Systems, articles, and methods for capacitive electromyography sensors
Systems, articles, and methods for improved capacitive electromyography (“EMG”) sensors are described. The improved capacitive EMG sensors include one or more sensor electrode(s) that is/are coated with a protective barrier formed of a material that has a relative permittivity ε r of about 10 or more. The protective barrier shields the sensor electrode(s) from moisture, sweat, skin oils, etc. while advantageously contributing to a large capacitance between the sensor electrode(s) and the user's body. In this way, the improved capacitive EMG sensors provide enhanced robustness against variations in skin and/or environmental conditions. Such improved capacitive EMG sensors are particularly well-suited for use in wearable EMG devices that may be worn by a user for an extended period of time and/or under a variety of skin and/or environmental conditions. A wearable EMG device that provides a component of a human-electronics interface and incorporates such improved capacitive EMG sensors is described.
1. A wearable electromyography (“EMG”) device, comprising:
at least one EMG sensor responsive to a gesture performed by a user of the wearable EMG device, wherein in response to the gesture performed by the user the at least one EMG sensor provides at least one signal, and wherein the at least one EMG sensor includes:
a substrate, wherein the substrate includes a first surface and a second surface, the second surface of the substrate opposite the first surface of the substrate;
a first electrode carried by the second surface of the substrate, wherein the first electrode comprises a first electrically conductive plate having a first surface and a second surface, the second surface of the first electrically conductive plate opposite the first surface of the first electrically conductive plate, wherein the first surface of the first electrically conductive plate faces the substrate;
a ground electrode carried by the second surface of the substrate, wherein the ground electrode comprises a second electrically conductive plate having a first surface and a second surface, the second surface of the second electrically conductive plate opposite the first surface of the second electrically conductive plate, wherein the first surface of the second electrically conductive plate faces the substrate, wherein the second surface of the second electrically conductive plate is exposed;
circuitry communicatively coupled to both the first electrode and the ground electrode, wherein at least a portion of the circuitry is carried by the first surface of the substrate;
a first electrically conductive pathway that passes through the substrate and communicatively couples the first electrode to the circuitry; and
a second electrically conductive pathway that passes through the substrate and communicatively couples the ground electrode to the circuitry;
a processor communicatively coupled to the circuitry of the at least one EMG sensor to process signals provided by the at least one EMG sensor; and
an output terminal communicatively coupled to the processor to transmit signals output by the processor.
2. The wearable EMG device of claim 1 , wherein the circuitry of the at least one EMG sensor includes at least one circuit selected from a group consisting of: an amplification circuit, a filtering circuit, and an analog-to-digital conversion circuit.
3. The wearable EMG device of claim 1 , wherein the at least one EMG sensor further comprises:
a second electrode carried by the substrate, wherein the second electrode comprises a third electrically conductive plate having a first surface and a second surface, the second surface of the third electrically conductive plate opposite the first surface of the third electrically conductive plate, wherein the first surface of the third electrically conductive plate faces the substrate; and
a third electrically conductive pathway that passes through the substrate and communicatively couples the second electrode to the circuitry.
4. The wearable EMG device of claim 3 , wherein the first electrode of the at least one EMG sensor is a first sensor electrode and the second electrode of the at least one EMG sensor is a second sensor electrode.
5. The wearable EMG device of claim 4 , wherein the at least one EMG sensor is a differential EMG sensor.
6. The wearable EMG device of claim 4 , wherein the first sensor electrode of the at least one EMG sensor and the second sensor electrode of the at least one EMG sensor are substantially coplanar.
7. The wearable EMG device of claim 1 , wherein the at least one EMG sensor further comprises:
a dielectric layer formed of a dielectric material that has a relative permittivity of at least about 10, wherein the dielectric layer coats the second surface of the first electrode.
8. The wearable EMG device of claim 7 , wherein the dielectric layer of the at least one EMG sensor does not coat the ground electrode of the at least one EMG sensor.
