Organic el display panel manufacturing method
View Patent ↗A method of manufacturing an organic electroluminescence display panel includes: forming pixel electrodes in matrix on a substrate; arranging column banks extending in column direction above the substrate along row direction, the banks each being between adjacent pixel electrodes in the row direction; applying ink containing organic light emitting material to gaps between adjacent banks, the applied ink being continuous in the column direction; reducing pressure of atmosphere including the substrate to first pressure while positioning a rectifying plate at first distance from upper surface of the substrate, the plate covering region with the ink applied on the substrate; reducing, after the reducing, the pressure to second pressure, which is lower than the first pressure, or lower while positioning the plate at second distance, which is greater than the first distance, from the surface; heating the substrate to form organic functional layer; and forming counter electrode above the functional layer.
1. A method of manufacturing an organic electroluminescence (EL) display panel, the method comprising:
forming pixel electrodes in a matrix on a substrate, wherein the matrix comprises rows and columns;
arranging column banks, which extend in a column direction, above the substrate along a row direction, wherein each of the column banks is between adjacent pixel electrodes in the row direction;
applying ink containing organic light emitting material to gaps between adjacent column banks, wherein the applied ink is continuous in the column direction;
reducing a pressure of an atmosphere including the substrate to a first pressure while positioning a rectifying plate at a first distance from an upper surface of the substrate, wherein the rectifying plate covers a region with the ink applied on the substrate in a plan view;
reducing, after the reducing of the pressure of the atmosphere to the first pressure, the pressure of the atmosphere to a second pressure while positioning the rectifying plate at a second distance from the upper surface of the substrate, wherein the second pressure is lower than the first pressure, and the second distance is greater than the first distance;
heating the substrate to form an organic functional layer; and
forming a counter electrode above the organic functional layer.
2. The method of claim 1 , wherein
the first pressure is 1×10 4 Pa to 5×10 4 Pa, and
the first distance is 2 mm to 10 mm.
3. The method of claim 2 , wherein
the second pressure is 1×10 −1 Pa, and
the second distance is 30 mm to 70 mm.
4. The method of claim 2 , wherein
a ratio of the first distance to a width of a range including the column banks on the substrate is 5/2000 to 5/100.
5. The method of claim 1 , wherein
the pressure of the atmosphere reaches the first pressure in a time from 1 sec after start of the reduction of the pressure of the atmosphere to 300 sec at a maximum after the start.
6. The method of claim 1 , wherein
the reducing of the pressure of the atmosphere to the first pressure promotes levelling of the ink applied onto the substrate, and
the reducing of the pressure of the atmosphere to the second pressure promotes evaporation of solvent of the ink.
7. The method of claim 1 , wherein
the rectifying plate is disposed opposite the column banks.
8. The method of claim 1 , wherein
a height of the rectifying plate relative to the substrate is varied by an elevation unit.