Conformal carbon film deposition

1. A method comprising forming an amorphous carbon film on a substrate by exposing the substrate to a carbon precursor in the absence of a plasma and at a temperature in a range of from 100° C. to less than 600° C., the carbon precursor having a structure of formula (I)

wherein each of R 1 -R 10 are independently selected from H, a halogen, or a substituted or unsubstituted C 1 -C 4 alkyl.

2. The method of claim 1 , wherein the carbon precursor comprises one or more of camphor, L-fenchone, 3-chloro-2-norbornanone, norbornanone, 1,3,7,7-tetramethyl-2-norbornanone, norcamphor, (IR)-(−)-fenchone, (+)-fenchone, (−)-or fenchone.

3. The method of claim 1 , wherein the temperature is in a range of from 300° C. to 600° C.

4. The method of claim 1 , wherein the carbon precursor is heated in an ampoule and flowed to the substrate with a carrier gas.

5. The method of claim 4 , wherein the carrier gas comprises one or more of hydrogen (H 2 ), argon (Ar), helium (He), xenon (Xe), or nitrogen (N 2 ).

6. The method of claim 1 , wherein the amorphous carbon film is formed by a thermal decomposition process.

7. The method of claim 1 , wherein the amorphous carbon film is one or more of conformal or ashable.

8. The method of claim 1 , wherein the amorphous carbon film is a hard mask layer.

9. The method of claim 8 , wherein the substrate comprises a layer to be patterned.

10. The method of claim 1 , wherein the substrate comprises one or more of an adhesion layer or a dielectric layer.

11. The method of claim 1 , wherein the substrate comprises at least one feature selected from a peak, a trench, or a via.

12. The method of claim 11 , wherein the amorphous carbon film is conformal.

13. The method of claim 1 , wherein the amorphous carbon film has a hydrogen content in a range of from 10 to 45 atomic %.

14. A method of etching a substrate comprising:

forming an amorphous carbon hard mask on the substrate, the amorphous carbon hard mask deposited in the absence of a plasma and at a temperature range of from 100° C. to less than 600° C., and the amorphous carbon hard mask having at least one opening and formed by exposing the substrate to a carbon precursor having a structure of formula (I)

wherein each of R 1 -R 10 are independently selected from H, a halogen or a substituted or unsubstituted C 1 -C 4 alkyl; and

etching the substrate through the at least one opening.

15. The method of claim 14 , wherein the carbon precursor comprises one or more of camphor, L-fenchone, 3-chloro-2-norbornanone, norbornanone, 1,3,7,7-tetramethyl-2-norbornanone, norcamphor, (IR)-(−)-fenchone, (+)-fenchone, (−)-or fenchone.

16. The method of claim 14 , further comprising forming a photoresist prior to etching, the photoresist formed between the substrate and the amorphous carbon hard mask or on the amorphous carbon hard mask.

17. The method of claim 14 , further comprising removing the amorphous carbon hard mask after etching the substrate.

18. The method of claim 17 , wherein the amorphous carbon hard mask is removed by ashing.

19. The method of claim 14 , wherein the amorphous carbon hard mask is formed at a pressure in a range of 1 Torr to 600 Torr.

20. A method comprising:

providing a substrate having a substrate surface;

exposing the substrate to a carbon precursor at a temperature in a range of from 100° C. to 650600° C. and a pressure in a range of from 1 Torr to 600 Torr to form a carbon hard mask on the substrate surface, the carbon hard mask deposited in the absence of a plasma, and the carbon precursor having a structure of formula (I)

wherein each of R 1 -R 10 are independently selected from H, a halogen or a substituted or unsubstituted C 1 -C 4 alkyl;

etching at least a portion of the substrate through an opening in the carbon hard mask; and

removing the carbon hard mask from the substrate surface by ashing.