APPARATUSES INCLUDING A CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER DIRECTLY COUPLED TO AN ANALOG-TO-DIGITAL CONVERTER
Aspects of technology described herein relate to ultrasound apparatuses including capacitive micromachines ultrasonic transducers (CMUTs) that are directly electrically coupled to delta-sigma analog-to-digital converters (ADCs). The apparatus may lack an amplifier or multiplexer between each CMUT and delta-sigma ADC. The apparatus may include between 100 and 20,000 CMUTs and between 100 and 20,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs. The CMUTs and the delta-sigma ADCs may be monolithically integrated on a single substrate. The delta-sigma ADCs may lack an integrator distinct from the CMUT. An internal capacitance of the CMUT may serve as an integrator for the delta-sigma ADC.
1 . An apparatus, comprising:
a capacitive micromachined ultrasonic transducer (CMUT) directly electrically coupled to a delta-sigma analog-to-digital converter (ADC).
2 . The apparatus of claim 1 , wherein the apparatus comprises between 100-1,000 CMUTs and between 100-1,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
3 . The apparatus of claim 1 , wherein the apparatus comprises between 1,000-10,000 CMUTs and between 1,000-10,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
4 . The apparatus of claim 1 , wherein the apparatus comprises between 10,000-20,000 CMUTs and between 10,000-20,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
5 . The apparatus of claim 1 , wherein the CMUT and the delta-sigma ADC are monolithically integrated on a single substrate.
6 . The apparatus of claim 5 , further comprising a filter and a dither generator electrically coupled to the CMUT and monolithically integrated on the single substrate, wherein the dither generator is configured to output a dither output with a selectable dither noise density.
7 . The apparatus of claim 1 , wherein the delta-sigma ADC lacks an integrator distinct from the CMUT.
8 . The apparatus of claim 1 , wherein an internal capacitance of the CMUT serves as an integrator for the delta-sigma ADC.
9 . An apparatus, comprising:
a capacitive micromachined ultrasonic transducer (CMUT) electrically coupled to a delta-sigma analog-to-digital converter (ADC), wherein the apparatus lacks an amplifier or a multiplexer between the CMUT and the delta-sigma ADC.
10 . The apparatus of claim 9 , wherein the apparatus comprises between 100-1,000 CMUTs and between 100-1,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
11 . The apparatus of claim 9 , wherein the apparatus comprises between 1,000-10,000 CMUTs and between 1,000-10,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
12 . The apparatus of claim 9 , wherein the apparatus comprises between 10,000-20,000 CMUTs and between 10,000-20,000 delta-sigma ADCs, each of the CMUTs directly electrically coupled to one of the delta-sigma ADCs.
13 . The apparatus of claim 9 , wherein the CMUT and the delta-sigma ADC is monolithically integrated on a single substrate.
14 . The apparatus of claim 9 , wherein the delta-sigma ADC lacks an integrator distinct from the CMUT.
15 . The apparatus of claim 9 , wherein an internal capacitance of the CMUT serves as an integrator for the delta-sigma ADC.
16 . An apparatus, comprising:
between 100-20,000 capacitive micromachined ultrasonic transducers (CMUTs); and
one analog-to-digital converter (ADC) dedicated for each of the CMUTs.
17 . The apparatus of claim 16 , wherein the apparatus comprises between 100-1,000 CMUTs.
18 . The apparatus of claim 16 , wherein the apparatus comprises between 1,000-10,000 CMUTs.
19 . The apparatus of claim 16 , wherein the apparatus comprises between 10,000-20,000 CMUTs.
20 . The apparatus of claim 16 , wherein the CMUTs and the ADCs are monolithically integrated on a single substrate.