IP Library Granted Patent US 11,257,978
Granted Patent B2
US 11,257,978 · App. 16/370,473 · Granted Feb 22, 2022

Front metal contact stack

Inventors: Abraham Saldivar-Valdes (Redwood City, CA); Octavi Santiago Escala Semonin (San Francisco, CA)
Assignee: UTICA LEASECO, LLC
H01L31/1864H01L31/02021H01L31/022425H01L31/06H01L31/0693H01L31/0735H01L31/184H01L31/208Y02E10/544
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Quick Facts
Patent No.
US 11,257,978
App. No.
16/370,473
Granted
Feb 22, 2022
Kind
B2
Abstract

A photovoltaic device and a method of forming a contact stack of the photovoltaic device are disclosed. The photovoltaic device may include a first layer deposited on a semiconductor layer including a compound semiconductor material. The photovoltaic device may also include a dopant layer comprising tin (Sn) deposited on the first layer. The photovoltaic device may further include a conductive layer deposited or provided over the dopant layer to form a contact stack with the first layer and the dopant layer.

Claims (17)

1. A method for forming a contact stack of a photovoltaic device, comprising:

depositing a first layer including palladium on a semiconductor layer including a compound semiconductor material;

depositing a dopant layer formed of tin on the first layer;

depositing a conductive layer on the dopant layer to form the contact stack with the first layer; and

annealing the contact stack until a portion of the dopant layer forms a doped area or an anti-doped area within an area of the semiconductor layer, another portion of the dopant layer is combined into the conductive layer, and the dopant layer and the first layer form a single intermediate layer between the semiconductor layer and the conductive layer.

2. The method of claim 1 , wherein the compound semiconductor material comprises a group III-V semiconductor material.

3. The method of claim 2 , wherein the group III-V semiconductor material comprises a combination of two or more of gallium (Ga), arsenic (As), aluminum (Al), indium (In), or phosphorus (P).

4. The method of claim 1 , wherein the semiconductor layer comprises an n-type semiconductor material.

5. The method of claim 1 , wherein the first layer further comprises one or more of nickel (Ni) or platinum (Pt).

6. The method of claim 1 , wherein the dopant layer comprises one or more alloying materials to form an alloy with the tin.

7. The method of claim 6 , wherein the one or more alloying materials comprises lead (Pb), bismuth (Bi), antimony (Sb), copper (Cu), or indium (In).

8. The method of claim 1 , wherein the conductive layer includes a conductive metallic material.

9. The method of claim 8 , wherein the conductive metallic material comprises one or more of copper (Cu), tin (Sn), or gold (Au).

10. The method of claim 1 ,

wherein the annealing of the contact stack is performed at a temperature less than or equal to 200° C.

11. The method of claim 1 , wherein one or more of the depositing of the first layer, the depositing of the dopant layer, or the depositing of the conductive layer includes performing a deposition by an electrochemical process.

12. The method of claim 11 , wherein the electrochemical process is one or more of a galvanic displacement process, an electroless deposition process, or an electroplating process.

Assignments (4)
SECURITY INTEREST Recorded Aug 28, 2023
From: UTICA LEASECO, LLC
To: TIGER FINANCE, LLC
Reel/Frame 064731/0814 →
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE ADDRESS PREVIOUSLY RECORDED AT REEL: 055766 FRAME: 0279. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Aug 9, 2021
From: UTICA LEASECO, LLC SECURED PARTY
To: UTICA LEASECO, LLC ASSIGNEE
Reel/Frame 057117/0811 →
CONFIRMATION OF FORECLOSURE TRANSFER OF PATENT RIGHTS Recorded Feb 25, 2021
From: UTICA LEASECO, LLC SECURED PARTY
To: UTICA LEASECO, LLC ASSIGNEE
Reel/Frame 055766/0279 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2019
From: SALDIVAR-VALDES, ABRAHAM; SEMONIN, OCTAVI SANTIAGO ESCALA
To: ALTA DEVICES, INC.
Reel/Frame 048745/0622 →