IP Library Granted Patent US 11,125,811
Granted Patent B2
US 11,125,811 · App. 16/441,370 · Granted Sep 21, 2021

Semiconductor device and method of operating the same

Inventors: Jeong-Goo Lee (Seoul, KR); Dae Han Kim (Seoul, KR); Ji Yun Kim (Seoul, KR); Jin Yub Lee (Seoul, KR)
Assignee: Samsung Electronics Co., Ltd.
G01R31/2856G01R31/2642G01R31/2884H01L22/34
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Quick Facts
Patent No.
US 11,125,811
App. No.
16/441,370
Granted
Sep 21, 2021
Kind
B2
Abstract

Provided are a semiconductor device and a method of operating the same. A semiconductor includes a test circuit which comprises: a test transistor to be tested for time-dependent dielectric breakdown (TDDB) characteristics using a stress voltage; an input switch disposed between a voltage application node to which the stress voltage is applied and an input node which transmits the stress voltage to the test transistor; and a protection switch disposed between the input node and a ground node.

Claims (46)

1. A semiconductor device comprising:

a test circuit including

a test transistor to be tested for time-dependent dielectric breakdown (TDDB) characteristics using a stress voltage,

an input switch electrically connected between a voltage application node to which the stress voltage is applied and an input node electrically connected to the test transistor, and

a protection switch electrically connected between the input node and a ground node.

2. The semiconductor device of claim 1 , wherein

the input switch comprises a first transistor gated by an input switch enable signal,

the protection switch comprises a second transistor gated by a protection switch enable signal, and

the protection switch enable signal is an inverted signal of the input switch enable signal.

3. The semiconductor device of claim 2 , wherein the input switch comprises a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

4. The semiconductor device of claim 2 , wherein the protection switch comprises a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

5. The semiconductor device of claim 2 , further comprising:

a control circuit in a peripheral area outside the test circuit, the control circuit configured to provide the input switch enable signal and the protection switch enable signal.

6. The semiconductor device of claim 1 , further comprising:

a voltage generator circuit configured to apply the stress voltage to the voltage application node, wherein the test circuit further comprises a first switch electrically connected between the voltage generator circuit and the voltage application node.

7. The semiconductor device of claim 6 , wherein the first switch comprises a transistor comprising a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

8. The semiconductor device of claim 1 , further comprising:

a chip pad configured to apply a user stress voltage received from an external source to the voltage application node, wherein the test circuit further comprises a second switch electrically connected between the chip pad and the voltage application node.

9. The semiconductor device of claim 8 , wherein the second switch comprises a transistor comprising a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

10. The semiconductor device of claim 1 , further comprising:

a main circuit disposed on a die, wherein the test circuit is disposed on the die and is electrically isolated from the main circuit.

11. A semiconductor device comprising:

a test circuit including

a test transistor to be tested for TDDB characteristics using a stress voltage, and

an input switch electrically connected between a voltage application node to which the stress voltage is applied and an input node electrically connected to the test transistor; and

a main circuit adjacent to the test circuit and electrically isolated from the test circuit,

wherein the input switch includes a first transistor gated by an input switch enable signal, and the input switch includes a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

12. The semiconductor device of claim 11 , wherein the test circuit further comprises a protection switch between the input node and a ground node.

13. The semiconductor device of claim 12 , wherein the protection switch comprises a second transistor gated by a protection switch enable signal, and the protection switch enable signal is an inverted signal of the input switch enable signal.

14. The semiconductor device of claim 13 , wherein the protection switch comprises a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

15. The semiconductor device of claim 11 , further comprising:

a voltage generator circuit configured to apply the stress voltage to the voltage application node, wherein the test circuit further comprises a first switch electrically connected between the voltage generator circuit and the voltage application node.

16. The semiconductor device of claim 15 , wherein the first switch comprises a transistor comprising a first gate oxide layer which is thicker than a second gate oxide layer of the test transistor.

17. The semiconductor device of claim 11 , further comprising:

a chip pad configured to apply a user stress voltage received from an external source to the voltage application node, wherein the test circuit further comprises a second switch electrically connected between the chip pad and the voltage application node.

18. A semiconductor device comprising:

a test circuit including

a first test pattern comprising a first input switch and a first protection switch, and

a second test pattern comprising a second input switch and a second protection switch; and

a main circuit on a die, the main circuit configured to operate a chip,

wherein

the test circuit is on the die and is electrically isolated from the main circuit,

the first input switch is electrically connected between a first voltage application node to which a first stress voltage is applied and a first input node electrically connected to a first test transistor to be tested for TDDB characteristics,

the first protection switch is electrically connected between the first input node and a first ground node,

the second input switch is electrically connected between a second voltage application node to which a second stress voltage different from the first stress voltage is applied and a second input node configured to transmit the second stress voltage to a second test transistor to be tested for the TDDB characteristics, and

the second protection switch is electrically connected between the second input node and a second ground node.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2019
From: LEE, JEONG-GOO; KIM, DAE HAN; KIM, JI YUN; LEE, JIN YUB
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 049488/0233 →
Priority Claims (1)
KR 10-2018-0145938 · Nov 23, 2018 · national
Continuity (1)
Related Publication 20200166567A1 · May 28, 2020