Flow control system, method, and apparatus
A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The second flow component mounting region has a second inlet port, a second outlet port, and a first auxiliary port.
1. A mass flow control apparatus comprising:
a monolithic base, the monolithic base comprising a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region;
wherein the first flow component mounting region comprises a first inlet port and a first outlet port, the first inlet port fluidly coupled to the gas inlet of the monolithic base; and
wherein the second flow component mounting region comprises a second inlet port, a second outlet port, and a first auxiliary port.
2. The mass flow control apparatus of claim 1 wherein the third flow component mounting region comprises a first sensing port, the first sensing port and the second outlet port fluidly coupled to the gas outlet of the monolithic base.
3. The mass flow control apparatus of claim 1 wherein the first outlet port is fluidly coupled to the second inlet port.
4. The mass flow control apparatus of claim 1 wherein the third flow component mounting region comprises a third inlet port, a third outlet port, and a second auxiliary port.
5. The mass flow control apparatus of claim 1 further comprising a fourth flow component mounting region.
6. The mass flow control apparatus of claim 5 wherein the fourth flow component mounting region comprises a fourth inlet port and a fourth outlet port, the third outlet port and the fourth outlet port being connected to the gas outlet of the monolithic base.
7. The mass flow control apparatus of claim 1 further comprising a proportional valve coupled to the first flow component mounting region and a cap component coupled to the second flow component mounting region, the cap component having a passage connecting the second inlet port to the second outlet port.
8. The mass flow control apparatus of claim 1 further comprising a cap component coupled to the second flow component mounting region.
9. The mass flow control apparatus of claim 1 further comprising a first valve coupled to the first flow component mounting region and a second valve coupled to the second flow component mounting region, the second valve fluidly coupled to the second inlet port and the second outlet port and blocking the first auxiliary port.
10. The mass flow control apparatus of claim 9 wherein the second valve is fluidly coupled to the first auxiliary port of the second flow component mounting region.
11. A mass flow control apparatus comprising:
a monolithic base, the monolithic base comprising a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region;
a first valve coupled to the first flow component mounting region; and
a cap component coupled to one of the second flow component mounting region or the third flow component mounting region;
wherein the first flow component mounting region comprises a first inlet port and a first outlet port, the first inlet port fluidly coupled to the gas inlet of the monolithic base; and
wherein the second flow component mounting region comprises a second inlet port, a second outlet port, and a first auxiliary port.
12. The mass flow control apparatus of claim 11 further comprising a second valve fluidly coupled to the third flow component mounting region.
13. The mass flow control apparatus of claim 12 wherein the second valve comprises a laminar flow component.
14. The mass flow control apparatus of claim 11 wherein the cap component has a passage which fluidly couples the second inlet port and the second outlet port.
15. The mass flow control apparatus of claim 11 wherein the cap component has a passage which fluidly couples the second inlet port and the second outlet port.
16. The mass flow control apparatus of claim 11 wherein the cap component blocks flow through the first auxiliary port.
17. A mass flow control apparatus comprising:
a monolithic base, the monolithic base comprising a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region;
a first valve coupled to the first flow component mounting region;
a second valve coupled to the second flow component mounting region;
a third valve coupled to the third flow component mounting region;
wherein the first flow component mounting region comprises a first inlet port fluidly coupled to the gas inlet of the monolithic base;
wherein the second flow component mounting region comprises a first auxiliary port; and
wherein the third valve is fluidly coupled to the gas outlet of the monolithic base.
18. The mass flow control apparatus of claim 17 wherein the first valve is a proportional valve.
19. The mass flow control apparatus of claim 17 wherein the second and third valves further comprise laminar flow components.
20. The mass flow control apparatus of claim 17 wherein the second valve is fluidly coupled to the first auxiliary port.