Masks for fabrication of organic lighting-emitting diode devices
A mask includes a mask body and at least one sub-mask provided on the mask body. The sub-mask includes an evaporation zone and a shield portion. The shield portion is provided with at least one groove in a thickness direction of the sub-mask. The groove has a depth smaller than a thickness of the mask body. Since the shield portion is provided with the groove, and a single groove has a depth smaller than the thickness of the mask body, it not only ensures that there is no pixel evaporated onto a substrate at the shield portion, but also reduces the thickness of the shield portion, thereby reduces weight thereof, lowers the weight difference between the shield portion and the evaporation zone and reduces the stress concentration on the shield portion, resulting in that the mask body is evenly stressed during tensioning.
1. A mask, comprising:
a mask body; and
at least one sub-mask provided on the mask body, wherein the sub-mask includes an evaporation zone and a shield portion, the shield portion is configured to form a slotting zone of a profiled screen, the shield portion is provided with at least one groove in a thickness direction of the sub-mask, and the groove has a depth smaller than a thickness of the mask body; and the shield portion is an arcuate shield portion having an arcuate edge and a straight edge, and the arcuate edge protrudes away from the straight edge in a length direction of the sub-mask and fits an edge of the evaporation zone,
wherein the shield portion has an evaporation surface facing to an evaporation source and a glass-facing surface facing away from the evaporation source, the at least one groove comprises a first groove provided in the evaporation surface and a second groove provided in the glass-facing surface, and a bottom wall of the first groove and a bottom wall of the second groove are spaced apart along a thickness direction of the shield portion.
2. The mask of claim 1 , wherein the number of the groove is at least two, and every two adjacent grooves are spaced apart on a plane where the sub-mask lies.
3. The mask of claim 1 , wherein a projection of the first groove on a plane where the sub-mask lies and a projection of the second groove on the plane where the sub-mask lies are at least partially overlapped.
4. The mask of claim 1 , wherein a projection of the first groove on a plane where the sub-mask lies and a projection of the second groove on the plane where the sub-mask lies do not have an overlapped area.
5. The mask of claim 1 , wherein the first groove has a depth greater than or equal to that of the second groove.
6. The mask of claim 5 , wherein the first groove has a depth greater than that of the second groove.
7. The mask of claim 1 , wherein the first groove and the second groove each has a depth equal to or greater than half of the thickness of the mask body.
8. The mask of claim 1 , wherein the groove has a cross section with a shape that is polygonal or circular or elliptical.
9. The mask of claim 1 , wherein the mask body has a first centerline and a second centerline perpendicular to each other;
the mask body is provided with two sets of the sub-masks, each set of the sub-masks includes at least one sub-mask, every two adjacent sub-masks are spaced apart, and the two sets of the sub-masks are axis-symmetrical about the first centerline and axis-symmetrical about the second centerline, respectively.
10. The mask of claim 1 , wherein the mask body has a centerline and is provided with a row of sub-masks, and
the sub-masks located on both sides of the centerline have their shield portions all facing away from the centerline, or the sub-masks located on both sides of the centerline have their shield portions all facing to the centerline.
11. The mask of claim 1 , wherein the mask body has a centerline and is provided with a row of sub-masks, the sub-masks on a same side of the centerline comprises a plurality of subsets of the sub-masks, each subset of the sub-masks includes two adjacent sub-masks, and the shield portions of the two adjacent sub-masks are adjacent to each other.
12. The mask of claim 1 , wherein the mask body has a centerline and is provided with multiple rows of sub-masks, and
the sub-masks located on both sides of the centerline have their shield portions all facing away from the centerline, or the sub-masks located on both sides of the centerline have their shield portions all facing to the centerline.
13. The mask of claim 1 , wherein the mask body has a centerline and is provided with multiple rows of sub-masks, the sub-masks on a same side of the centerline comprises a plurality of subsets of the sub-masks, each subset of the sub-masks includes two adjacent sub-masks, and the shield portions of the two adjacent sub-masks are adjacent to each other.
14. The mask of claim 1 , wherein the mask body has a first centerline and a second centerline perpendicular to each other, and the sub-masks are symmetric about the first centerline or the second centerline.
15. The mask of claim 14 , wherein the first centerline is a line connecting the centers of the left and right sides and the second centerline is a line connecting the centers of upper and lower sides of the mask body, and the shield portions of the sub-masks on the same side of the second centerline are all facing to the second centerline.
16. The mask of claim 1 , wherein the mask further comprises a mask frame to which the mask body is fixed.
17. The mask of claim 1 , wherein the groove has a cross section that is a strip whose long side extends in the direction of a long side of the mask body.
18. The mask of claim 1 , wherein the first groove covers substantially entire area of the evaporation surface, and the second groove covers substantially entire area of the glass-facing surface.