IP Library Granted Patent US 10,784,404
Granted Patent B2
US 10,784,404 · App. 16/397,775 · Granted Sep 22, 2020

Light-emitting device

Inventors: Peng Ren Chen (Hsinchu, TW); Yu-Shan Chiu (Hsinchu, TW); Wen-Hsiang Lin (Hsinchu, TW); Shih-Wei Wang (Hsinchu, TW); Chen Ou (Hsinchu, TW)
Assignee: EPISTAR CORPORATION
H01L33/22H01L33/007H01L33/025H01L33/06H01L33/12H01L33/32
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Quick Facts
Patent No.
US 10,784,404
App. No.
16/397,775
Granted
Sep 22, 2020
Kind
B2
Abstract

A light-emitting device, includes a substrate structure, including a base portion having a surface and a plurality of protrusions formed on the base portion; a buffer layer covering the plurality of protrusions and the surface; and III-V compound semiconductor layers formed on the buffer layer; wherein one of the plurality of protrusions has a height not greater than 1.5 μm; wherein the light-emitting device has a full width at half maximum (FWHM) of smaller than 250 arcsec in accordance with a (102) XRD rocking curve.

Claims (18)

1. A light-emitting device, comprising:

a substrate structure, comprising a base portion having a surface and a plurality of protrusions regularly formed on the base portion;

a buffer layer covering the plurality of protrusions and the surface; and

III-V compound semiconductor layers formed on the buffer layer;

wherein one of the plurality of protrusions has a height not greater than 1.5 μm;

wherein the light-emitting device has a full width at half maximum (FWHM) of smaller than 250 arcsec in accordance with a (102) XRD rocking curve;

wherein the base portion comprises a first material and the plurality of protrusions comprises a second material which is different from the first material, and a refractive index of the second material is smaller than a refractive index of the first material; and

wherein the buffer layer comprises a third material which is different from the second material.

2. The light-emitting device according to claim 1 , wherein in a cross-sectional view, an included angle between a side surface of one of the plurality of protrusions and the surface of the base portion is less than 65 degrees.

3. The light-emitting device according to claim 1 , wherein one of the plurality of protrusions comprises a first portion and a second portion formed on the first portion, and the first portion is integrated with the base portion and comprises a material that is the same as the first material of the base portion.

4. The light-emitting device according to claim 3 , wherein the first material comprises sapphire.

5. The light-emitting device according to claim 3 , wherein the second material comprises SiO 2 .

6. The light-emitting device according to claim 3 , wherein the first portion of one of the plurality of protrusions has a height H 1 and the one of the plurality of protrusions has a height H; wherein a ratio of H 1 to H is between 1% and 30% both inclusive.

7. The light-emitting element of claim 1 , wherein an arrangement of the plurality of protrusions has a period and the period is between 1 μm and 3 μm both inclusive.

8. The light-emitting device according to claim 1 , wherein the buffer layer is conformally formed on the plurality of protrusion and the surface and the third material comprises aluminum nitride.

9. The light-emitting device according to claim 1 , wherein a thickness of the buffer layer is greater than 5 nm and not more than 50 nm.

10. The light-emitting device according to claim 1 , wherein a three-dimensional shape of one of the plurality of protrusions comprises a cone or a pyramid.

11. The light-emitting device according to claim 1 , wherein the FWHM is not less than 100 arcsec.

Assignments (2)
CHANGE OF NAME Recorded Feb 26, 2026
From: EPISTAR CORPORATION
To: ENNOSTAR CORPORATION
Reel/Frame 075152/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 30, 2019
From: CHEN, PENG REN; CHIU, YU-SHAN; LIN, WEN-HSIANG; WANG, SHIH-WEI; OU, CHEN
To: EPISTAR CORPORATION
Reel/Frame 049039/0229 →