IP Library Granted Patent US 10,855,378
Granted Patent B2
US 10,855,378 · App. 16/518,916 · Granted Dec 1, 2020

Method and system for a silicon-based optical phase modulator with high modal overlap

Inventors: Subal Sahni (La Jolla, CA); Kam-Yan Hon (Oceanside, CA); Attila Mekis (Carlsbad, CA); Gianlorenzo Masini (Carlsbad, CA); Lieven Verslegers (La Jolla, CA)
Assignee: Luxtera LLC
H04B10/548G02F1/025
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Quick Facts
Patent No.
US 10,855,378
App. No.
16/518,916
Granted
Dec 1, 2020
Kind
B2
Abstract

Methods and systems for a silicon-based optical phase modulator with high modal overlap may include, in an optical modulator having a rib waveguide in which a cross-shaped depletion region separates four alternately doped sections: receiving an optical signal at one end of the optical modulator, modulating the received optical signal by applying a modulating voltage, and communicating a modulated optical signal out of an opposite end of the modulator. The modulator may be in a silicon photonically-enabled integrated circuit which may be in a complementary-metal oxide semiconductor (CMOS) die. An optical mode may be centered on the cross-shaped depletion region. The four alternately doped sections may include: a shallow depth p-region, a shallow depth n-region, a deep p-region, and a deep n-region. The shallow depth p-region may be electrically coupled to the deep p-region periodically along the length of the modulator.

Claims (44)

1. A method for optical communication, the method comprising:

in a rib waveguide having, in a cross-sectional plane perpendicular to a light path of the rib waveguide, a cross-shaped depletion region and four alternately doped sections separated by the cross-shaped depletion region, wherein the four alternately doped sections comprise a shallow depth p-region, a shallow depth n-region, a deep p-region, and a deep n-region, and wherein the shallow depth p-region is electrically coupled to the deep p-region periodically along a length of the rib waveguide where the shallow depth p-region extends across a width of the rib waveguide:

receiving an optical signal at one end of the rib waveguide; and

modulating the received optical signal by applying a modulating voltage to the rib waveguide.

2. The method according to claim 1 , wherein the rib waveguide is in a silicon photonically-enabled integrated circuit.

3. The method according to claim 2 , wherein the silicon photonically-enabled integrated circuit is in a complementary-metal oxide semiconductor (CMOS) die.

4. The method according to claim 1 , wherein an optical mode from the received optical signal is centered on the cross-shaped depletion region.

5. The method according to claim 1 , wherein the shallow depth n-region is electrically coupled to the deep n-region periodically along the length of the rib waveguide where the shallow depth n-region extends across the width of the rib waveguide.

6. The method according to claim 1 , wherein a rib section of the rib waveguide comprises the shallow depth p-region and the shallow depth n-region.

7. The method according to claim 1 , wherein a slab section of the rib waveguide comprises the deep p-region and the deep n-region.

8. The method according to claim 1 , wherein highly doped layers are on top of the shallow depth p-region and the shallow depth n-region.

9. A system for communication, the system comprising:

a rib waveguide having, in a cross-sectional plane perpendicular to a light path of the rib waveguide, a cross-shaped depletion region and four alternately doped sections separated by the cross-shaped depletion region, wherein the four alternately doped sections comprise a shallow depth p-region, a shallow depth n-region, a deep p-region, and a deep n-region, and wherein the shallow depth p-region is electrically coupled to the deep p-region periodically along a length of the rib waveguide where the shallow depth p-region extends across a width of the rib waveguide, the rib waveguide being operable to:

receive an optical signal at one end of the rib waveguide; and

modulate the received optical signal by applying a modulating voltage to the rib waveguide.

10. The system according to claim 9 , wherein the rib waveguide is in a silicon photonically-enabled integrated circuit in a complementary-metal oxide semiconductor (CMOS) die.

11. The system according to claim 9 , wherein an optical mode from the received optical signal is centered on the cross-shaped depletion region.

12. The system according to claim 9 , wherein the shallow depth n-region is electrically coupled to the deep n-region periodically along the length of the rib waveguide where the shallow depth n-region extends across the width of the rib waveguide.

13. The system according to claim 9 , wherein a rib section of the rib waveguide comprises the shallow depth p-region and the shallow depth n-region.

