The second stacked including: a second magnet in contact with the second nonmagnet, including Fe and Co; a third nonmagnet at an opposite side of the second nonmagnet relative to the second magnet, including Mo or W; and a third magnet on the first nonmagnet, in contact with the third nonmagnet, including Fe and Co. An atomic ratio of Fe in the third magnet is lower than an atomic ratio of Fe in the second magnet.

Claims (66)

1. A magnetic storage device comprising:

a magnetoresistive element,

the magnetoresistive element including:

first stacked layers;

a first non-magnetic layer on the first stacked layers;

second stacked layers on the first non-magnetic layer;

a second non-magnetic layer on the second stacked layers; and

a first magnetic layer on the second non-magnetic layer, and

the second stacked layers including:

a second magnetic layer being in contact with the second non-magnetic layer, and including iron (Fe) and cobalt (Co);

a third non-magnetic layer at an opposite side of the second non-magnetic layer relative to the second magnetic layer, and including an element selected from molybdenum (Mo) or tungsten (W); and

a third magnetic layer on the first non-magnetic layer, being in contact with the third non-magnetic layer, and including iron (Fe) and cobalt (Co),

wherein an atomic ratio of iron (Fe) in the third magnetic layer is lower than an atomic ratio of iron (Fe) in the second magnetic layer, such that the third magnetic layer and the second magnetic layer have different crystallinities, and

wherein the atomic ratio of iron (Fe) in the third magnetic layer is set such that the third magnetic layer has an amorphous structure or a microcrystal structure.

2. The device of claim 1 , wherein:

the atomic ratio of iron (Fe) in the second magnetic layer is greater than an atomic ratio of cobalt (Co) in the second magnetic layer, and

an atomic ratio of cobalt (Co) in the third magnetic layer is greater than the atomic ratio of iron (Fe) in the third magnetic layer.

3. The device of claim 1 , wherein:

the atomic ratio of iron (Fe) in the third magnetic layer is in a range from 15 at % to 25 at %.

4. The device of claim 1 , wherein:

the third non-magnetic layer has an amorphous structure.

5. The device of claim 1 , wherein:

the third non-magnetic layer further includes boron (B).

6. The device of claim 1 , wherein:

the first non-magnetic layer includes iridium (Ir).

7. The device of claim 1 , wherein:

the second stacked layers are above the first stacked layers.

8. The device of claim 1 , wherein:

the first magnetic layer, the second non-magnetic layer, and the second magnetic layer form a magnetic tunnel junction.

9. The device of claim 8 , wherein:

the second non-magnetic layer includes magnesium oxide (MgO).

10. A magnetic storage device comprising:

a magnetoresistive element,

the magnetoresistive element including:

first stacked layers;

a first non-magnetic layer on the first stacked layers;

second stacked layers on the first non-magnetic layer;

a second non-magnetic layer on the second stacked layers; and

a first magnetic layer on the second non-magnetic layer,

the second stacked layers including:

a second magnetic layer being in contact with the second non-magnetic layer, and including iron (Fe) and cobalt (Co);

a third non-magnetic layer at an opposite side of the second non-magnetic layer relative to the second magnetic layer, and including an element selected from molybdenum (Mo) or tungsten (W); and

a third magnetic layer on the first non-magnetic layer, being in contact with the third non-magnetic layer, and including iron (Fe) and cobalt (Co), and

the first stacked layers including:

a fourth magnetic layer being in contact with the first non-magnetic layer; and

a multi-layered film at an opposite side of the first non-magnetic layer relative to the fourth magnetic layer, in which a fourth non-magnetic layer and a fifth magnetic layer are alternately stacked,

wherein a film thickness of the fourth magnetic layer is greater than a film thickness of the fifth magnetic layer,

wherein the first non-magnetic layer includes iridium (Ir), and

wherein platinum (Pt) or palladium (Pd) is not included between the first non-magnetic layer and the third non-magnetic layer.

11. The device of claim 10 , wherein:

the fourth magnetic layer is in contact with the fourth non-magnetic layer.

12. The device of claim 10 , wherein:

the film thickness of the fourth magnetic layer is in a range from 0.5 nanometers to 1.0 nanometers.

13. The device of claim 12 , wherein:

a film thickness of the third magnetic layer is substantially equal to the film thickness of the fourth magnetic layer.

14. The device of claim 13 , wherein:

the fourth magnetic layer and the fifth magnetic layer include cobalt (Co), and

the fourth non-magnetic layer includes platinum (Pt).

15. The device of claim 10 , wherein:

the second stacked layers are above the first stacked layers.

16. The device of claim 10 , wherein:

the first magnetic layer, the second non-magnetic layer, and the second magnetic layer form a magnetic tunnel junction.

17. The device of claim 16 , wherein:

the second non-magnetic layer includes magnesium oxide (MgO).

18. The device of claim 17 , further comprising:

a memory cell that includes the magnetoresistive element and a switching element coupled to the magnetoresistive element in series.

Assignments (2)
CHANGE OF NAME AND ADDRESS Recorded Jan 31, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 058905/0582 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 4, 2019
From: NAGASE, TOSHIHIKO; WATANABE, DAISUKE
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 048493/0610 →