GRAPHENE SYNTHESIS CHAMBER AND METHOD OF SYNTHESIZING GRAPHENE BY USING THE SAME
A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.
1 . A roll-to-roll graphene synthesis chamber comprising:
a chamber case;
a first roller around which a metal film is wound before graphene is synthesized, and a second roller around which the metal film is wound after graphene is synthesized;
a gas supplier which supplies a gas comprising a carbon gas into an inner space of the chamber case;
a main heater which emits a light to the inner space to heat the metal film;
an auxiliary heater which absorbs the light emitted by the main heater and emits a radiant heat toward the metal film, the auxiliary heater comprising a first auxiliary heater and a second auxiliary heater, and
wherein the first auxiliary heater and the second auxiliary heater are spaced apart from each other and define an auxiliary space therebetween for synthesizing graphene on the metal film, and
wherein the metal film is placed in the auxiliary space.
2 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the roll-to-roll graphene synthesis chamber is configured to provide that a temperature of the auxiliary space is about 1000° C. or higher during graphene synthesis.
3 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the roll-to-roll graphene synthesis chamber is configured to provide that a temperature of the auxiliary space is constant during graphene synthesis.
4 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the gas supplier supplies the gas into the auxiliary space.
5 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the main heater comprises:
a halogen lamp; and
a window surrounding an outer circumference of the halogen lamp.
6 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the gas supplier comprises an extension portion extending toward the auxiliary space.
7 . The roll-to-roll graphene synthesis chamber of claim 1 further comprising:
a gas discharger which discharges the gas flowing through the auxiliary space to an outside.
8 . The roll-to-roll graphene synthesis chamber of claim 7 , wherein the gas discharger comprises an extension portion extending toward the auxiliary space.
9 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the metal film is spaced apart from the first auxiliary heater and the second auxiliary heater.
10 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the first auxiliary heater and the second auxiliary heater comprise graphite.
11 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the main heater comprises a first main heater and a second main heater.
12 . The roll-to-roll graphene synthesis chamber of claim 11 , wherein the first auxiliary heater is disposed between the first main heater and the metal film, and the second auxiliary heater is disposed between the second main heater and the metal film.
13 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the first roller and the second roller are disposed outside the chamber case.
14 . The roll-to-roll graphene synthesis chamber of claim 13 , wherein the chamber case comprises an inlet through which the metal film is introduced into the chamber case, and an outlet through which the metal film is discharged from the chamber case.
15 . The roll-to-roll graphene synthesis chamber of claim 1 , wherein the chamber case comprises a barrier wall dividing the inner space of the chamber case.
16 . The roll-to-roll graphene synthesis chamber of claim 1 further comprising a metal film protector covering the metal film wound around the first roller and the second roller.
17 . The roll-to-roll graphene synthesis chamber of claim 15 further comprising a metal film protector covering the metal film wound around the first roller and the second roller.
18 . The roll-to-roll graphene synthesis chamber of claim 15 , wherein the barrier wall comprises an opening where the metal film is passed through.
19 . The roll-to-roll graphene synthesis chamber of claim 15 , wherein the barrier wall comprises an opening/shutting portion.