Thin film transistor, manufacturing method therefor, array substrate and display panel
A thin film transistor is provided and includes an active layer, a source electrode, a drain electrode, a gate electrode and a gate electrode insulating layer, the active layer includes a source electrode region, a drain electrode region and a channel region, the source electrode region and the drain electrode region include a first metal material, and the channel region includes a semiconductor material made from oxidation of the first metal material.
1. A thin film transistor, comprising an active layer, a source electrode, a drain electrode, a gate electrode and a gate insulating layer,
wherein the active layer comprises a source region, a drain region and a channel region, the source region and the drain region comprise a first metal material, and the channel region comprises a semiconductor material which is obtained from oxidation of the first metal material;
the thin film transistor further comprises a source contact region and a drain contact region, and the source contact region and the drain contact region are respectively electrically connected with the source region and the drain region;
the source contact region and the drain contact region comprise a second metal material, and the gate insulating layer comprises an insulating material which is obtained from oxidation of the second metal material,
wherein the source contact region, the drain contact region and the gate insulating layer are provided in a one-piece manner and formed from the second metal material.
2. The thin film transistor according to claim 1 , wherein the source region, the drain region and the channel region are provided in a one-piece manner and formed from the first metal material.
3. The thin film transistor according to claim 1 , further comprising a passivation layer, wherein the passivation layer is on a side of the gate electrode away from the gate insulating layer, and the source electrode and the drain electrode are respectively electrically connected with the source contact region and the drain contact region through via holes passing through the passivation layer.
4. The thin film transistor according to claim 1 , wherein the second metal material comprises aluminum, titanium, tantalum, hafnium or zirconium; or the second metal material comprises an alloy material comprising aluminum, titanium, tantalum, hafnium or zirconium.
5. The thin film transistor according to claim 1 , wherein the first metal material comprises indium, zinc, tin, copper, nickel, titanium or tungsten; or the first metal material comprises an alloy material comprising indium, zinc, tin, copper, nickel, titanium or tungsten.
6. An array substrate, comprising the thin film transistor according to claim 1 .
7. A display panel, comprising the array substrate according to claim 6 .
8. A manufacturing method of a thin film transistor, comprising:
forming an active layer, a source electrode, a drain electrode, a gate electrode and a gate insulating layer, wherein forming the active layer comprises:
forming a source region, a drain region, and a channel region between the source region and the drain region, wherein the source region and the drain region comprise a first metal material, and the channel region comprises a semiconductor material which is obtained from oxidation of the first metal material; and
forming a source contact region and a drain contact region, wherein the source contact region and the drain contact region are respectively electrically connected with the source region and the drain region;
the source contact region and the drain contact region comprise a second metal material, and the gate insulating layer comprises an insulating material which is obtained from oxidation of the second metal material; and
the source contact region, the drain contact region and the gate insulating layer are provided in a one-piece manner and formed from the second metal material.