Method of manufacturing organic light-emitting device and method of manufacturing display unit
There is provided a method of manufacturing an organic light-emitting device including: forming a first organic material layer on a substrate; and forming a mask in a first region on the first organic material layer, and then selectively removing the first organic material layer to form a first organic layer in the first region.
1. A method of manufacturing a light-emitting device comprising:
forming a first organic material layer above a substrate, the first organic material layer providing light emission;
forming a first mask on and in direct contact with only a first portion of an intervening layer formed on the first organic material layer, and
removing the first organic material layer exclusive of the first portion, thereby forming a first organic layer,
wherein the intervening layer is one of an electron injection layer or an electron transport layer.
2. The method of manufacturing the light-emitting device according to claim 1 , wherein the first organic material layer is formed by an evaporation method.
3. The method of manufacturing the light-emitting device according to claim 1 , further comprising, after forming the first organic layer, removing the first mask by dry etching.
4. The method of manufacturing the light-emitting device according to claim 1 , further comprising forming a second organic material layer above the substrate after forming the first organic layer, the second organic material layer providing light emission.
5. The method of manufacturing the light-emitting device according to claim 4 , further comprising:
forming a second mask on and in direct contact with only a first portion of an intervening layer formed on the second organic material layer, a location of the first portion of the first organic material layer being different than a location of the first portion of the second organic material layer, and
removing the second organic material layer exclusive of the first portion of the second organic material layer, thereby forming a second organic layer.
6. The method of manufacturing the light-emitting device according to claim 5 , further comprising, after forming the first organic layer and the second organic layer, removing the first mask and the second mask by dry etching.
7. The method of manufacturing the light-emitting device according to claim 5 , wherein the second organic light-emitting material layer is formed by an evaporation method.
8. The method of manufacturing the light-emitting device according to claim 1 , wherein the first mask is formed from a water-soluble resin.
9. The method of manufacturing the light-emitting device according to claim 1 , wherein the first mask is formed from an alcohol-soluble resin.
10. A method of manufacturing a light-emitting device comprising:
forming a first organic material layer above a substrate, the first organic material layer providing light emission;
forming a first resist on and in direct contact with only a first portion of an intervening layer formed on the first organic material layer, and
removing the first organic material layer exclusive of the first portion, thereby forming a first organic layer,
wherein the intervening layer is one of an electron injection layer or an electron transport layer.
11. The method of manufacturing the light-emitting device according to claim 10 , further comprising, after forming the first organic layer, the first resist is removed by dry etching.
12. The method of manufacturing the light-emitting device according to claim 10 , further comprising forming a second organic material layer above the substrate after forming the first organic layer, the second organic material layer providing light emission.
13. The method of manufacturing the light-emitting device according to claim 12 , further comprising:
forming a second resist on and in direct contact with only a first portion of an intervening layer formed on the second organic material layer, a location of the first portion of the first organic material layer being different than a location of the first portion of the second organic material layer, and
removing the second organic material layer exclusive of the first portion of the second organic material layer, thereby forming a second organic layer.
14. The method of manufacturing the light-emitting device according to claim 13 , further comprising, after forming the first organic layer and the second organic layer, removing the first resist and the second resist by dry etching.