Carrier-foil-attached ultra-thin copper foil
The carrier-foil-attached ultra-thin copper foil according to one embodiment of the present invention comprises a carrier foil, a release layer, a first ultra-thin copper foil, a Cu-diffusion prevention layer, an Al layer, and a second ultra-thin copper foil, wherein the release layer may comprise a first metal (A2) having peeling properties, and a second metal (B2) and third metal (C2) facilitating the plating of the first metal (A2).
1. A carrier foil-attached copper foil having a structure in which:
a carrier foil;
a release layer;
a first copper foil;
a copper (Cu)-aluminum (Al) bonding strength improvement layer;
a Cu diffusion prevention layer;
an Al layer; and
a second copper foil are sequentially stacked,
wherein the release layer includes a first metal (A2) having a peeling property and second and third metals (B2, C2) which facilitate plating of the first metal (A2) and wherein the copper (Cu)-aluminum (Al) bonding strength improvement layer is a layer which improves bonding strength between the Al layer and the Cu diffusion prevention layer.
2. The carrier foil-attached ultra thin copper foil of claim 1 , further comprising a Cu diffusion prevention layer between the Al layer and the second copper foil.
3. The carrier foil-attached copper foil of claim 1 , wherein in a wire bonding process where the Al layer is connected to a bonding pad of a semiconductor chip using a bonding wire of a semiconductor chip, a thickness (t4) of the Al layer and a thickness (t5) of the bonding pad of a semiconductor chip satisfy an expression of about 0.0005≤t4/t5≤about 3.0.
4. The carrier foil-attached copper foil of claim 1 , wherein in a wire bonding process where the Al layer is connected to a bonding pad of a semiconductor chip using a bonding wire of a semiconductor chip, a thickness (t4) of the Al layer and a thickness (t6) of the bonding wire of a semiconductor chip satisfy an expression of about 0.0005≤t4/t6≤about 3.0.
5. The carrier foil-attached copper foil of claim 1 , wherein a thickness (t7) of the Cu diffusion prevention layer and a thickness (t4) of the Al layer satisfy an expression of about 0.5≤t7/t4≤about 1.0.
6. The carrier foil-attached copper foil of claim 1 , wherein a matte surface or a shiny surface of the carrier foil has a surface roughness of about 3.0 μm or less, and the Al layer is formed through electroplating or sputtering and has a surface roughness of about 3.0 μm or less.
7. The carrier foil-attached copper foil of claim 1 , wherein the Al layer is formed through electroplating or sputtering, and a surface roughness (r3) of a matte surface or a shiny surface of the carrier foil and a surface roughness (r4) of the Al layer satisfy an expression of r4/r3≤about 3.0.
8. The carrier foil-attached copper foil of claim 1 , wherein the first metal (A2) is molybdenum (Mo) or tungsten (W), and the second and third metals (B2, C2) are two different metals selected from the group consisting of iron (Fe), cobalt (Co), and nickel (Ni).
9. The carrier foil-attached copper foil of claim 1 , wherein, in the release layer, a content (a2) of the first metal ranges from about 30 wt % to about 89 wt %, a content (b2) of the second metal ranges from about 10 wt % to about 60 wt %, and a content (c2) of the third metal ranges from about 1 wt % to about 20 wt %.
10. The carrier foil-attached copper foil of claim 1 , wherein the sum of deposition amounts of the release layer ranges from about 50 μg/dm2 to about 10,000 μg/dm2.
11. The carrier foil-attached copper foil of claim 1 , wherein the first copper foil and the second copper foil are formed through electroplating or sputtering.
12. A carrier foil-attached copper foil comprising having a structure in which:
a carrier foil;
a diffusion prevention layer;
a release layer;
an oxidation prevention layer;
a first copper foil;
a copper (Cu)-aluminum (Al) bonding strength improvement layer;
a Cu diffusion prevention layer;
an Al layer; and
a second copper foil are sequentially stacked,
wherein the release layer includes a first metal (A2) having a peeling property and second and third metals (B2, C2) which facilitate plating of the first metal (A2),
the diffusion prevention layer and the oxidation prevention layer include at least one element selected from the group consisting of nickel (Ni), cobalt (Co), iron (Fe), chromium (Cr), molybdenum (Mo), tungsten (W), aluminum (Al), and phosphorus (P), and
wherein the copper (Cu)-aluminum (Al) bonding strength improvement layer is a layer which improves bonding strength between the Al layer and the Cu diffusion prevention layer.