14. The system according to claim 9 , wherein a slab section of the rib waveguide comprises the deep p-region and the deep n-region.

15. The system according to claim 9 , wherein highly doped layers are on top of the shallow depth p-region and the shallow depth n-region.

16. A system for communication, the system comprising:

a semiconductor die having a rib waveguide, the rib waveguide comprising: a slab section with a lower n-region and a lower p-region;

a rib section on the slab section and comprising an upper n-region and an upper p-region; and

a cross-shaped depletion region, in a cross-sectional plane perpendicular to a light path of the rib waveguide, the cross-shaped depletion region formed by the lower n- region, the lower p-region, the upper n-region, and the upper p-region, wherein the upper p-region is electrically coupled to the lower p-region periodically along a length of the rib waveguide where the upper p-region extends across a width of the rib waveguide.

17. A method for optical communication, the method comprising:

in a waveguide having, in a cross-sectional plane perpendicular to a light path of a rib waveguide, a cross-shaped depletion region and four alternately doped sections separated by the cross-shaped depletion region, wherein the four alternately doped sections comprise a shallow depth p-region, a shallow depth n-region, a deep p-region, and a deep n-region, and wherein the shallow depth n-region is electrically coupled to the deep n-region periodically along a length of the rib waveguide where the shallow depth n-region extends across a width of the rib waveguide:

receiving an optical signal at one end of the rib waveguide; and

modulating the received optical signal by applying a modulating voltage to the rib waveguide.

18. The method according to claim 17 , wherein the rib waveguide is in a silicon photonically-enabled integrated circuit.

19. The method according to claim 18 , wherein the silicon photonically-enabled integrated circuit is in a complementary-metal oxide semiconductor (CMOS) die.

20. The method according to claim 17 , wherein an optical mode from the received optical signal is centered on the cross-shaped depletion region.

21. The method according to claim 17 , wherein a rib section of the rib waveguide comprises the shallow depth p-region and the shallow depth n-region.

22. The method according to claim 17 , wherein a slab section of the rib waveguide comprises the deep p-region and the deep n-region.

23. The method according to claim 17 , wherein highly doped layers are on top of the shallow depth p-region and the shallow depth n-region.

24. A system for communication, the system comprising:

a rib waveguide having, in a cross-sectional plane perpendicular to a light path of the rib waveguide, a cross-shaped depletion region and four alternately doped sections separated by the cross-shaped depletion region, wherein the four alternately doped sections comprise a shallow depth p-region, a shallow depth n-region, a deep p-region, and a deep n-region, and wherein the shallow depth n-region is electrically coupled to the deep n-region periodically along a length of the rib waveguide where the shallow depth n-region extends across a width of the rib waveguide, the rib waveguide being operable to:

receive an optical signal at one end of the rib waveguide; and

modulate the received optical signal by applying a modulating voltage to the rib waveguide.

25. The system according to claim 24 , wherein the rib waveguide is in a silicon photonically-enabled integrated circuit in a complementary-metal oxide semiconductor (CMOS) die.

26. The system according to claim 24 , wherein an optical mode from the received optical signal is centered on the cross-shaped depletion region.

27. The system according to claim 24 , wherein a rib section of the rib waveguide comprises the shallow depth p-region and the shallow depth n-region.

28. The system according to claim 24 , wherein a slab section of the rib waveguide comprises the deep p-region and the deep n-region.

29. The system according to claim 24 , wherein highly doped layers are on top of the shallow depth p-region and the shallow depth n-region.

Assignments (4)
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNOR'S NAME PREVIOUSLY RECORDED AT REEL: 058979 FRAME: 0027. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Mar 24, 2022
From: LUXTERA LLC
To: CISCO TECHNOLOGY, INC.
Reel/Frame 059496/0803 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2022
From: CISCO SYSTEMS, INC.
To: CISCO TECHNOLOGY, INC.
Reel/Frame 058979/0027 →
CHANGE OF NAME Recorded Feb 6, 2020
From: LUXTERA, INC.
To: LUXTERA LLC
Reel/Frame 052019/0811 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 24, 2019
From: SAHNI, SUBAL; HON, KAM-YAN; MEKIS, ATTILA; MASINI, GIANLORENZO; VERSLEGERS, LIEVEN
To: LUXTERA, INC.
Reel/Frame 049847/0973 →