Manufacturing method of optoelectronic semiconductor device
A manufacturing method of an optoelectronic semiconductor device includes: providing a matrix substrate, which comprises a substrate and a matrix circuit disposed on the substrate; transferring a plurality of micro-sized optoelectronic semiconductor elements from a temporary substrate to the matrix substrate, wherein the micro-sized optoelectronic semiconductor elements are separately disposed on the matrix substrate, and at least one electrode of each micro-sized optoelectronic semiconductor element is electrically connected with the matrix circuit; forming a protective layer completely covering the micro-sized optoelectronic semiconductor elements, wherein the height of the protective layer is greater than the height of the micro-sized optoelectronic semiconductor elements; and grinding the protective layer until a residual on a back surface of each micro-sized optoelectronic semiconductor element and the back surface are removed to expose a new surface.
1. A manufacturing method of an optoelectronic semiconductor device, comprising:
providing a matrix substrate, wherein the matrix substrate comprises a substrate and a matrix circuit disposed on the substrate;
transferring a plurality of micro-sized optoelectronic semiconductor elements from a temporary substrate to the matrix substrate, wherein the micro-sized optoelectronic semiconductor elements are separately disposed on the matrix substrate, and at least one electrode of each of the micro-sized optoelectronic semiconductor elements is electrically connected with the matrix circuit;
forming a protective layer completely covering the micro-sized optoelectronic semiconductor elements, wherein a height of the protective layer is greater than a height of the micro-sized optoelectronic semiconductor elements; and
grinding the protective layer until a residual on a back surface of each of the micro-sized optoelectronic semiconductor elements and the back surface are removed to expose a new surface.
2. The manufacturing method according to claim 1 , wherein each of the micro-sized optoelectronic semiconductor elements comprises a p-type semiconductor layer, a light-emitting layer, an n-type semiconductor layer, a non-doped layer and a buffer layer, and the grinding step is to remove the buffer layer and a part of the non-doped layer.
3. The manufacturing method according to claim 2 , wherein the grinding step is to remove the buffer layer and to reduce a thickness of the non-doped layer to less than 1.8 μm.
4. The manufacturing method according to claim 1 , wherein the grinding step is to planarize the back surface of the micro-sized optoelectronic semiconductor element and make the new surface of the micro-sized optoelectronic semiconductor element be leveled with a surface of the adjacent protective layer away from the matrix substrate, and a height difference between the protective layer and the micro-sized optoelectronic semiconductor element is less than 0.02 μm.
5. The manufacturing method according to claim 1 , further comprising:
disposing a protective substrate on the micro-sized optoelectronic semiconductor elements, so that the micro-sized optoelectronic semiconductor elements and the protective layer are located between the protective substrate and the matrix substrate.
6. The manufacturing method according to claim 5 , wherein a refractive index of the protective layer is equal to that of the protective substrate, or a difference between the refractive indexes of the protective layer and the protective substrate is less than 10% of the refractive index of the protective layer or the protective substrate.
7. The manufacturing method according to claim 5 , wherein a refractive index of the protective layer is between that of the protective substrate and that of the micro-sized optoelectronic semiconductor element.