Thin-film transistor substrate and luminescent device
A thin-film transistor substrate includes a pixel circuit, an interlayer insulating film, electrodes, and a hard mask metal. The pixel circuit includes a thin film transistor. The interlayer insulating film has contact holes and covers the pixel circuit. The electrodes are exposed above a surface of the interlayer insulating film, and electrically coupled to the pixel circuit via the contact holes. The hard mask metal has openings at portions facing the contact holes and is provided on the surface of the interlayer insulating film.
1. A thin-film transistor substrate comprising:
a pixel circuit including a thin film transistor, wherein the pixel circuit further includes a storage capacitor;
an interlayer insulating film having contact holes, the interlayer insulating film covering the pixel circuit, wherein the interlayer insulating film is a laminate including an inorganic insulating film and an organic insulating film, the interlayer insulating film covers the thin film transistor and the storage capacitor, and the interlayer insulating film is in contact with a surface of the thin film transistor and a surface of the storage capacitor;
electrodes exposed above a surface of the interlayer insulating film, the electrodes being electrically coupled to the pixel circuit via the contact holes; and
a hard mask metal having openings at portions facing the contact holes, the hard mask metal being provided on the surface of the interlayer insulating film.
2. The thin-film transistor substrate according to claim 1 , wherein the contact holes are provided above the thin film transistor.
3. The thin-film transistor substrate according to claim 1 , wherein
the contact holes are provided above a region including a boundary between the thin film transistor and the storage capacitor, and
the electrodes are electrically coupled to the thin film transistor and the storage capacitor via the contact holes.
4. A luminescent device comprising:
a thin-film transistor substrate including
a pixel circuit including a thin film transistor, wherein the pixel circuit further includes a storage capacitor,
an interlayer insulating film having contact holes, the interlayer insulating film covering the pixel circuit, wherein the interlayer insulating film is a laminate including an inorganic insulating film and an organic insulating film, the interlayer insulating film covers the thin film transistor and the storage capacitor, and the interlayer insulating film is in contact with a surface of the thin film transistor and a surface of the storage capacitor,
electrodes exposed above a surface of the interlayer insulating film, the electrodes being electrically coupled to the pixel circuit via the contact holes, and
a hard mask metal having openings at portions facing the contact holes, the hard mask metal being provided on the surface of the interlayer insulating film;
a luminescent panel including a luminescent element per pixel, the luminescent panel being provided on the thin-film transistor substrate; and
a driving circuit configured to drive the luminescent panel, the driving circuit being provided on the thin-film transistor substrate.