Dry film formulation
View Patent ↗An improved photoimageable dry film formulation, a fluidic ejection head containing a thick film layer derived from the improved photoimageable dry film formulation, and a method for making a fluidic ejection head. The improved photoimageable dry film formulation includes a multifunctional epoxy compound, a photoinitiator capable of generating a cation, a non-photoreactive solvent, and from about 0.5 to about 5% by weight a silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying.
1. An improved photoimageable dry film formulation, the dry film formulation comprising a multifunctional epoxy compound, a photoinitiator capable of generating a cation, a non-photoreactive solvent, and from about 0.5 to about 5% by weight a silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying, wherein the silane oligomer adhesion enhancer is a gamma-glycidoxypropyltrimethoxysilane oligomer of the formula
wherein n ranges from 1 to 4.
2. The improved photoimageable dry film formulation of claim 1 , wherein the formulation comprises from about 1 to about 3 wt. % of the silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying.
3. The improved photoimageable dry film formulation of claim 1 , wherein the solvent comprises an aliphatic ketone solvent.
4. The improved photoimageable dry film formulation of claim 3 , wherein the aliphatic ketone solvent comprises cyclohexanone, and optionally, acetone.
5. The improved photoimageable dry film formulation of claim 1 , wherein a dry film laminate made from the photoimageable dry film formulation is applied to a silicon semiconductor substrate.
6. The improved photoimageable dry film formulation of claim 1 , wherein a dry film laminate made from the photoimageable dry film formulation is applied to a flow feature layer of a fluidic ejection head.
7. A method for making an improved fluidic ejection head, the method comprising the steps of:
applying a photoresist layer to a release film, wherein the photoresist layer is derived from a photoimageable dry film formulation comprising a multi-functional epoxy compound, a photoacid generator, a silane oligomer adhesion enhancer is a gamma-glycidoxypropyltrimethoxysilane oligomer of the formula
wherein n ranges from 1 to 4, and an aryl ketone solvent;
drying the photoimageable dry film formulation on the release film layer to provide a thick film layer;
laminating the thick film layer to a flow feature layer on a semiconductor substrate;
removing the release film from the thick film layer;
imaging a nozzle hole in the thick film layer; and
developing the imaged thick film layer to provide a nozzle plate for the fluidic ejection head.
8. The method of claim 7 , wherein the photoimageable dry film formulation comprises from about 1 to about 3 wt. % of the silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying.
9. The method of claim 7 , wherein the solvent comprises an aliphatic ketone solvent.
10. The method of claim 9 , wherein the aliphatic ketone solvent comprises cyclohexanone, and optionally, acetone.
11. The method of claim 7 , wherein the photoresist composition on the release film is dried at a temperature ranging from about 110° to about 150° C.
12. A fluidic ejection head for ejecting a fluid composition comprising:
a semiconductor substrate containing fluid ejection devices thereon,
a flow feature layer disposed on the semiconductor substrate, and
a thick film layer laminated to the flow feature layer, wherein the thick film layer is derived from a photoimageable dry film formulation comprising a multifunctional epoxy compound, a photoinitiator capable of generating a cation, a non-photoreactive solvent, and from about 0.5 to about 5% by weight a silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying, wherein the silane oligomer adhesion enhancer is a gamma-glycidoxypropyltrimethoxysilane oligomer of the formula
wherein n ranges from 1 to 4.
13. The fluidic ejection head of claim 12 , wherein the photoimageable dry film formulation comprises from about 1 to about 3 wt. % of the silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying.
14. The fluidic ejection head of claim 12 , wherein the solvent comprises cyclohexanone, and optionally, acetone.