Methods and apparatuses for packaging an ultrasound-on-a-chip
Described herein are methods and apparatuses for packaging an ultrasound-on-a-chip. An ultrasound-on-a-chip may be coupled to a redistribution layer and to an interposer layer. Encapsulation may encapsulate the ultrasound-on-a-chip device and first metal pillars may extend through the encapsulation and electrically couple to the redistribution layer. Second metal pillars may extend through the interposer layer. The interposer layer may include aluminum nitride. The first metal pillars may be electrically coupled to the second metal pillars. A printed circuit board may be coupled to the interposer layer.
1. An apparatus, comprising:
an ultrasound-on-a-chip device comprising a top surface and a bottom surface;
a redistribution layer, wherein the top surface of the ultrasound-on-a-chip device is coupled to the redistribution layer;
encapsulation encapsulating the ultrasound-on-a-chip device;
first metal pillars extending through the encapsulation and electrically coupling to the redistribution layer; and
an interposer layer comprising a top surface and a bottom surface, wherein the bottom surface of the ultrasound-on-a chip device is coupled to the top surface of the interposer layer.
2. The apparatus of claim 1 , wherein the interposer layer comprises second metal pillars extending through the interposer layer.
3. The apparatus of claim 2 , wherein the interposer layer comprises aluminum nitride.
4. The apparatus of claim 2 , wherein the first metal pillars are electrically coupled to the second metal pillars.
5. The apparatus of claim 2 , wherein the first metal pillars are aligned with the second metal pillars.
6. The apparatus of claim 2 , wherein solder balls electrically couple the first metal pillars to the second metal pillars.
7. The apparatus of claim 2 , further comprising a printed circuit board coupled to the bottom surface of the interposer layer.
8. The apparatus of claim 7 , wherein solder balls electrically couple the second metal pillars to the printed circuit board.
9. The apparatus of claim 1 , further comprising a printed circuit board coupled to the bottom surface of the interposer layer.
10. The apparatus of claim 1 , wherein the ultrasound-on-a-chip is coupled to the interposer layer through thermal adhesive.
11. The apparatus of claim 10 , further comprising a printed circuit board coupled to the bottom surface of the interposer layer.
12. The apparatus of claim 11 , wherein solder balls electrically couple the first metal pillars to the printed circuit board.
13. The apparatus of claim 1 , further comprising
second metal pillars extending through the interposer layer and the encapsulation and electrically coupled to the redistribution layer.
14. The apparatus of claim 13 , wherein the interposer layer comprises aluminum nitride.
15. The apparatus of claim 1 , wherein the encapsulation is one of a molding compound, a molding underfill, an epoxy, or a resin.
16. The apparatus of claim 1 , wherein the encapsulation fills spaces between the ultrasound-on-a-chip device and the first metal pillars.