IP Library Granted Patent US 11,133,456
Granted Patent B2
US 11,133,456 · App. 16/351,985 · Granted Sep 28, 2021

Magnetic storage device

Inventors: Takeshi Iwasaki (Kuwana Mie, JP); Akiyuki Murayama (Tokyo, JP); Tadashi Kai (Yokohama Kanagawa, JP); Tadaomi Daibou (Yokohama Kanagawa, JP); Masaki Endo (Kawasaki Kanagawa, JP); Shumpei Omine (Tokyo, JP); Taichi Igarashi (Kawasaki Kanagawa, JP); Junichi Ito (Yokohama Kanagawa, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L43/02G11C11/161H01L27/228H01L43/10H01L43/12
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Quick Facts
Patent No.
US 11,133,456
App. No.
16/351,985
Granted
Sep 28, 2021
Kind
B2
Abstract

According to one embodiment, a magnetic storage device includes: a magnetoresistive effect element including a non-magnet, and a stacked structure on the non-magnet, the stacked structure including: a first ferromagnet on the non-magnet; an anti-ferromagnet being exchange-coupled with the first ferromagnet; and a second ferromagnet between the first ferromagnet and the anti-ferromagnet. The stacked structure is configured to: have a first resistance value in response to a first current flowing through the stacked structure in a first direction, and have a second resistance value different from the first resistance value in response to a second current flowing through the stacked structure in a second direction opposite to the first direction.

Claims (44)

1. A magnetic storage device comprising:

a magnetoresistive effect element including a non-magnet, and a stacked structure on the non-magnet,

the stacked structure including:

a first ferromagnet on the non-magnet;

an anti-ferromagnet being exchange-coupled with the first ferromagnet; and

a second ferromagnet between the first ferromagnet and the anti-ferromagnet,

wherein:

the stacked structure is configured to have a first resistance value in response to a first current flowing through the stacked structure in a first direction, and to have a second resistance value different from the first resistance value in response to a second current flowing through the stacked structure in a second direction opposite to the first direction,

the magnetoresistive effect element further includes a third ferromagnet provided on a side of the non-magnet which is opposite to a side of the non-magnet on which the first ferromagnet is provided,

the first ferromagnet, the non-magnet, and the third ferromagnet are part of a magnetic tunnel junction,

a magnetization direction of the third ferromagnet is fixed and does not change in response to the first current and the second current, and

the second ferromagnet has a same crystal structure as the first ferromagnet.

2. The device of claim 1 , wherein the second ferromagnet has a film thickness of 0.1 nanometers or more and 0.3 nanometers or less.

3. The device of claim 1 , wherein the second ferromagnet includes at least one element selected from cobalt (Co), iron (Fe), nickel (Ni), and manganese (Mn).

4. The device of claim 3 , wherein the second ferromagnet further includes at least one element selected from niobium (Nb), zirconium (Zr), tantalum (Ta), titanium (Ti), hafnium (Hf), silicon (Si) and gadolinium (Gd).

5. The device of claim 4 , wherein the second ferromagnet contains at least one alloy selected from cobalt titanium (CoTi), cobalt hafnium (CoHf), cobalt zirconium (CoZr), nickel niobium (NiNb), nickel zirconium (NiZr), nickel tantalum (NiTa), nickel titanium (NiTi), nickel hafnium (NiHf), manganese silicon (MnSi) and manganese gadolinium (MnGd).

6. The device of claim 1 , wherein the anti-ferromagnet includes nickel manganese (NiMn) or palladium manganese (PdMn).

7. The device of claim 1 , wherein the anti-ferromagnet has a crystal structure different from a crystal structure of the first ferromagnet.

8. The device of claim 7 , wherein the crystal structure of the first ferromagnet is the same as a crystal structure of the non-magnet.

9. The device of claim 1 , further comprising:

a memory cell including the magnetoresistive effect element, and a switching element connected to the magnetoresistive effect element.

10. A magnetic storage device comprising:

a magnetoresistive effect element including a non-magnet, and a stacked structure on the non-magnet,

the stacked structure including:

a first ferromagnet on the non-magnet;

an anti-ferromagnet being exchange-coupled with the first ferromagnet; and

a second ferromagnet between the first ferromagnet and the anti-ferromagnet,

wherein:

the stacked structure is configured to have a first resistance value in response to a first current flowing through the stacked structure in a first direction, and to have a second resistance value different from the first resistance value in response to a second current flowing through the stacked structure in a second direction opposite to the first direction,

the magnetoresistive effect element further includes a third ferromagnet provided on a side of the non-magnet which is opposite to a side of the non-magnet on which the first ferromagnet is provided,

the first ferromagnet, the non-magnet, and the third ferromagnet are part of a magnetic tunnel junction,

a magnetization direction of the third ferromagnet is fixed and does not change in response to the first current and the second current, and

the anti-ferromagnet has a crystal structure different from a crystal structure of the first ferromagnet.

11. The device of claim 10 , wherein the second ferromagnet has a film thickness of 0.1 nanometers or more and 0.3 nanometers or less.

12. The device of claim 10 , wherein the second ferromagnet has an amorphous structure.

13. The device of claim 10 , wherein the second ferromagnet has a same crystal structure as the first ferromagnet.

14. The device of claim 10 , wherein the second ferromagnet includes at least one element selected from cobalt (Co), iron (Fe), nickel (Ni), and manganese (Mn).

15. The device of claim 14 , wherein the second ferromagnet further includes at least one element selected from niobium (Nb), zirconium (Zr), tantalum (Ta), titanium (Ti), hafnium (Hf), silicon (Si) and gadolinium (Gd).

16. The device of claim 15 , wherein the second ferromagnet contains at least one alloy selected from cobalt titanium (CoTi), cobalt hafnium (CoHf), cobalt zirconium (CoZr), nickel niobium (NiNb), nickel zirconium (NiZr), nickel tantalum (NiTa), nickel titanium (NiTi), nickel hafnium (NiHf), manganese silicon (MnSi) and manganese gadolinium (MnGd).

17. The device of claim 14 , wherein the second ferromagnet further includes boron (B).

18. The device of claim 10 , wherein the anti-ferromagnet includes nickel manganese (NiMn) or palladium manganese (PdMn).

19. The device of claim 10 , wherein the crystal structure of the first ferromagnet is the same as a crystal structure of the non-magnet.

20. The device of claim 10 , further comprising:

a memory cell including the magnetoresistive effect element, and a switching element connected to the magnetoresistive effect element.

Assignments (2)
CHANGE OF NAME AND ADDRESS Recorded Jan 31, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 058905/0582 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2019
From: IWASAKI, TAKESHI; MURAYAMA, AKIYUKI; KAI, TADASHI; DAIBOU, TADAOMI; ENDO, MASAKI; IGARASHI, TAICHI; ITO, JUNICHI
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 049405/0163 →