IP Library Granted Patent US 11,360,385
Granted Patent B1
US 11,360,385 · App. 16/518,547 · Granted Jun 14, 2022

Eyepiece assembly adhesion using a zero residual layer region

Inventors: Huihang Dong (Weston, FL); Thomas Mercier (Weston, FL); Vikramjit Singh (Pflugerville, TX); Kang Luo (Austin, TX); Tasha Amit Mangaldas (Fort Lauderdale, FL); William Hudson Welch (Fort Lauderdale, FL); Qizhen Xue (Austin, TX); Frank Y. Xu (Austin, TX)
Assignee: Magic Leap, Inc.
G03F7/0005G03F7/0002
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Quick Facts
Patent No.
US 11,360,385
App. No.
16/518,547
Granted
Jun 14, 2022
Kind
B1
Abstract

Methods and systems for manufacturing an optical waveguide include depositing an adhesion promoting layer on a substrate. Multiple curable resist droplets are dispensed on the adhesion promoting layer. The adhesion promoting layer is disposed between and contacts the substrate and the curable resist droplets. The curable resist droplets define an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the curable resist droplets. The optical eyepiece layer is incised from the substrate to form the optical waveguide.

Claims (49)

1. A method of manufacturing an optical waveguide, the method comprising:

depositing an adhesion promoting layer on a substrate;

dispensing a plurality of curable resist droplets on the adhesion promoting layer, the adhesion promoting layer disposed between and contacting the substrate and the plurality of curable resist droplets, the plurality of curable resist droplets defining an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the plurality of curable resist droplets; and

incising the optical eyepiece layer from the substrate to form the optical waveguide, wherein incising of the optical eyepiece layer from the substrate comprises:

pulsing a laser beam onto the adhesion promoting layer to generate nanoperforations in the substrate; and

expanding the nanoperforations to separate the optical eyepiece layer from the substrate.

2. The method of claim 1 , wherein the plurality of curable resist droplets are dispensed on the adhesion promoting layer at predefined coordinates and a predefined frequency, such that at least two adjacent droplets of the plurality of curable resist droplets have a predefined separation on the adhesion promoting layer.

3. The method of claim 1 , wherein the fluid dispensing of the plurality of curable resist droplets comprises translating one or more inkjet heads of the fluid dispenser relative to the substrate.

4. The method of claim 1 , further comprising:

superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets, the coated resist template comprising a deep grating structure or dam configured to prevent the plurality of curable resist droplets from flowing into the zero RLT region of the optical eyepiece layer;

curing, by radiation, the plurality of curable resist droplets; and

removing the coated resist template to expose a diffraction grating formed by the plurality of curable resist droplets.

5. The method of claim 1 , further comprising:

instantiating a void fiducial on the substrate to monitor the dispensing of the plurality of curable resist droplets, wherein the void fiducial is defined by a resist drop pattern of the plurality of curable resist droplets; and

instantiating a fiducial marker by superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets.

6. The method of claim 5 , further comprising:

measuring an offset between the void fiducial and the fiducial marker; and

aligning the zero RLT region of the optical eyepiece layer, by the measured offset, with a deep grating structure or dam located on the coated resist template, wherein the deep grating structure or dam corresponds to an edge of the optical eyepiece layer.

7. A method of manufacturing an optical waveguide, the method comprising:

depositing an adhesion promoting layer on a substrate;

dispensing a plurality of curable resist droplets on the adhesion promoting layer, the adhesion promoting layer disposed between and contacting the substrate and the plurality of curable resist droplets, the plurality of curable resist droplets defining an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the plurality of curable resist droplets; and

incising the optical eyepiece layer from the substrate to form the optical waveguide, wherein incising of the optical eyepiece layer from the substrate comprises forming nanoperforations in the substrate.

8. The method of claim 7 , wherein the plurality of curable resist droplets are dispensed on the adhesion promoting layer at predefined coordinates and a predefined frequency, such that at least two adjacent droplets of the plurality of curable resist droplets have a predefined separation on the adhesion promoting layer.

9. The method of claim 7 , wherein the fluid dispensing of the plurality of curable resist droplets comprises translating one or more inkjet heads of the fluid dispenser relative to the substrate.

