IP Library Granted Patent US 10,784,250
Granted Patent B2
US 10,784,250 · App. 16/372,905 · Granted Sep 22, 2020

Sub-device field-effect transistor architecture for integrated circuits

Inventor: Runzi Chang (Saratoga, CA)
Assignee: MARVELL ASIA PTE, LTD.
H01L27/0207H01L21/8234H01L21/823431H01L27/0886H03K17/6871
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Quick Facts
Patent No.
US 10,784,250
App. No.
16/372,905
Granted
Sep 22, 2020
Kind
B2
Abstract

The present disclosure describes aspects of a sub-device field-effect transistor architecture for integrated circuits. In some aspects, an integrated field-effect transistor (FET) is implemented with multiple FET sub-devices. During operation, source-side FET sub-devices of the integrated FET may operate in the linear region instead of in saturation. Operating in the linear region, the source-side FET sub-devices of the integrated FET may exhibit less threshold voltage or current sensitivity than other drain-side FET sub-devices that operate in saturation. A device layout of the integrated FET may be designed such that the less sensitive source-side FET sub-devices surround or protect the other more sensitive drain-side FET sub-devices from random variations or density issues at edges of the device layout. By so doing, a threshold voltage or current sensitivity of the integrated FET may be reduced, resulting in improved matching between integrated FET devices.

Claims (53)

1. A method of forming an integrated field-effect transistor (FET) of FET sub-devices, the method comprising:

forming a substrate for the integrated FET;

forming, on the substrate, a first set of the FET sub-devices, a first FET sub-device of the first set of the FET sub-devices coupled to a drain terminal of the integrated FET; and

forming, on the substrate, a second set of the FET sub-devices, a second FET sub-device of the second set of the FET sub-devices coupled to a source terminal of the integrated FET,

wherein (i) the first set of the FET sub-devices is formed on an interior portion of substrate area on which the integrated FET is formed and (ii) the second set of the FET sub-devices is formed proximate a perimeter of the substrate area on which the integrated FET is formed.

2. The method as recited in claim 1 , further comprising forming the second set of the FET sub-devices on a planar surface of the substrate area to surround the first set of the FET sub-devices on three sides.

3. The method as recited in claim 1 , further comprising forming the second set of the FET sub-devices on a planar surface of the substrate area to surround the first set of the FET sub-devices on all sides.

4. The method as recited in claim 1 , further comprising forming a gate terminal of the integrated FET coupled to respective gates of the first set of the FET sub-devices and respective gates of the second set of the FET sub-devices.

5. The method as recited in claim 1 , further comprising forming the first set of the FET sub-devices or the second set of the FET sub-devices to couple a source of a third FET sub-device of the first set of the FET sub-devices to a drain of a fourth FET sub-device of the second set of the FET sub-devices.

6. The method as recited in claim 1 , further comprising:

forming the first set of the FET sub-devices of the integrated FET as first FinFET devices; or

forming the second set of the FET sub-devices of the integrated FET as second FinFET devices.

7. The method as recited in claim 1 , further comprising:

forming the drain terminal of the integrated FET on the substrate;

forming the source terminal of the integrated FET on the substrate; or

forming a gate terminal of the integrated FET on the substrate.

8. The method as recited in claim 1 , further comprising:

forming the first set of the FET sub-devices with at least three FET sub-devices configured to operate in saturation mode; or

forming the second set of the FET sub-devices with at least three FET sub-devices configured to operate in linear mode.

9. The method as recited in claim 1 , wherein:

the first set of the FET sub-devices is formed with respective gates that are less than 20 nanometers in length; or

the second set of the FET sub-devices is formed with respective gates that are less than 20 nanometers in length.

10. An integrated circuit comprising:

a substrate having a surface;

an integrated field-effect transistor (FET) that includes an array of FET sub-devices formed on the surface of the substrate, the array of the FET sub-devices including:

a first group of FET sub-devices having respective gates coupled to a gate terminal of the integrated FET and including a first FET sub-device having a drain coupled to a drain terminal of the integrated FET; and

a second group of FET sub-devices having respective gates coupled to the gate terminal of the integrated FET and including a second FET sub-device having a source coupled to a source terminal of the integrated FET,

wherein the array of FET sub-devices is formed on the surface of the substrate such that the second group of FET sub-devices are disposed around at least three sides of substrate area on which the first group of FET sub-devices are disposed.

