Touch display panel and method for manufacturing the same, display device
A touch display panel and a method for manufacturing the same are provided. The method includes: forming touch lines, an insulating layer and first electrodes above a substrate, the insulating layer covers the touch lines and is provided with at least one through-hole, the first electrodes are at a side of the insulating layer distal from the touch lines; forming barrier walls in each through-hole, and at a predetermined position in an interval between the first electrodes; forming a light emitting layer and a second electrode layer at a side of the light emitting layer distal from the substrate; removing the barrier walls, portions of the light emitting layer and the second electrode layer above the barrier walls, remaining portions of the second electrode layer form touch electrodes; forming an electrical conductive structure in each through-hole for coupling one touch line to one touch electrode.
1. A method for manufacturing a touch display panel, comprising:
forming a plurality of touch lines, an insulating layer and a plurality of first electrodes above a surface of a side of a substrate, the insulating layer covers the touch lines and is provided with at least one through-hole corresponding to each of the touch lines, each through-hole exposes a portion of the touch line corresponding thereto, the first electrodes arranged in rows and columns and spaced apart from each other are at a side of the insulating layer distal from the touch lines, and orthographic projections of the touch lines on the substrate do not overlap with orthographic projections of the first electrodes on the substrate;
forming barrier walls in each through-hole, and at a predetermined position, at which no touch electrode is to be formed, in an interval between the first electrodes, each of the barrier walls has a thickness greater than a predefined threshold in a direction perpendicular to the surface of the substrate;
forming a light emitting layer and a second electrode layer at the side of the substrate formed with the touch lines, the insulating layer, the first electrodes and the barrier walls, the second electrode layer is formed at a side of the light emitting layer distal from the substrate, portions of the light emitting layer formed above the barrier walls and portions of the second electrode layer formed above the barrier walls disconnect from remaining portions of the light emitting layer and remaining portions of the second electrode layer respectively;
removing the barrier walls, the portions of the light emitting layer formed above the barrier walls and the portions of the second electrode layer formed above the barrier walls, the remaining portions of the second electrode layer form a plurality of touch electrodes arranged in rows and columns and spaced apart from each other, each of the first electrodes, the light emitting layer in contact with said each of the first electrodes and the touch electrode in contact with the light emitting layer form an organic light emitting diode; and
forming an electrical conductive structure in each through-hole, each electrical conductive structure couples one touch line corresponding thereto to one touch electrode corresponding to said one touch line,
wherein forming the barrier walls comprises: performing and developing processes on photoresist to form the barrier walls, so that the barrier walls are formed of the photoresist, and the photoresist is photodegradable photoresist.
2. The method of claim 1 , wherein removing the barrier walls comprises: applying light radiation to the barrier walls so that the barrier walls are separated from the substrate.
3. The method of claim 2 , wherein
during applying the light radiation to the barrier walls, a wind shower process is further performed on the barrier walls by blowing inert gas to the barrier walls.
4. The method of claim 1 , wherein the photodegradable photoresist comprises: photoresist base material and photo-degradation catalyst doped in the photoresist base material.
5. The method of claim 4 , wherein
the photo-degradation catalyst is titanium dioxide.
6. The method of claim 1 , wherein
each of the barrier walls has a thickness greater than or equal to 1000 nm in a direction perpendicular to the surface of the substrate.
7. The method of claim 1 , wherein
the touch lines extend parallel with each other.
8. The method of claim 7 , wherein
each of the rows of the first electrodes or each of the columns of the first electrodes has a direction parallel with a direction in which the touch lines extend.
9. The method of claim 8 , wherein
each of the barrier walls comprises a portion extending parallel with the direction in which the touch lines extend and a portion extending perpendicular to the direction in which the touch lines extend.
10. The method of claim 9 , wherein
in a cross section, perpendicular to a direction in which the barrier walls extend, of at least one of the barrier walls, the at least one of the barrier walls has a width in a direction parallel to the surface of the substrate, which increases as distant from the substrate.
11. The method of claim 1 , wherein forming the electrical conductive structure in each through-hole comprises: coating metal powder in each through-hole to form the electrical conductive structure.
12. A method for manufacturing a touch display panel, comprising:
forming a plurality of touch lines, an insulating layer and a plurality of first electrodes above a surface of a side of a substrate, the insulating layer covers the touch lines and is provided with at least one through-hole corresponding to each of the touch lines, each through-hole exposes a portion of the touch line corresponding thereto, the first electrodes arranged in rows and columns and spaced apart from each other are at a side of the insulating layer distal from the touch lines, and orthographic projections of the touch lines on the substrate do not overlap with orthographic projections of the first electrodes on the substrate;
forming barrier walls in each through-hole, and at a predetermined position, at which no touch electrode is to be formed, in an interval between the first electrodes, each of the barrier walls has a thickness greater than a predefined threshold in a direction perpendicular to the surface of the substrate;
forming a light emitting layer and a second electrode layer at the side of the substrate formed with the touch lines, the insulating layer, the first electrodes and the barrier walls, the second electrode layer is formed at a side of the light emitting layer distal from the substrate, portions of the light emitting layer formed above the barrier walls and portions of the second electrode layer formed above the barrier walls disconnect from remaining portions of the light emitting layer and remaining portions of the second electrode layer respectively;
removing the barrier walls, the portions of the light emitting layer formed above the barrier walls and the portions of the second electrode layer formed above the barrier walls, the remaining portions of the second electrode layer form a plurality of touch electrodes arranged in rows and columns and spaced apart from each other, each of the first electrodes, the light emitting layer in contact with said each of the first electrodes and the touch electrode in contact with the light emitting layer form an organic light emitting diode; and
forming an electrical conductive structure in each through-hole, each electrical conductive structure couples one touch line corresponding thereto to one touch electrode corresponding to said one touch line,
wherein forming the electrical conductive structure in each through-hole comprises: coating metal powder in each through-hole to form the electrical conductive structure.