9. The wearable EMG device of claim 7 , wherein the dielectric layer includes a ceramic material.
10. The wearable EMG device of claim 1 , wherein the at least one EMG sensor is a capacitive EMG sensor.
11. An electromyography (“EMG”) sensor, comprising:
a substrate, wherein the substrate includes a first surface and a second surface, the second surface of the substrate opposite the first surface of the substrate;
a first electrode carried by the second surface of the substrate, wherein the first electrode comprises a first electrically conductive plate having a first surface and a second surface, the second surface of the first electrically conductive plate opposite the first surface of the first electrically conductive plate, wherein the first surface of the first electrically conductive plate faces the substrate;
a ground electrode carried by the second surface of the substrate, wherein the ground electrode comprises a second electrically conductive plate having a first surface and a second surface, the second surface of the second electrically conductive plate opposite the first surface of the second electrically conductive plate, wherein the first surface of the second electrically conductive plate faces the substrate, wherein the second surface of the second electrically conductive plate is exposed;
circuitry communicatively coupled to both the first electrode and the ground electrode, wherein at least a portion of the circuitry is carried by the first surface of the substrate;
a first electrically conductive pathway that passes through the substrate and communicatively couples the first electrode to the circuitry; and
a second electrically conductive pathway that passes through the substrate and communicatively couples the ground electrode to the circuitry.
12. The EMG sensor of claim 11 , wherein the circuitry includes at least one circuit selected from a group consisting of: an amplification circuit, a filtering circuit, and an analog-to-digital conversion circuit.
13. The EMG sensor of claim 11 , further comprising:
a second electrode carried by the substrate, wherein the second electrode comprises a third electrically conductive plate having a first surface and a second surface, the second surface of the third electrically conductive plate opposite the first surface of the third electrically conductive plate, wherein the first surface of the third electrically conductive plate faces the substrate; and
a third electrically conductive pathway that passes through the substrate and communicatively couples the second electrode to the circuitry.
14. The EMG sensor of claim 13 , wherein the first electrode is a first sensor electrode and the second electrode is a second sensor electrode.
15. The EMG sensor of claim 14 , wherein the EMG sensor is a differential EMG sensor.
16. The EMG sensor of claim 14 , wherein the first sensor electrode and the second sensor electrode are substantially coplanar.
17. The EMG sensor of claim 11 , further comprising:
a dielectric layer formed of a dielectric material that has a relative permittivity of at least about 10, wherein the dielectric layer coats the second surface of the first electrode.
18. The EMG sensor of claim 17 , wherein the dielectric layer does not coat the ground electrode.
19. The EMG sensor of claim 17 , wherein the dielectric layer includes a ceramic material.
20. The EMG sensor of claim 11 , wherein the EMG sensor is a capacitive EMG sensor.
21. A method of fabricating an electromyography (“EMG”) sensor, the method comprising:
forming at least a portion of at least one circuit on a first surface of a substrate;
forming a first electrode on a second surface of the substrate, the second surface of the substrate opposite the first surface of the substrate across a thickness of the substrate, wherein the first electrode comprises a first electrically conductive plate;
forming a first electrically conductive pathway through the substrate that communicatively couples the first electrode and the at least a portion of at least one circuit;
forming a ground electrode on the second surface of the substrate, wherein the ground electrode comprises a second electrically conductive plate having a first surface and a second surface, the second surface of the second electrically conductive plate opposite the first surface of the second electrically conductive plate, wherein the first surface of the second electrically conductive plate faces the substrate, wherein the second surface of the second electrically conductive plate is exposed; and
forming a second electrically conductive pathway through the substrate that communicatively couples the ground electrode and the at least a portion of at least one circuit.
22. The method of claim 21 , wherein the EMG sensor is a differential capacitive EMG sensor, the method further comprising:
forming a second electrode on the second surface of the substrate, wherein the second electrode comprises a third electrically conductive plate; and
forming a third electrically conductive pathway through the substrate that communicatively couples the second electrode and the at least a portion of at least one circuit.
23. The method of claim 22 , the method further comprising:
coating the first electrode with a dielectric layer comprising a dielectric material that has a relative permittivity of at least about 10.
24. The method of claim 23 , wherein coating the first electrode with the dielectric layer comprises selectively coating the first electrode with the dielectric layer and not coating the ground electrode with the dielectric layer.
25. The method of claim 23 , wherein coating the first electrode with the dielectric layer comprises coating both the first electrode and the ground electrode with the dielectric layer and forming a hole in the dielectric layer to expose the ground electrode.
26. The method of claim 23 , wherein coating the first electrode with a dielectric layer includes coating the first electrode with a ceramic material.
27. The method of claim 23 , wherein coating the first electrode with a dielectric layer comprises:
depositing a layer of electrically conductive adhesive on the first electrode; and
depositing the dielectric layer on the layer of electrically conductive adhesive.
28. The method of claim 27 , wherein the electrically conductive adhesive is selected from the group consisting of electrically conductive epoxy and electrically conductive solder.
29. The method of claim 23 , the method further comprising:
coating the second electrode with the dielectric layer.
30. The method of claim 21 , wherein the EMG sensor is a capacitive EMG sensor.