IP Library Granted Patent US 10,900,678
Granted Patent B2
US 10,900,678 · App. 16/362,595 · Granted Jan 26, 2021

Gas enclosure assembly and system

Inventors: Justin Mauck (Belmont, CA); Alexander Sou-Kang Ko (Santa Clara, CA); Eliyahu Vronsky (Los Altos, CA); Shandon Alderson (San Carlos, CA)
Assignee: KATEEVA, INC.
F24F3/161B41J29/393F24F3/14H05B33/10B05B17/0638B41J29/377H01L51/0005H01L51/56H05B33/02
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Quick Facts
Patent No.
US 10,900,678
App. No.
16/362,595
Granted
Jan 26, 2021
Kind
B2
Abstract

The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.

Claims (24)

1. A method comprising:

depositing a material on a substrate via an inkjet printing system located in an interior of a gas enclosure assembly;

while depositing the material:

circulating inert gas in the interior of the gas enclosure assembly, and

filtering particulate matter from the inert gas circulated in the interior,

wherein circulating the inert gas comprises flowing the inert gas through ductwork in the interior of the gas enclosure assembly and along a service bundle routed through the ductwork, the bundle comprising at least one of a cable, an electrical wire, a fluid-containing tubing, and a combination thereof operably connected to the inkjet printing system.

2. The method of claim 1 , further comprising flowing at least a portion of the inert gas from the interior through a gas purification system and back into the interior of the gas enclosure assembly.

3. The method of claim 1 , wherein flowing the inert gas through the ductwork entrains one or more reactive species occluded in a dead volume in the bundle.

4. The method of claim 1 , further comprising flowing the inert gas through a gas purification system to remove one or more reactive species entrained by the inert gas during circulating of the inert gas through the interior.

5. The method of claim 4 , wherein the gas purification system is exterior to the gas enclosure assembly.

6. The method of claim 4 , wherein flowing the inert gas through the gas purification system maintains each of the one or more reactive species at or below a specified limit.

7. The method of claim 6 , wherein the specified limit is 100 ppm.

8. The method of claim 6 , wherein the specified limit is 0.1 ppm.

9. The method of claim 4 , wherein the one or more reactive species cause contamination, oxidation, and damage of material deposited on the substrate and/or the substrate.

10. The method of claim 4 , wherein the one or more reactive species are chosen from water vapor, oxygen, organic solvent vapor, and a combination thereof.

11. The method of claim 1 , wherein circulating the inert gas in the interior of the gas enclosure assembly comprises circulating the inert gas in a substantially laminar flow.

12. The method of claim 1 , wherein the inert gas is selected from nitrogen, a noble gas, and a combination thereof.

13. The method of claim 1 , wherein depositing the material on the substrate comprises depositing a material forming part of an organic light-emitting device on the substrate.

14. The method of claim 1 , wherein the substrate has a size of about 60 cm×72 cm to about 220 cm×250 cm.

15. The method of claim 1 , wherein filtering the particulate matter from the inert gas circulated in the interior maintains the interior to meet a particulate specification.

16. The method of claim 1 , further comprising floating the substrate above a substrate support apparatus while depositing the material on the substrate.

17. The method of claim 1 , further comprising supplying inert gas to at least one pneumatic device in the interior of the gas enclosure assembly while depositing the material on the substrate.

18. The method of claim 1 , further comprising lighting the interior using at least one of a cool white and yellow spectrum lighting element.

19. The method of claim 1 , wherein depositing the material on the substrate comprises depositing the material in a pattern on the substrate.

Assignments (6)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →
SECURITY AGREEMENT Recorded Jan 23, 2020
From: KATEEVA, INC.
To: SINO XIN JI LIMITED
Reel/Frame 051682/0212 →
RELEASE OF SECURITY INTEREST Recorded Jan 22, 2020
From: EAST WEST BANK, A CALIFORNIA BANKING CORPORATION
To: KATEEVA, INC.
Reel/Frame 051664/0802 →
SECURITY INTEREST Recorded Apr 4, 2019
From: KATEEVA, INC.
To: EAST WEST BANK
Reel/Frame 048806/0639 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 22, 2019
From: MAUCK, JUSTIN; KO, ALEXANDER SOU-KANG; VRONSKY, ELIYAHU; ALDERSON, SHANDON
To: KATEEVA, INC.
Reel/Frame 048681/0152 →