Systems and methods for sealing micro-valves for use in jetting assemblies
A micro-valve includes an orifice plate having a first surface, a second surface and an orifice extending from the first surface to the second surface. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam includes a base portion and a cantilevered portion. The base portion is separated from the orifice plate by a predetermined distance. The cantilevered portion extends from the base portion such that an overlapping portion thereof overlaps the orifice. The actuating beam is movable between a closed position and an open position. The micro-valve also includes a sealing structure including a sealing member disposed at the overlapping portion of the cantilevered portion. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.
1. A micro-valve comprising:
an orifice plate including a first surface and a second surface, the orifice plate comprising an orifice extending from the first surface to the second surface;
an actuating beam disposed in spaced relation to the orifice plate, the actuating beam including a base portion and a cantilevered portion, the base portion separated from the orifice plate by a predetermined distance, the cantilevered portion extending from the base portion towards the orifice such that an overlapping portion thereof overlaps the orifice wherein the actuating beam is movable between a closed position and an open position; and
a sealing structure disposed on the actuating beam, the sealing structure comprising:
a valve seat surrounding the orifice, the valve seat defining an opening that surrounds the orifice to define a fluid outlet,
a sealing member disposed at the overlapping portion of the cantilevered portion, and
a first sealing blade extending a distance from a sealing member surface of the sealing member towards the orifice plate, the first sealing blade surrounding an entire perimeter of the orifice, the sealing blade configured to contact the valve seat in the closed position so as to seal the orifice and close the micro-valve.
2. The micro-valve of claim 1 , wherein the actuating beam comprises a layer of a piezoelectric material, the actuating beam movable between the closed position and the open position in response to an electrical signal being applied to the piezoelectric material.
3. The micro-valve of claim 1 , wherein the sealing structure comprises a stopper disposed on a surface of the sealing member, the stopper including a first portion attached to a surface of the sealing member and a second portion disposed on the first portion proximate to the orifice plate, wherein the second portion has a greater cross-sectional area than the first portion.
4. The micro-valve of claim 3 , wherein the stopper is constructed of a bisphenol-A novalac glycidyl ether based photoresist.
5. The micro-valve of claim 3 , wherein each of the sealing member, the first portion, and the second portion are substantially cylindrical-shaped.
6. The micro-valve of claim 1 , wherein the sealing member comprises:
a sealing member surface facing the orifice, the sealing member surface being substantially parallel to an upper surface of the orifice plate, wherein the sealing member surface is displaced from the valve seat by a distance when the actuating beam is in the closed position.
7. The micro-valve of claim 1 , wherein the sealing member and the orifice plate are substantially cylindrical-shaped, wherein the orifice is of a first diameter and the sealing member is of a second diameter that is greater than the first diameter.
8. The micro-valve of claim 7 , wherein the first sealing blade is annular-shaped and includes a first outer diameter that is greater than the first diameter and less than the second diameter.
9. The micro-valve of claim 1 , wherein inner surfaces of the valve seat and the orifice are substantially aligned with one another to form a fluid outlet, wherein the micro-valve further comprises a coating disposed on an inner surface of the fluid outlet.
10. The micro-valve of claim 1 , further comprising a compliance layer covering at least one of an upper surface of the valve seat that faces the sealing member, or a sealing member surface of the sealing member facing the valve seat.
11. The micro-valve of claim 10 , wherein the compliance layer comprises gold.
12. The micro-valve of claim 1 , wherein the sealing member further comprises a second sealing blade surrounding the first sealing blade, the second sealing blade having a second outer diameter that is greater than the first outer diameter but less than the second diameter such that an annular gap is formed between the first sealing blade and the second sealing blade.
13. A micro-valve comprising:
an orifice plate including a first surface and a second surface, the orifice plate comprising an orifice extending from the first surface to the second surface;
an actuating beam disposed in spaced relation to the orifice plate, the actuating beam including a base portion and a cantilevered portion, the base portion separated from the orifice plate by a predetermined distance, the cantilevered portion extending from the base portion towards the orifice such that an overlapping portion thereof overlaps the orifice wherein the actuating beam is movable between a closed position and an open position; and
a sealing structure comprising a sealing member disposed at the overlapping portion of the cantilevered portion, wherein the sealing structure comprises:
a valve seat surrounding the orifice, the valve seat defining an opening that overlaps the orifice to define a fluid outlet,
a sealing member surface facing the orifice, the sealing member surface being substantially parallel to an upper surface of the orifice plate, wherein the sealing member surface is displaced from the valve seat by a distance when the actuating beam is in the closed position, and
a first sealing blade extending the distance from the sealing member surface towards the orifice plate, wherein the first sealing blade surrounds an entire perimeter of the orifice; and
wherein, when the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.