Array substrate, display device, method for manufacturing them, and spliced display device

1. An array substrate, comprising:

a base substrate in which a through hole is provided;

a filling portion disposed in the through hole, comprising a recessed structure and made from a flexible material;

an electrically conductive pattern disposed on the filling portion and at least partially located in the recessed structure;

a film layer disposed on a side of the electrically conductive pattern facing away from the base substrate; and

a connecting portion disposed on a side of the base substrate facing away from the electrically conductive pattern,

wherein the connecting portion is electrically connected to the electrically conductive pattern; and

wherein the connecting portion is located in the recessed structure to be electrically connected to the electrically conductive pattern.

2. The array substrate according to claim 1 , wherein the base substrate is made from a rigid material.

3. The array substrate according to claim 1 , wherein the recessed structure has a depth less than or equal to a thickness of the filling portion.

4. The array substrate according to claim 1 , wherein

the electrically conductive pattern is of a single-layer structure, and the electrically conductive pattern is made from copper; or

the electrically conductive pattern is of a three-layer laminated structure, an intermediate layer of the three-layer laminated structure is made from aluminum, and other two layers on both sides of the intermediate layer are made from titanium.

5. The array substrate according to claim 2 , wherein the rigid material is selected from glass, plastic, ceramic or quartz, and the flexible material is selected from poly-p-xylylene or polyimide.

6. A display device, comprising the array substrate according to claim 1 ,

wherein the display device further comprises a chip disposed on a side of the connecting portion in the array substrate facing away from the base substrate, the chip being electrically connected to the connecting portion.

7. A spliced display device, comprising a plurality of the display devices according to claim 6 .

8. A method for manufacturing a display device, comprising:

providing the array substrate according to claim 1 ;

bonding a chip to a side of a connecting portion facing away from the base substrate, and electrically connecting the chip to the connecting portion.

9. The method according to claim 8 , wherein the recessed structure has a depth less than a thickness of the filling portion, and the method further comprises: etching through the recessed structure from a side of the base substrate of the array substrate facing away from the film layer to expose the electrically conductive pattern.

10. A method for manufacturing an array substrate, comprising:

forming a through hole in a base substrate;

filling a flexible material in the through hole, processing the flexible material filled in the through hole to form a filling portion, the filling portion comprising a recessed structure;

forming an electrically conductive pattern on the filling portion, the electrically conductive pattern being at least partially located in the recessed structure;

forming a film layer on a side of the electrically conductive pattern facing away from the base substrate; and

forming a connecting portion on the side of the base substrate of the array substrate facing away from the electrically conductive pattern, wherein the connecting portion extending through the filling portion and being electrically connected. to the electrically conductive pattern.

11. The method according to claim 10 , wherein the forming a through hole in the base substrate comprises:

modifying a through hole region where a through hole is to be formed on the base substrate such that the through hole region is more easily etched by an etching solution than other regions on the base substrate; and

placing the base substrate in the etching solution, and forming the through hole in the through hole region by etching using the etching solution.

12. The method according to claim 11 , wherein, before placing the base substrate in the etching solution, the forming a through hole in the base substrate further comprises:

forming an anti-etching protective film on a side of the base substrate.

13. The method according to claim 11 , wherein the through hole region is irradiated by laser to modify the through hole region.

14. The method according to claim 10 , wherein the forming a through hole in the base substrate comprises:

forming an anti-etching protective film on at least one side of opposite sides of the base substrate in a region other than a through hole region where a through hole is to be formed; and

placing the base substrate in an etching solution, and forming the through hole in the through hole region by etching using the etching solution.

15. The method according to claim 14 , wherein, before placing the base substrate in the etching solution, the forming a through hole in the base substrate further comprises:

modifying the through hole region on the base substrate such that the through hole region is more easily etched by the etching solution than other regions on the base substrate.

16. The method according to claim 10 , wherein the forming an electrically conductive pattern on the filling portion comprises:

forming an electrically conductive film on the filling portion by sputtering, and patterning the electrically conductive film to form the electrically conductive pattern.

17. The method according to claim 10 , wherein, after forming the electrically conductive pattern, the method further comprises removing the electrically conductive pattern outside the recessed structure by a chemical mechanical polishing process.