Image sensing device
An image sensing device capable of minimizing reflection of light incident upon a metal layer is disclosed. The image sensing device includes a semiconductor substrate in which at least one groove is formed, a reflection prevention layer formed over the semiconductor substrate in a manner that the at least one groove is buried by the reflection prevention layer, and a metal layer formed over the reflection prevention layer, and provided with at least one through-hole corresponding to the at least one groove.
1. An image sensing device comprising:
a semiconductor substrate;
a pixel region formed at the semiconductor substrate to include photosensing pixels that convert light into pixel signals;
an adjacent region formed at the semiconductor substrate adjacent to the pixel region and structured to include one or more grooves;
a reflection prevention layer formed in the adjacent region over the semiconductor substrate to fill in the one or more grooves, the reflection prevention layer configured to absorb light incident thereon to reduce light from the adjacent region to the pixel region; and
a pad formed in the adjacent region over the reflection prevention layer to be electrically coupled to an external circuit, and structured to include one or more through-holes spatially corresponding to the one or more grooves, respectively.
2. The image sensing device according to claim 1 , wherein the one or more through-holes are arranged to vertically overlap the one or more grooves.
3. The image sensing device according to claim 2 , wherein a center point of each of the one or more through-holes is located at the same vertical line as a center point of a corresponding groove of the one or more grooves.
4. The image sensing device according to claim 1 , wherein the pad includes a stacked structure of a tungsten layer and an aluminum layer.
5. The image sensing device according to claim 1 , wherein a horizontal cross-sectional area of each of the one or more through-holes is identical in shape to a horizontal cross-sectional area of each of the one or more grooves.
6. The image sensing device according to claim 5 , wherein each of the horizontal cross-sectional areas of the one or more through-holes and the one or more grooves is in a circular shape.
7. An image sensing device comprising:
a semiconductor substrate;
a pixel region formed at the semiconductor substrate to include photosensing pixels that convert light into pixel signals;
an adjacent region formed at the semiconductor substrate adjacent to the pixel region and structured to include one or more grooves;
a reflection prevention layer formed in the adjacent region over the semiconductor substrate to fill in the one or more grooves, the reflection prevention layer configured to reduce reflection of light incident thereon to reduce light from the adjacent region to the pixel region; and
a metal layer formed in the adjacent region over the reflection prevention layer, and structured to include one or more through-holes spatially corresponding to the one or more grooves, respectively,
wherein a horizontal cross-sectional area of each of the one or more through-holes is identical in shape to a horizontal cross-sectional area of each of the one or more grooves, and
wherein the horizontal cross-sectional area of each of the one or more through-holes and the one or more grooves gradually decreases in size in a downward direction towards the semiconductor substrate.
8. An image sensing device comprising:
a pixel region including a plurality of unit pixels structured to convert light into an electrical signal;
a logic region including a plurality of logic circuits, each of the logic circuits is in communication with one or more of the unit pixels to receive the electrical signal from the pixel region and perform signal processing of the received electrical signal; and
a pad region including a pad configured to electrically couple the logic circuits to an external circuit,
wherein the pad includes at least one through-hole and the pad region includes a light absorption structure, and wherein the at least one through-hole is structured to provide a light reflection path to direct light to the light absorption structure, and the light absorption structure is formed to absorb the light received through the at least one through-hole.
9. The image sensing device according to claim 8 , wherein the light absorption structure includes:
a semiconductor substrate including at least one groove formed to be aligned with the at least one through-hole and to have a predetermined depth; and
a reflection prevention layer formed between the semiconductor substrate and the pad in a manner that the at least one groove is filled with the reflection prevention layer.
10. The image sensing device according to claim 9 , wherein the at least one through-hole is formed at a specific position where the at least one through-hole is formed to vertically overlap the at least one groove.
11. The image sensing device according to claim 10 , wherein a center point of the at least one through-hole is aligned with a center point of the at least one groove.
12. The image sensing device according to claim 9 , wherein a horizontal cross-sectional area of each of the at least one through-hole and the at least one groove gradually decreases in size in a downward direction.
13. The image sensing device according to claim 8 , wherein the pad includes a metal layer.
14. The image sensing device according to claim 13 , wherein the metal layer includes a stacked structure of a tungsten layer and an aluminum layer.
15. The image sensing device according to claim 5 , wherein the horizontal cross-sectional area of each of the one or more through-holes and the one or more grooves gradually decreases in size in a downward direction towards the semiconductor substrate.
16. The image sensing device according to claim 7 , wherein the one or more through-holes are arranged to vertically overlap the one or more grooves.
17. The image sensing device according to claim 16 , wherein a center point of each of the one or more through-holes is located at the same vertical line as a center point of a corresponding groove of the one or more grooves.
18. The image sensing device according to claim 7 , wherein the metal layer includes a stacked structure of a tungsten layer and an aluminum layer.
19. The image sensing device according to claim 7 , wherein each of the horizontal cross-sectional areas of the one or more through-holes and the one or more grooves is in a circular shape.