Eutectic bonding with ALGe
A MEMS device formed in a first semiconductor substrate is sealed using a second semiconductor substrate. To achieve this, an Aluminum Germanium structure is formed above the first substrate, and a polysilicon layer is formed above the second substrate. The first substrate is covered with the second substrate so as to cause the polysilicon layer to contact the Aluminum Germanium structure. Thereafter, eutectic bonding is performed between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form an AlGeSi sealant thereby to seal the MEMS device. Optionally, the Germanium Aluminum structure includes, in part, a layer of Germanium overlaying a layer of Aluminum.
1. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming an Aluminum Germanium structure above the first substrate;
forming a polysilicon layer above the second substrate;
covering the first substrate with the second substrate so as to cause the polysilicon layer to contact the Aluminum Germanium structure; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.
2. The method of claim 1 further comprising:
forming an adhesive layer below the Aluminum Germanium structure in the first substrate.
3. The method of claim 2 further comprising:
forming an Alumina layer between the Aluminum Germanium structure and the adhesive layer.
4. The method of claim 2 wherein said adhesive layer is a Titanium Nitride layer.
5. The method of claim 1 further comprising:
forming an Alumina layer below the Polysilicon layer in the second substrate.
6. The method of claim 5 further comprising:
forming an adhesive layer below the Alumina layer in the second substrate.
7. The method of claim 1 wherein said Germanium Aluminum structure comprises a layer of Germanium overlaying a layer of Aluminum.
8. The method of claim 1 further comprising:
forming a Polycide layer below the Polysilicon layer in the second substrate.
9. The method of claim 1 wherein said Aluminum Germanium structure comprises a layer of Germanium overlaying a layer of Aluminum, wherein said Aluminum layer comprises Copper atoms.
10. The method of claim 1 wherein said Aluminum Germanium structure comprises a layer of Aluminum and Germanium that are co-deposited.
11. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming a Silicide layer either in or above the first substrate;
forming an Aluminum Germanium structure above the Silicide layer of the first substrate;
forming a Silicide layer either in or above a substrate of the second substrate;
covering the first substrate with the second substrate so as to cause the Aluminum Germanium structure of the first substrate to contact the Silicide layer of the second substrate; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.
12. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming a Silicide layer either in or above the first substrate;
forming a Silicide layer either in or above the second substrate;
forming an Aluminum Germanium structure above the Silicide layer of the second substrate;
covering the first substrate with the second substrate so as to cause the Aluminum Germanium structure of the second substrate to contact the Silicide layer of the first substrate; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.
13. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming a Silicide layer either in or above a substrate of the first substrate;
forming an Aluminum Germanium structure above the Silicide layer of the first substrate;
forming a Silicide layer either in or above a substrate of the second substrate;
forming an Aluminum Germanium structure above the Silicide layer of the second substrate;
covering the first substrate with the second substrate so as to cause the Aluminum Germanium structure of the first substrate to contact the Aluminum Germanium structure of the first substrate; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.
14. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming a Silicide layer either in or above a substrate of the first substrate; forming an Aluminum Germanium structure above the Silicide layer of the first substrate;
forming a Silicide layer either in or above a substrate of the second substrate; forming an Aluminum structure above the Silicide layer of the second substrate;
covering the first substrate with the second substrate so as to cause the Aluminum Germanium structure of the first substrate to contact the Aluminum structure of the second substrate; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.
15. A method of sealing a MEMS device formed in a first semiconductor substrate using a second semiconductor substrate, the method comprising:
forming a Silicide layer either in or above a substrate of the first substrate;
forming a Germanium structure above the Silicide layer of the first substrate;
forming a Silicide layer either in or above a substrate of the second substrate;
forming an Aluminum Germanium structure above the Silicide layer of the second substrate;
covering the first substrate with the second substrate so as to cause the Aluminum Germanium structure of the second substrate to contact the Germanium structure of the first substrate; and
performing eutectic bonding between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form a AlGeSi sealant thereby to seal the MEMS device.