Hydrogen detection method using gas sensor having a metal oxide layer
View Patent ↗A hydrogen detection method using a gas sensor, in which the gas sensor includes a first conductive layer; a second conductive layer including a first region having a first thickness and a second region having a second thickness larger than the first thickness; a metal oxide layer disposed between the first conductive layer and the second conductive layer; and an insulation layer covering the first conductive layer, the second region of the second conductive layer, and the metal oxide layer and not covering the first region of the second conductive layer. The hydrogen detection method includes allowing a gas to come into contact with the first region of the second conductive layer; and detecting a hydrogen gas contained in the gas by detecting a decrease in resistance between the first conductive layer and the second conductive layer.
1. A hydrogen detection method using a gas sensor,
wherein the gas sensor includes:
a first conductive layer;
a second conductive layer including a first region having a first thickness and a second region having a second thickness larger than the first thickness;
a metal oxide layer disposed between the first conductive layer and the second conductive layer, the metal oxide layer including a bulk region and a local region surrounded by the bulk region, a degree of oxygen deficiency of the local region being higher than that of the bulk region; and
an insulation layer covering the first conductive layer, the second region of the second conductive layer, and the metal oxide layer and not covering the first region of the second conductive layer,
the hydrogen detection method comprising:
allowing a gas to come into contact with the first region of the second conductive layer; and
detecting a hydrogen gas contained in the gas by detecting a decrease in resistance between the first conductive layer and the second conductive layer,
wherein the first thickness and the second thickness are in a direction perpendicular to a stacking direction between the second conductive layer and the metal oxide layer.