Coating apparatus

1. A coating apparatus, comprising:

a process chamber;

a rotation device disposed in the process chamber; and

a rotation holder connected to the rotation device, and comprising:

two extension elements disposed around a center axis and separated from each other, wherein each of the two extension elements has a side surface;

two retaining elements, wherein each of the two retaining elements has a bottom surface, one of the two retaining elements is connected to one of the side surfaces, and the other of the two retaining elements is connected to the other of the side surfaces; and

two pins, wherein one of the two pins is connected to one of the bottom surfaces, and the other of the two pins is connected to the other of the bottom surfaces,

wherein a target object is put on the two pins, and located between the two retaining elements, and the center axis passes through a center of the target object,

wherein the rotation holder further comprises:

a main base connected to the rotation device; and

two support frames, wherein one of the two support frames is connected to the main base and one of the two extension elements, and the other of the two support frames is connected to the main base and the other of the two extension elements,

wherein a bottom space is formed between the two support frames, a receiving space is formed between the side surfaces of the two extension elements and in communication with the bottom space, and the two retaining elements and the two pins are located in the receiving space.

2. The coating apparatus as claimed in claim 1 , wherein the two extension elements, the two retaining elements and the two pins surround the center axis, and the two pins extend toward the center axis.

3. The coating apparatus as claimed in claim 2 , wherein a distance between one of the two pins and the center axis is shorter than a distance between one of the two retaining elements and the center axis.

4. The coating apparatus as claimed in claim 2 , wherein a length of one of the two retaining elements is in a range from 4 mm to 10 mm, and the length of one of the two retaining elements is measured in a direction that is perpendicular to the center axis.

5. The coating apparatus as claimed in claim 2 , wherein a length of one of the two pins is in a range from 4 mm to 10 mm, and the length of one of the two pins is measured in a direction that is perpendicular to the center axis.

6. The coating apparatus as claimed in claim 2 , wherein a thickness of one of the two pins is in a range from 1 mm to 3 mm, and the thickness of one of the two pins is measured in a direction that is parallel to the center axis.

7. The coating apparatus as claimed in claim 2 , wherein the rotation device is configured to rotate the rotation holder about a main axis, and the rotation holder extends substantially perpendicular to the main axis, wherein the main axis is parallel to and separated from the center axis.

8. The coating apparatus as claimed in claim 1 , wherein the target object has an alignment mark and an identity mark, and one of the two pins covers the alignment mark or the identity mark.

9. The coating apparatus as claimed in claim 1 , wherein the center axis passes through a center of the bottom space and a center of the receiving space, and a width of the bottom space is greater than a width of the receiving space, and the width of the bottom space and the width of the receiving space are measured in a direction perpendicular to the center axis.

10. The coating apparatus as claimed in claim 9 , wherein the width of the bottom space is 1.01 times to 1.1 times the width of the receiving space.

11. The coating apparatus as claimed in claim 9 , wherein the width of the receiving space is in a range from 4 mm to 20 mm plus a width of the target object, and the width of the bottom space is in a range from 28 mm to 64 mm plus the width of the target object.

12. The coating apparatus as claimed in claim 1 , wherein each of the two support frames further has one side surface, each of the two extension elements further has one bottom surface, one of the bottom surfaces is connected to one of the side surfaces of the two support frames, and the other of the bottom surfaces is connected to the other of the side surfaces of the two support frames,

wherein the side surfaces of the two support frames extend perpendicular to the bottom surfaces of the two extension elements,

wherein in a cross-sectional view, the side surfaces of the two support frames are curved surfaces, the bottom surfaces of the two extension elements are flat surfaces, and in a plan view, the side surfaces of the two support frames and the bottom surfaces of the two extension elements are C shapes.

13. The coating apparatus as claimed in claim 1 , wherein each of the two support frames further has one side surface, and a distance between an end of one of the two retaining elements and one of the side surfaces of the two support frames, which is close to the one of the two retaining elements, is in a range from 18 mm to 30 mm and in a direction that is perpendicular to the one of the side surfaces.

14. The coating apparatus as claimed in claim 1 , further comprising a sputtering device disposed in the process chamber and under the rotation holder, wherein the sputtering device is configured to dispense a coating material toward the target object.

15. The coating apparatus as claimed in claim 1 , further comprising:

a vacuum device connected to the process chamber and configured to vacuum the process chamber; and

an ion assisted deposition disposed in the process chamber and configured to emit ions to the rotation holder.

16. The coating apparatus as claimed in claim 1 , wherein the side surfaces of the two extension elements extend perpendicular to the bottom surfaces of the two retaining elements.

17. The coating apparatus as claimed in claim 1 , wherein in a cross-sectional view, the side surfaces of the two extension elements are curved surfaces, the bottom surfaces of the two retaining elements are flat surfaces, and in a plan view, the side surfaces of the two extension elements and the bottom surfaces of the two retaining elements are C shapes.

18. The coating apparatus as claimed in claim 1 , wherein a gap is formed between two adjacent ends of the two extension elements.