11. The integrated circuit as recited in claim 10 , wherein the array of FET sub-devices is formed on the surface of the substrate such that the second group of FET sub-devices are disposed to form a perimeter around the substrate area on which the first group of FET sub-devices are disposed.

12. The integrated circuit as recited in claim 10 , wherein:

the first group of FET sub-devices of the integrated FET are configured to operate in a saturation mode or saturation region; and

the second group of FET sub-devices of the integrated FET are configured to operate in a linear mode or linear region.

13. The integrated circuit as recited in claim 10 , wherein:

the respective gates of the first group of FET sub-devices have a gate length that is less than 20 nanometers; or

the respective gates of the second group of FET sub-devices have a gate length that is less than 20 nanometers.

14. The integrated circuit as recited in claim 10 , wherein:

a source of a third FET sub-device of the first group of the FET sub-devices is coupled to a drain of a fourth FET sub-device of the second group of the FET sub-devices.

15. The integrated circuit as recited in claim 10 , wherein geometry of the FET sub-devices of the first group is substantially similar to geometry of the FET sub-devices of the second group.

16. The integrated circuit as recited in claim 10 , wherein:

functionality of the integrated FET is provided at least in part by the second group of FET sub-devices; and

the second group of the FET sub-devices are disposed adjacent to the first group of FET sub-devices without having non-functional devices disposed on the substrate between the first group of FET sub-devices and the second group of FET sub-devices.

17. The integrated circuit as recited in claim 10 , wherein:

the first group of FET sub-devices is implemented on the surface of the substrate as a first group of FinFET devices of the integrated FET; or

the second group of FET sub-devices is implemented on the surface of the substrate as a second group of FinFET devices of the integrated FET.

18. The integrated circuit as recited in claim 10 , wherein the integrated circuit is embodied in whole or part as an analog circuit, a mixed-signal circuit, a current mirror, an amplifier, a filter, an analog-to-digital converter, or a digital-to-analog converter.

19. A method comprising:

providing, via a power rail, a current to a source terminal of an integrated field-effect transistor (FET) formed by multiple FET sub-devices disposed on an area of a substrate;

forming a first group of the multiple FET sub-devices on an interior portion of the area of the substrate on which the integrated FET is formed and forming a second group of the multiple FET sub-devices formed proximate a perimeter of the area of the substrate on which the integrated FET is formed;

applying voltage to a gate terminal of the integrated FET to operate the first group of the multiple FET sub-devices in saturation mode and the second group of the FET sub-devices in linear mode; and

providing, based on the voltage applied to the gate terminal, at least a portion of the current to a drain terminal of the integrated FET via the first group and the second group of the multiple FET sub-devices of the integrated FET.

20. The method as recited in claim 19 , wherein:

respective gates of the first and second groups of the multiple FET sub-devices are coupled to the gate terminal of the integrated FET; and

applying the voltage comprises applying, via the gate terminal, the voltage to the respective gates of the first and second groups of the multiple FET sub-devices.

Assignments (7)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2020
From: CAVIUM INTERNATIONAL
To: MARVELL ASIA PTE, LTD.
Reel/Frame 053475/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2020
From: MARVELL INTERNATIONAL LTD.
To: CAVIUM INTERNATIONAL
Reel/Frame 052918/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 29, 2020
From: MARVELL WORLD TRADE LTD.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 051778/0537 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2019
From: CHANG, RUNZI
To: MARVELL SEMICONDUCTOR, INC.
Reel/Frame 048791/0398 →
LICENSE Recorded Apr 4, 2019
From: MARVELL WORLD TRADE LTD.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 048791/0719 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2019
From: MARVELL SEMICONDUCTOR, INC.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 048791/0480 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2019
From: MARVELL INTERNATIONAL LTD.
To: MARVELL WORLD TRADE LTD.
Reel/Frame 048791/0649 →
Continuity (2)
Provisional Application 62720814 · Aug 21, 2018
Related Publication 20200066706A1 · Feb 27, 2020