IP Library Granted Patent US 11,152,386
Granted Patent B2
US 11,152,386 · App. 16/483,431 · Granted Oct 19, 2021

3D semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Jin-Woo Han (San Jose, CA); Eli Lusky (Ramat Gan, IL)
Assignee: MONOLITHIC 3D INC.
H01L27/11556H01L27/11582H01L29/40114H01L29/40117H01L29/42332H01L29/42348
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Quick Facts
Patent No.
US 11,152,386
App. No.
16/483,431
Granted
Oct 19, 2021
Kind
B2
Abstract

A 3D memory device, the device including: a first vertical pillar; a second vertical pillar, where the first vertical pillar and the second vertical pillar function as a source or a drain for a plurality of overlaying horizontally-oriented memory transistors, where the plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following the same lithography step; and memory control circuits, where the memory control circuits are disposed at least partially directly underneath the plurality of overlaying horizontally-oriented memory transistors, or are disposed at least partially directly above the plurality of overlaying horizontally-oriented memory transistors.

Claims (69)

1. A 3D memory device, the device comprising:

a first vertical pillar, said first vertical pillar comprises a transistor source;

a second vertical pillar, said second vertical pillar comprises a transistor drain,

wherein said first vertical pillar and said second vertical pillar function as a source or a drain for a plurality of overlaying horizontally-oriented memory transistors,

wherein at least of one of said plurality of overlaying horizontally-oriented memory transistors is disposed between said first vertical pillar and said second vertical pillar,

wherein said plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following the same lithography step; and

memory control circuits,

wherein said memory control circuits are disposed at least partially directly underneath said plurality of overlaying horizontally-oriented memory transistors, or are disposed at least partially directly above said plurality of overlaying horizontally-oriented memory transistors.

2. The 3D memory device according to claim 1 ,

wherein said plurality of overlaying horizontally-oriented memory transistors each comprise a tunneling oxide region and a charge trap region, and

wherein said tunneling oxide region is thinner than 1 nm or does not exist to enable said 3D memory device to operate at high speed.

3. The 3D memory device according to claim 1 , further comprising:

a third vertical pillar,

wherein said third vertical pillar and said second vertical pillar function as a source or a drain for a second plurality of overlaying horizontally-oriented memory transistors.

4. The 3D memory device according to claim 1 ,

wherein said memory control circuits are structured to provide a periodic memory refresh operation to said plurality of overlaying horizontally-oriented memory transistors.

5. The 3D memory device according to claim 1 ,

wherein said first vertical pillar comprises metal and does not comprise n+ type silicon.

6. The 3D memory device according to claim 1 ,

wherein said first vertical pillar and said second vertical pillar each comprise a filled cylinder shape.

7. The 3D memory device according to claim 1 ,

wherein each of said plurality of overlaying horizontally-oriented memory transistors comprises a unique channel region, and

wherein said unique channel regions are isolated from each other.

8. A 3D memory device, the device comprising:

a first vertical pillar, said first vertical pillar comprises a transistor source;

a second vertical pillar, said second vertical pillar comprises said transistor drain,

wherein said first vertical pillar and said second vertical pillar function as a source or a drain for a plurality of overlaying horizontally-oriented memory transistors,

wherein said plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following the same lithography step,

wherein at least of one of said plurality of overlaying horizontally-oriented memory transistors is disposed between said first vertical pillar and said second vertical pillar,

wherein said plurality of overlaying horizontally-oriented memory transistors each comprise a tunneling oxide region and a charge trap region, and

wherein said tunneling oxide region is thinner than 1 nm or does not exist to enable said 3D memory device to operate at high speed.

9. The 3D memory device according to claim 8 , further comprising:

memory control circuits,

wherein said memory control circuits are structured to provide a periodic memory refresh operation to said plurality of overlaying horizontally-oriented memory transistors.

10. The 3D memory device according to claim 8 further comprising:

a third vertical pillar,

wherein said third vertical pillar and said second vertical pillar function as a source or a drain for a second plurality of overlaying horizontally-oriented memory transistors.

11. The 3D memory device according to claim 8 , further comprising:

a plurality of gate-lines,

wherein each of said plurality of gate-lines control one of said plurality overlaying horizontally-oriented memory transistors, and

wherein said plurality of gate-lines each comprise a built-in control transistor.

12. The 3D memory device according to claim 8 ,

wherein said first vertical pillar comprises metal and does not comprise n+ type silicon.

13. The 3D memory device according to claim 8 ,

wherein said first vertical pillar and said second vertical pillar each comprise a filled cylinder shape.

14. The 3D memory device according to claim 8 ,

wherein each of said plurality of overlaying horizontally-oriented memory transistors comprises a unique channel region, and

wherein said channel regions are isolated from each other.

15. A 3D memory device, the device comprising:

a first vertical pillar, said first vertical pillar comprises a transistor source;

a second vertical pillar, said second vertical pillar comprises a transistor drain,

wherein said first vertical pillar and said second vertical pillar function as a source or a drain for a first plurality of overlaying horizontally-oriented memory transistors,

wherein at least of one of said first plurality of overlaying horizontally-oriented memory transistors is disposed between said first vertical pillar and said second vertical pillar,

wherein said first plurality of overlaying horizontally-oriented memory transistors are self-aligned being formed following the same lithography step; and

a third vertical pillar,

wherein said third vertical pillar and said second vertical pillar function as a source or a drain for a second plurality of overlaying horizontally-oriented memory transistors.

16. The 3D memory device according to claim 15 ,

wherein said plurality of overlaying horizontally-oriented memory transistors each comprise a tunneling oxide region and a charge trap region, and

wherein said tunneling oxide region is thinner than 1 nm or does not exist to enable said 3D memory device to operate at high speed.

17. The 3D memory device according to claim 15 , further comprising:

memory control circuits,

wherein said memory control circuits are structured to provide a periodic memory refresh operation to said plurality of overlaying horizontally-oriented memory transistors.

18. The 3D memory device according to claim 15 ,

wherein said first vertical pillar comprises metal and does not comprise n+ type silicon.

19. The 3D memory device according to claim 15 ,

wherein said first vertical pillar and said second vertical pillar each comprise a filled cylinder shape.

20. The 3D memory device according to claim 15 ,

wherein each of said plurality of overlaying horizontally-oriented memory transistors comprises a unique channel region, and

wherein said channel regions are isolated from each other.

Continuity (12)
Provisional Application 62625961 · Feb 2, 2018
Provisional Application 62539054 · Jul 31, 2017
Provisional Application 62531880 · Jul 13, 2017
Provisional Application 62523760 · Jun 22, 2017
Provisional Application 62517959 · Jun 11, 2017
Provisional Application 62501136 · May 4, 2017
Provisional Application 62488757 · Apr 22, 2017
Provisional Application 62484284 · Apr 11, 2017
Provisional Application 62473308 · Mar 17, 2017
Provisional Application 62468372 · Mar 8, 2017
Provisional Application 62454785 · Feb 4, 2017
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