Active gas generation apparatus including a metal housing, first and second auxiliary members, and a housing contact
An active gas generator that generates active gas by activating supplied material gas through discharge in a discharge space formed between a high-voltage side electrode component and a ground side electrode component of an active gas generation electrode group. A combined structure of covers completely separates the discharge space from an alternating-current voltage application space, and includes, independently from the alternating-current voltage application space, a material gas flow path for a material gas supply path, through which externally supplied material gas is guided to the discharge space. A housing contact space formed between a metal housing and each of the covers and an electrode component installation table is completely separated from the alternating-current voltage application space and the discharge space.
1. An active gas generation apparatus comprising:
an active gas generation electrode group including a first electrode component and a second electrode component provided below said first electrode component;
an alternating-current power source unit configured to apply alternating-current voltage to said first and second electrode components so that said first electrode component is at a high voltage, a discharge space being formed between said first and second electrode components through application of said alternating-current voltage by said alternating-current power source unit, an active gas obtained by activating a material gas supplied to said discharge space being ejected through a gas ejection port provided in said second electrode component;
a first auxiliary member provided to form an alternating-current voltage application space between said first auxiliary member and said first electrode component separately from said discharge space;
a second auxiliary member made of a non-metallic material and supporting said active gas generation electrode group from said second electrode component side, said second auxiliary member including an auxiliary member gas discharge port through which the active gas ejected from said gas ejection port passes; and
a housing made of metal that houses all of said active gas generation electrode group and said second auxiliary member and at least part of said first auxiliary member, said housing including a housing gas discharge port through which the active gas passing through said auxiliary member gas discharge port is discharged to an outside, a housing contact space separated from said discharge space being provided between said housing and each of said first and second auxiliary members, wherein
said first auxiliary member includes a material gas flow path for a material gas supply path, through which the externally supplied material gas is guided to said discharge space, independently from said alternating-current voltage application space and said housing contact space so that a gas flow in said discharge space and a gas flow in said alternating-current voltage application space are separated from each other and the gas flow in said discharge space and a gas flow in said housing contact space are separated from each other.
2. The active gas generation apparatus according to claim 1 , wherein
said first auxiliary member further includes a second gas supply port through which second gas other than the material gas is externally supplied to said alternating-current voltage application space, and said second gas supply port is provided independently from said material gas flow path.
3. The active gas generation apparatus according to claim 1 , wherein
a pressure in said alternating-current voltage application space is set to be higher than a pressure in said discharge space.
4. The active gas generation apparatus according to claim 1 , wherein
said first auxiliary member includes an electrode group holder solely holding said active gas generation electrode group, and
said second auxiliary member supports said active gas generation electrode group together with said electrode group holder from said second electrode component side.