Selective inking head for semiconductor devices
A method and system for manufacturing a device by forming a conformable interface layer from elastomer solution on semiconductor devices to facilitate picking and placing the semiconductor devices from a carrier substrate to a target substrate. The method may include transferring elastomer solution onto fluidic tips of a subset of fluidic heads of a fluidic head array by extending one or more fluidic head actuators of the subset of the fluidic heads, transferring the elastomer solution on the fluidic tips of the subset of the fluidic heads to semiconductor devices on a carrier substrate to form conformable interface layers on the semiconductor devices, and picking up the semiconductor devices via adhesive attachment with the conformable interface layers from the carrier substrate to place on a target substrate.
1. A method, comprising:
transferring elastomer solution onto fluidic tips of a subset of fluidic heads of a fluidic head array by extending one or more fluidic head actuators of the subset of the fluidic heads;
transferring the elastomer solution on the fluidic tips of the subset of the fluidic heads to semiconductor devices on a carrier substrate to form conformable interface layers on the semiconductor devices;
picking up the semiconductor devices via adhesive attachment with the conformable interface layers from the carrier substrate; and
placing the picked-up semiconductor devices on a target substrate.
2. The method of claim 1 , wherein the fluidic head actuator of each of the fluidic heads includes a piezo layer, and a voltage is applied to the fluidic head actuator in a direction of polarization the piezo layer to extend the fluidic head actuator.
3. The method of claim 1 , wherein the fluidic head actuator of each of the fluidic heads includes a plurality of stacked piezo layers, and a voltage is applied to across each of the plurality of stacked piezo layers to extend the fluidic head actuator.
4. The method of claim 1 , further comprising:
aligning the fluidic head array with an elastomer solution holder holding the elastomer solution, the fluidic heads each being in a shortened state; and
causing the subset of the fluidic heads to transition from the shortened state to a lengthened state, wherein the elastomer solution is transferred onto the fluidic tips of the portion of the fluidic heads of the fluidic head array.
5. The method of claim 4 , wherein the semiconductor devices on the carrier substrate are separated by a pitch P, and the fluidic heads of the fluidic head array are separated by the pitch P or a multiple of the pitch P.
6. The method of claim 1 , wherein the elastomer solution is transferred to a light emitting surface of each of the semiconductor devices.
7. The method of claim 6 , wherein each semiconductor device includes:
a semiconductor structure including:
a mesa at a first side of the semiconductor structure opposite the light emitting surface at a second side of the semiconductor structure; and
an active light emitting area in the mesa to generate light; and
a reflective contact on the mesa.
8. The method of claim 6 , wherein each semiconductor device includes:
a semiconductor structure including:
the light emitting surface at a first side of the semiconductor structure; and
an active light emitting to generate light;
a transparent electrically conductive cap on a second side of the semiconductor structure opposite the first side; and
a reflective contact on the transparent electrically conductive cap.
9. The method of claim 1 , wherein the target substrate is a display substrate including a control circuit for the semiconductor devices.
10. The method of claim 1 , wherein the fluidic head actuator of each of the fluidic heads includes a piezo bender.