IP Library Granted Patent US 11,158,658
Granted Patent B2
US 11,158,658 · App. 16/435,832 · Granted Oct 26, 2021

Radiation detector

Inventors: Masahiro Shiota (Sakai, JP); Shigenari Taguchi (Sakai, JP); Takahiro Shindoh (Sakai, JP); Kunihiko Iizuka (Sakai, JP); Nobuyuki Ashida (Sakai, JP)
Assignee: SHARP KABUSHIKI KAISHA
H01L27/14614H01L27/14616H01L27/14643G01T1/2018
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Quick Facts
Patent No.
US 11,158,658
App. No.
16/435,832
Granted
Oct 26, 2021
Kind
B2
Abstract

[Object] To achieve a radiation detector capable of suppressing variation in the amount of radiation detected. [Solution] A first gate electrode ( 52 ) is connected to a light receiving device, and a second gate electrode ( 53 ) is configured to have the same potential as that of the first gate electrode ( 52 ).

Claims (20)

1. A radiation detector comprising:

a light receiving device that receives light obtained from radiation and that converts the light into an electrical signal; and

an amplifying transistor that amplifies the electrical signal,

wherein the light receiving device and the amplifying transistor are formed on a glass substrate,

wherein the amplifying transistor includes a first gate electrode, a channel layer, and a second gate electrode which are stacked in an order named on the glass substrate,

wherein the light receiving device includes at least two layers which cover the amplifying transistor and which are doped with different impurities from each other,

wherein the first gate electrode is connected to one of the at least two layers of the light receiving device,

wherein the second gate electrode is configured to have a same potential as a potential of the first gate electrode, and

wherein the channel layer includes an oxide semiconductor oriented along a c-axis and having a non-amorphous crystal structure.

2. The radiation detector according to claim 1 , wherein constituent elements of the channel layer include at least indium and zinc.

3. A radiation detector comprising:

a light receiving device that receives light obtained from radiation and that converts the light into an electrical signal; and

an amplifying transistor that amplifies the electrical signal,

wherein the light receiving device and the amplifying transistor are formed on a glass substrate,

wherein the amplifying transistor includes a first gate electrode, a channel layer, and a second gate electrode which are stacked in an order named on the glass substrate,

wherein the light receiving device includes at least two layers which cover the amplifying transistor and which are doped with different impurities from each other,

wherein the second gate electrode is a layer closer to a channel layer between the at least two layers,

the first gate electrode and the second gate electrode are connected to each other so that (i) fluctuation in a potential of the second gate electrode and fluctuation in a potential of the first gate electrode, which fluctuations result from accumulation of charge in the light receiving device, are synchronized with each other and (ii) a variation in amount of radiation detected by the radiation detector is suppressed, and

wherein the channel layer includes an oxide semiconductor oriented along a c-axis and having a non-amorphous crystal structure.

4. The radiation detector according to claim 3 , wherein constituent elements of the channel layer include at least indium and zinc.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 10, 2019
From: SHIOTA, MASAHIRO; TAGUCHI, SHIGENARI; SHINDOH, TAKAHIRO; IIZUKA, KUNIHIKO; ASHIDA, NOBUYUKI
To: SHARP KABUSHIKI KAISHA
Reel/Frame 049418/0125 →
Continuity (2)
Provisional Application 62686794 · Jun 19, 2018
Related Publication 20190386045A1 · Dec 19, 2019