Semiconductor storage device including hexagonal insulating layer
A semiconductor storage device is disclosed. The device includes: a first conductive layer; a second conductive layer apart from the first conductive layer in a first direction; a variable resistance layer provided between the first conductive layer and the second conductive layer; a third conductive layer provided between the first conductive layer and the variable resistance layer; a nonlinear layer provided between the first conductive layer and the third conductive layer; and a first insulating layer provided at least between the first conductive layer and the nonlinear layer or between the third conductive layer and the nonlinear layer. The first insulating layer includes nitrogen (N) and boron (B).
1. A semiconductor storage device comprising:
a first conductive layer;
a second conductive layer apart from the first conductive layer in a first direction;
a variable resistance layer provided between the first conductive layer and the second conductive layer;
a third conductive layer provided between the first conductive layer and the variable resistance layer;
a nonlinear layer provided between the first conductive layer and the third conductive layer; and
a first insulating layer provided at least between the first conductive layer and the nonlinear layer or between the third conductive layer and the nonlinear layer,
wherein
the first insulating layer has a crystal with a hexagonal structure and a (0001) plane of this crystal intersects with the first direction.
2. The semiconductor storage device according to claim 1 , wherein
a thickness of the first insulating layer in the first direction is less than or equal to 5 nanometers(nm).
3. The semiconductor storage device according to claim 1 , wherein
the nonlinear layer includes a chalcogen.
4. The semiconductor storage device according to claim 1 , wherein
the first insulating layer is provided between the first conductive layer and the nonlinear layer and between the third conductive layer and the nonlinear layer.
5. The semiconductor storage device according to claim 1 , wherein
the first insulating layer is in direct contact with the first conductive layer and the nonlinear layer.
6. The semiconductor storage device according to claim 1 , wherein
the first insulating layer is in direct contact with the third conductive layer and the nonlinear layer.
7. The semiconductor storage device according to claim 1 , wherein
the first insulating layer includes at least one of nitrogen or boron.