10. The method of claim 7 , further comprising:

superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets, the coated resist template comprising a deep grating structure or dam configured to prevent the plurality of curable resist droplets from flowing into the zero RLT region of the optical eyepiece layer;

curing, by radiation, the plurality of curable resist droplets; and

removing the coated resist template to expose a diffraction grating formed by the plurality of curable resist droplets.

11. The method of claim 7 , further comprising:

instantiating a void fiducial on the substrate to monitor the dispensing of the plurality of curable resist droplets, wherein the void fiducial is defined by a resist drop pattern of the plurality of curable resist droplets; and

instantiating a fiducial marker by superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets.

12. The method of claim 7 , further comprising:

measuring an offset between the void fiducial and the fiducial marker; and

aligning the zero RLT region of the optical eyepiece layer, by the measured offset, with a deep grating structure or dam located on the coated resist template, wherein the deep grating structure or dam corresponds to an edge of the optical eyepiece layer.

13. The method of claim 7 , wherein incising of the optical eyepiece layer from the substrate comprises pulsing a laser beam onto the adhesion promoting layer to form the nanoperforations in the substrate.

14. The method of claim 13 , further comprising expanding the nanoperforations to separate the optical eyepiece layer from the substrate.

15. The method of claim 7 , further comprising:

instantiating a void fiducial on the substrate to monitor the dispensing of the plurality of curable resist droplets, wherein the void fiducial is defined by a resist drop pattern of the plurality of curable resist droplets; and

instantiating a fiducial marker by superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets.

16. A method of manufacturing an optical waveguide, the method comprising:

depositing an adhesion promoting layer on a substrate;

dispensing a plurality of curable resist droplets on the adhesion promoting layer, the adhesion promoting layer disposed between and contacting the substrate and the plurality of curable resist droplets, the plurality of curable resist droplets defining an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the plurality of curable resist droplets; and

incising the optical eyepiece layer from the substrate to form the optical waveguide, wherein incising of the optical eyepiece layer from the substrate comprises forming nanoperforations in the substrate with a laser beam.

17. The method of claim 16 , wherein the plurality of curable resist droplets are dispensed on the adhesion promoting layer at predefined coordinates and a predefined frequency, such that at least two adjacent droplets of the plurality of curable resist droplets have a predefined separation on the adhesion promoting layer.

18. The method of claim 16 , wherein the fluid dispensing of the plurality of curable resist droplets comprises translating one or more inkjet heads of the fluid dispenser relative to the substrate.

19. The method of claim 16 , further comprising:

superimposing a coated resist template onto the plurality of curable resist droplets to contact and pattern the plurality of curable resist droplets, the coated resist template comprising a deep grating structure or dam configured to prevent the plurality of curable resist droplets from flowing into the zero RLT region of the optical eyepiece layer;

curing, by radiation, the plurality of curable resist droplets; and

removing the coated resist template to expose a diffraction grating formed by the plurality of curable resist droplets.

Assignments (4)
SECURITY INTEREST Recorded Nov 3, 2025
From: MAGIC LEAP, INC.; MENTOR ACQUISITION ONE, LLC; MOLECULAR IMPRINTS, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073480/0540 →
ASSIGNMENT OF SECURITY INTEREST IN PATENTS Recorded Nov 7, 2019
From: JPMORGAN CHASE BANK, N.A.
To: CITIBANK, N.A.
Reel/Frame 050967/0138 →
PATENT SECURITY AGREEMENT Recorded Aug 22, 2019
From: MAGIC LEAP, INC.; MOLECULAR IMPRINTS, INC.; MENTOR ACQUISITION ONE, LLC
To: JP MORGAN CHASE BANK, N.A.
Reel/Frame 050138/0287 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2019
From: DONG, HUIHANG; MERCIER, THOMAS; SINGH, VIKRAMJIT; LUO, KANG; MANGALDAS, TASHA AMIT; WELCH, WILLIAM HUDSON; XUE, QIZHEN; XU, FRANK Y.
To: MAGIC LEAP, INC.
Reel/Frame 049969/0229 →