IP Library Granted Patent US 11,167,303
Granted Patent B2
US 11,167,303 · App. 16/356,430 · Granted Nov 9, 2021

Techniques for arrayed printing of a permanent layer with improved speed and accuracy

Inventors: Michael Baker (Santa Cruz, CA); Nahid Harjee (Sunnyvale, CA); Douglas Bacon (Palo Alto, CA)
Assignee: Kateeva, Inc.
B05B12/12B05B1/02B41J2/04581B41J2/04588B41J2/04593B41J2/2132B41J2/2135H01L51/56H01L51/0005
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Quick Facts
Patent No.
US 11,167,303
App. No.
16/356,430
Granted
Nov 9, 2021
Kind
B2
Abstract

A repeatable manufacturing process uses a printer to deposits liquid for each product carried by a substrate to form respective thin films. The liquid is dried, cured or otherwise processed to form from the liquid a permanent layer of each respective product. To perform printing, each newly-introduced substrate is roughly mechanically aligned, with an optical system detecting sub-millimeter misalignment, and with software correcting for misalignment. Rendering of adjusted data is performed such that nozzles are variously assigned dependent on misalignment to deposit droplets in a regulated manner, to ensure precise deposition of liquid for each given area of the substrate. For example, applied to the manufacture of flat panel displays, software ensures that exactly the right amount of liquid is deposited for each “pixel” of the display, to minimize likelihood of visible discrepancies in the resultant display.

Claims (49)

1. A method comprising:

receiving a print recipe from a memory, the print recipe comprising a plurality of scan paths, defining relative movement, in a scanning direction, between a printhead of a printer and an expected position of a substrate, and including, for the scan paths, respective printhead positions along a direction orthogonal to the scanning direction; and

for each substrate in a plurality of substrates,

using the printer to form a liquid film on the substrate by printing droplets of a liquid onto the substrate, and

processing the liquid film to form a layer;

wherein the method further comprises:

for each substrate,

using a camera to determine a position of at least one feature on the substrate relative to an expected position of the feature; and

using a processor to define an error model based on the determined position, the error model including at least one of rotational deviation or location deviation, and to assign at least one nozzle of the printhead to print on the substrate in association with one of the scan paths depending on the error model,

wherein printing the droplets of the liquid onto the substrate includes using the assigned nozzles.

2. The method of claim 1 , wherein:

the error model also includes a dimension deviation or a skew deviation;

using the processor to assign at least one nozzle of the printhead comprises identifying nozzles of the printhead which, based on the error model, will pass over the area of the substrate during execution of each scan path; and

printing the droplets of the liquid onto the substrate comprises using the identified nozzles for each scan path to print during execution of the respective scan path.

3. The method of claim 2 , wherein using the processor to assign further comprises:

retrieving, from non-transitory storage, an expected droplet volume or landing position of each identified nozzle determined during a calibration operation;

determining whether or not one or more of the expected droplet volumes or landing positions would cause the deposited liquid for the area to fall outside of a predetermined volume tolerance range; and

excluding from use, during each scan path, any of the identified nozzles having corresponding expected droplet volumes or landing positions that would cause the deposited liquid for the area to fall outside of the predetermined volume range.

4. The method of claim 3 , wherein the area is a footprint of the substrate.

5. The method of claim 3 , wherein the droplets are printed in target regions of the area and the predetermined volume tolerance is a volume tolerance for a target region.

6. The method of claim 5 , wherein each target region is a structural well.

7. The method of claim 6 , wherein the processor identifies a combination of nozzles to deposit a combination of droplets within the structural well that fall within the predetermined volume range.

8. A method comprising:

using a camera to determine position or rotation of an area of a substrate;

using a processor to determine an error of a determined characteristic based on an expected characteristic of the area, to model the error, and to assign, based on the model and on a plurality of scan paths defining relative movement of the printhead and the substrate, a nozzle of a printhead of a printer to print on the substrate; and

printing droplets of a liquid onto the substrate, using the assigned nozzle.

9. The method of claim 8 , wherein the processor identifies nozzles of the printhead which, based on the model and the positions of the printhead during the scan paths, will pass over the area of the substrate during execution of each scan path.

10. The method of claim 9 , wherein the processor receives from a non-transitory storage,

for each identified nozzle, an expected droplet aspect selected from the group consisting of droplet volume and droplet landing position, as determined during a calibration operation,

determines whether or not one or more of the droplet aspects would cause the deposited liquid for the area to fall outside of a predetermined volume range; and

excludes from use, during execution of each scan path, any of the identified nozzles having corresponding droplet aspects that would cause the deposited liquid for the area to fall outside of the predetermined volume range.

11. The method of claim 10 , wherein using the camera to determine the position or rotation of the area of the substrate comprises capturing an image of the area of the substrate that is to receive the liquid film using a plurality of cameras.

12. The method of claim 11 , wherein the plurality of cameras comprises a standard camera and a high-resolution camera.

13. The method of claim 10 , wherein the droplet aspect is a mean.

14. The method of claim 9 , wherein the area is a footprint of the substrate.

15. The method of claim 9 , wherein the droplets are printed in target regions of the area and the predetermined volume tolerance is a volume tolerance for a target region.

16. The method of claim 15 , wherein each target region is a structural well.

17. The method of claim 16 , wherein the processor identifies a combination of nozzles to deposit a combination of droplets within the structural well that fall within the predetermined volume range.

18. A method, comprising:

receiving a print recipe from a memory, the print recipe comprising a plurality of scan paths defining relative movement, in a scanning direction, between a printhead of a printer and an expected position of a substrate, and including, for the scan paths, respective printhead positions along a direction orthogonal to the scanning direction;

optically determining a position of a feature of the substrate relative to an expected position of the feature;

using a processor to define an error model including a rotational deviation or a location deviation based on the determined position, and to assign at least one nozzle of the printhead to print on the substrate in association with one of the scan paths depending on the error model;

using the printer to form a liquid film on a substrate by printing droplets of a liquid onto target regions of the substrate using the assigned nozzles; and

solidifying the liquid film to form a layer.

19. The method of claim 18 , wherein

the processor assigns nozzles to print droplets in an area of the substrate which, based on the error model, will pass over the area of the substrate during execution of each scan path;

the processor retrieves, from non-transitory storage, an expected droplet volume or landing position of each nozzle determined during a calibration operation;

the processor determines whether or not one or more of the expected droplet volumes or landing positions would cause the deposited liquid for the area to fall outside of a predetermined volume tolerance range; and

the processor excludes from use, during execution of each scan path, any of the identified nozzles having corresponding expected droplet volumes or landing positions that would cause the deposited liquid for the area to fall outside of the predetermined volume range.

Assignments (6)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →
SECURITY AGREEMENT Recorded Jan 23, 2020
From: KATEEVA, INC.
To: SINO XIN JI LIMITED
Reel/Frame 051682/0212 →
RELEASE OF SECURITY INTEREST Recorded Jan 22, 2020
From: EAST WEST BANK, A CALIFORNIA BANKING CORPORATION
To: KATEEVA, INC.
Reel/Frame 051664/0802 →
SECURITY INTEREST Recorded Apr 4, 2019
From: KATEEVA, INC.
To: EAST WEST BANK
Reel/Frame 048806/0639 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 18, 2019
From: BAKER, MICHAEL; HARJEE, NAHID; BACON, DOUGLAS
To: KATEEVA, INC.
Reel/Frame 048624/0252 →