Gas detection device, gas sensor system, fuel cell vehicle, and hydrogen detection method
A gas detection device includes a gas sensor and a drive circuit. The drive circuit includes a measurement circuit, a power supply circuit, and a control circuit. The gas sensor includes a first electrode, a second electrode, a metal-oxide layer disposed between the first electrode and the second electrode, and an insulating film that covers the first electrode, the second electrode, and the metal-oxide layer, and has an opening that exposes part of a main surface of the second electrode. A resistance value of the metal-oxide layer decreases when gas containing hydrogen atoms contact the second electrode. When the resistance value of the metal-oxide layer falls outside a predetermined range, the drive circuit applies a predetermined voltage between the first electrode and the second electrode to restore the resistance value of the metal-oxide layer back into the predetermined range.
1. A gas detection device, comprising:
a gas sensor; and
a drive circuit that applies a predetermined voltage to the gas sensor, wherein
the gas sensor includes:
a first electrode;
a second electrode;
a metal-oxide layer that is disposed between the first electrode and the second electrode, and includes a bulk region and a local region surrounded by the bulk region, the local region having a degree of oxygen deficiency higher than a degree of oxygen deficiency of the bulk region; and
an insulating film that covers the first electrode, the second electrode, and the metal-oxide layer, and has an opening that exposes part of a main surface of the second electrode,
a resistance value of the metal-oxide layer decreases when the gas contacts the second electrode, the gas containing hydrogen atoms,
when the resistance value of the metal-oxide layer falls outside a predetermined range that is set within a range of resistance values of the metal-oxide layer before the gas contacts the second electrode, the drive circuit applies the predetermined voltage between the first electrode and the second electrode to restore the resistance value back into the predetermined range.
2. The gas detection device according to claim 1 , wherein
the metal-oxide layer comprises a first metal-oxide layer that is in contact with the first electrode and has a degree of oxygen deficiency higher than a degree of oxygen deficiency of the bulk region, and a second metal-oxide layer that is in contact with the second electrode and includes the bulk region, and
the local region is in contact with the second electrode and penetrates through the second metal-oxide layer.
3. The gas detection device according to claim 1 , wherein
the second electrode causes the hydrogen atoms to be dissociated from molecules contained in the gas.
4. The gas detection device according to claim 1 , wherein
the second electrode includes at least one selected from a group consisting of platinum, palladium, and iridium.
5. The gas detection device according to claim 1 , wherein
the metal-oxide layer has reversible resistance change characteristics of transitioning from a low-resistance state to a high-resistance state by a first voltage being applied, and transitioning from the high-resistance state to the low-resistance state by a second voltage being applied, the second voltage having a polarity different from a polarity of the first voltage, and
the predetermined voltage comprises the first voltage and the second voltage.
6. The gas detection device according to claim 1 , wherein
when the resistance value of the metal-oxide layer is below a lower limit of the predetermined range, the drive circuit applies the predetermined voltage between the first electrode and the second electrode.
7. The gas detection device according to claim 1 , wherein
when the resistance value of the metal-oxide layer is above an upper limit of the predetermined range, the drive circuit applies the predetermined voltage between the first electrode and the second electrode.
8. The gas detection device according to claim 1 , wherein
when the drive circuit applies the predetermined voltage between the first electrode and the second electrode and subsequently measures the resistance value of the metal-oxide layer, and the resistance value measured does not fall within the predetermined range, the drive circuit applies again the predetermined voltage between the first electrode and the second electrode.
9. The gas detection device according to claim 8 , wherein
when the drive circuit executes, up to a predetermined number of times, a process of applying the predetermined voltage between the first electrode and the second electrode a predetermined number of times and measuring the resistance value of the metal-oxide layer, and the resistance value measured still does not fall within the predetermined range, the drive circuit determines that the restoration of the resistance value failed.
10. The gas detection device according to claim 1 , wherein
the drive circuit applies, to the gas sensor, a detection voltage whose absolute value is less than the predetermined voltage, to measure the resistance value of the metal-oxide layer.
11. The gas detection device according to claim 10 , wherein
the resistance value of the metal-oxide layer decreases by the following: the hydrogen atoms are dissociated from the molecules in the gas, at a portion, of the second electrode, which contacts the local region, and the hydrogen atoms dissociated bond with oxygen atoms in the local region of the metal-oxide layer, in a state in which heat is generated in the local region by the application of the detection voltage.
12. The gas detection device according to claim 1 , wherein
the metal-oxide layer includes at least one of a transition metal oxide or an aluminum oxide.
13. The gas detection device according to claim 12 , wherein
the transition metal oxide is a tantalum oxide, a hafnium oxide, or a zirconium oxide.
14. A gas sensor system, comprising:
the gas detection device according to claim 1 ;
a wireless interface circuit that is connected to the gas detection device and wirelessly communicable with an external device; and
an access device that obtains, through wireless communication, data related to the resistance value of the metal-oxide layer in the gas detection device via the wireless interface circuit.
15. A fuel cell vehicle, comprising:
a passenger compartment;
a gas tank compartment in which a hydrogen gas tank is placed;
a fuel cell compartment in which a fuel cell is placed; and
the gas detection device according to claim 1 , wherein
the gas detection device is placed in at least one of the gas tank compartment or the fuel cell compartment.
16. A hydrogen detection method using a gas sensor,
the gas sensor including:
a first electrode;
a second electrode;
a metal-oxide layer that is disposed between the first electrode and the second electrode, and includes a bulk region and a local region surrounded by the bulk region, the local region having a degree of oxygen deficiency higher than a degree of oxygen deficiency of the bulk region; and
an insulating film that covers the first electrode, the second electrode, and the metal-oxide layer, and has an opening that exposes part of a main surface of the second electrode,
the hydrogen detection method comprising:
detecting gas containing hydrogen atoms by detecting a decrease in a resistance value of the metal-oxide layer;
determining whether the resistance value of the metal-oxide layer falls outside a predetermined range that is set within a range of resistance values of the metal-oxide layer before the gas contacts the second electrode, and
when it is determined that the resistance value falls outside the predetermined range, applying a predetermined voltage between the first electrode and the second electrode to restore the resistance value of the metal-oxide layer back into the predetermined range.